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    • 7. 发明申请
    • MICROELECTROMECHANICAL INERTIAL SENSOR, IN PARTICULAR FOR FREE-FALL DETECTION APPLICATIONS
    • 微电子实时传感器,特别适用于自由落体检测应用
    • US20080011080A1
    • 2008-01-17
    • US11777702
    • 2007-07-13
    • Angelo MerassiSarah ZerbiniErnesto LasalandraBenedetto Vigna
    • Angelo MerassiSarah ZerbiniErnesto LasalandraBenedetto Vigna
    • G01P15/18G01P15/125
    • G11B19/04G01P15/0891G01P15/125G01P15/18G01P2015/082
    • An inertial sensor provided with a detection structure sensitive to a first, a second and a third component of acceleration along respective directions of detection, and generating respective electrical quantities as a function of said components of acceleration. The detection structure supplies at output a resultant electrical quantity obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration acting on the inertial sensor, given by a vector sum of the components of acceleration. In particular, the detection structure is of a microelectromechanical type, and comprises a mobile portion made of semiconductor material forming with a fixed portion a first, a second and a third detection capacitor, and an electrical-interconnection portion, connecting the detection capacitors in parallel; the resultant electrical quantity being the capacitance obtained from said connection in parallel.
    • 一种惯性传感器,其具有对沿着检测方向的加速度的第一,第二和第三分量敏感的检测结构,并且产生作为所述加速度分量的函数的相应的电量。 检测结构在输出时提供作为所述电量的组合获得的合成电量,并且与由加速度分量的矢量和给出的作用在惯性传感器上的合成加速度的值相关联。 特别地,检测结构是微机电型的,并且包括由半导体材料制成的可移动部分,该半导体材料形成有固定部分,第一,第二和第三检测电容器以及并联连接检测电容器的电互连部分 ; 所得到的电量是从所述连接并联获得的电容。