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1. 发明授权

US07258008B2 Micro-electro-mechanical gyroscope having electrically insulated regions 有权
标题翻译：具有电绝缘区域的微机电陀螺仪
公开(公告)号：US07258008B2
公开(公告)日：2007-08-21
申请号：US11317623
申请日：2005-12-22
申请人： Guido Spinola Durante , Simone Sassolini , Andrea Rusconi Clerici
发明人： Guido Spinola Durante , Simone Sassolini , Andrea Rusconi Clerici
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01C19/5762 , G01C19/5747
摘要： An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The suspended mass is formed by an external part and an internal part, electrically separated by an electrical-insulation region having a closed annular shape. The electrical-insulation region is laterally completely surrounded by the external part and by the internal part. In one embodiment, the suspended mass has the shape of a closed frame delimiting an opening, the sensing mass is formed inside the opening and is connected to the internal part, and the mobile actuation electrodes are connected to the external part.
摘要翻译：集成陀螺仪包括悬挂质量; 从悬浮物延伸的移动致动电极; 以及通过联接弹簧连接到致动质量块的感测质量。悬挂质量由外部部分和内部部分形成，由具有闭合环形形状的电绝缘区域电隔离。电绝缘区域由外部部分和内部部分横向完全包围。在一个实施例中，悬挂质量具有限定开口的闭合框架的形状，感测质量形成在开口内部并且连接到内部部分，并且移动致动电极连接到外部部分。

2. 发明授权

US06858810B2 Sensor with failure threshold 有权
标题翻译：传感器具有故障阈值
公开(公告)号：US06858810B2
公开(公告)日：2005-02-22
申请号：US10650452
申请日：2003-08-27
申请人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
发明人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
IPC分类号： B81B3/00 , G01P15/00 , G01P15/06 , G01P15/08 , G01P15/18 , H01H1/00 , H01H35/14 , H01L29/84
CPC分类号： G01P1/127 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H1/0036 , H01H35/146
摘要： An inertial sensor with failure threshold includes a first body and a second body, which can move relative to one another and are constrained by a plurality of elastic elements, and a sample element connected between the first body and the second body and shaped so as to be subjected to a stress when the second body is outside of a relative resting position with respect to the first body. The sample element has at least one weakened region. The sensor may also include additional sample elements connected between the first and second bodies.
摘要翻译：具有故障阈值的惯性传感器包括第一主体和第二主体，其可以相对于彼此移动并被多个弹性元件约束;以及样本元件，其连接在第一主体和第二主体之间，并且成形为当第二主体相对于第一主体位于相对静止位置之外时受到应力。样品元件具有至少一个弱化区域。传感器还可以包括连接在第一和第二主体之间的附加样本元件。

3. 发明授权

US07678599B2 Process for the fabrication of an inertial sensor with failure threshold 有权
标题翻译：制造具有故障阈值的惯性传感器的过程
公开(公告)号：US07678599B2
公开(公告)日：2010-03-16
申请号：US11566590
申请日：2006-12-04
申请人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
发明人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
IPC分类号： H01L21/00
CPC分类号： H01H1/0036 , G01P1/023 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H35/146
摘要： A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.
摘要翻译：用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。该方法还可以包括在基底上形成连接到身体的附加样品元件。

4. 发明授权

US07694563B2 Microelectromechanical integrated sensor structure with rotary driving motion 有权
标题翻译：具有旋转驱动运动的微机电一体化传感器结构
公开(公告)号：US07694563B2
公开(公告)日：2010-04-13
申请号：US11684243
申请日：2007-03-09
申请人： Guido Spinola Durante , Alessandro Balzelli Ludovico , Sarah Zerbini
发明人： Guido Spinola Durante , Alessandro Balzelli Ludovico , Sarah Zerbini
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01C19/5712
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a first sensing mass is connected to the driving mass via elastic supporting elements so as to perform a first detection movement in a presence of a first external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the first sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the first detection movement. A second sensing mass is connected to the driving mass so as to perform a second detection movement in a presence of a second external stress. A first movement is a rotation about an axis lying in a plane, and a second movement is a linear movement along an axis of the plane.
摘要翻译：集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且第一感测质量块通过弹性支撑元件连接到驱动质量块，以便在存在第一外部部件的情况下执行第一检测运动强调。驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。在驱动质量块内设有开口，第一传感块布置在开口内。弹性支撑和锚固元件使得第一感测质量在旋转运动中固定到驱动质量块，并且在第一检测运动中基本上与驱动质量分离。第二感测质量体连接到驱动质量块，以便在存在第二外部应力的情况下执行第二检测运动。第一运动是围绕位于平面中的轴的旋转，并且第二运动是沿着平面的轴线的线性运动。

5. 发明授权

US07437933B2 Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof 有权
标题翻译：具有电绝缘区域的微机电结构及其制造方法
公开(公告)号：US07437933B2
公开(公告)日：2008-10-21
申请号：US11177474
申请日：2005-07-07
申请人： Guido Spinola Durante , Simone Sassolini , Marco Ferrera , Mauro Marchi
发明人： Guido Spinola Durante , Simone Sassolini , Marco Ferrera , Mauro Marchi
IPC分类号： H01L21/306 , H01L23/24 , G01P9/04
CPC分类号： G01C19/5769
摘要： Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of a first electrically insulating material extends through the suspended mass and divides it into at least one first electrically insulated suspended region and one second electrically insulated suspended region. A plug element of a second electrically insulating material different from the first electrically insulating material is formed underneath the insulating region and constitutes a barrier between the insulating region and the air gap for preventing removal of the insulating region during fabrication, when an etching agent is used for removing a sacrificial layer and forming the air gap.
摘要翻译：由半导体材料的基板形成的微机电结构和在基板上方延伸并通过气隙分离的悬浮物。第一电绝缘材料的绝缘区域延伸穿过悬挂质量并将其分成至少一个第一电绝缘悬浮区域和一个第二电绝缘悬浮区域。在绝缘区域的下面形成有与第一电绝缘材料不同的第二电绝缘材料的插头元件，并且在使用蚀刻剂时，在绝缘区域和气隙之间形成阻挡层，以防止在制造期间去除绝缘区域用于去除牺牲层并形成气隙。

6. 发明申请

US20070175865A1 PROCESS FOR THE FABRICATION OF AN INERTIAL SENSOR WITH FAILURE THRESHOLD 有权
标题翻译：具有故障阈值的惯性传感器的制造工艺
公开(公告)号：US20070175865A1
公开(公告)日：2007-08-02
申请号：US11566590
申请日：2006-12-04
申请人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
发明人： Sarah Zerbini , Angelo Merassi , Guido Spinola Durante , Biagio De Masi
IPC分类号： C23F1/00
CPC分类号： H01H1/0036 , G01P1/023 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H35/146
摘要： A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.
摘要翻译：用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。该方法还可以包括在基底上形成连接到身体的附加样品元件。

7. 发明授权

US06928872B2 Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane 有权
标题翻译：半导体材料的集成陀螺仪在传感器平面内具有至少一个敏感轴
公开(公告)号：US06928872B2
公开(公告)日：2005-08-16
申请号：US10443647
申请日：2003-05-21
申请人： Guido Spinola Durante , Sarah Zerbini , Angelo Merassi
发明人： Guido Spinola Durante , Sarah Zerbini , Angelo Merassi
IPC分类号： G01C19/5719 , G01C19/00 , G01P3/44 , G01P9/00 , G01P15/08 , G01P15/125
CPC分类号： G01C19/5719
摘要： An integrated gyroscope, including an acceleration sensor formed by: a driving assembly; a sensitive mass extending in at least one first and second directions and being moved by the driving assembly in the first direction; and by a capacitive sensing electrode, facing the sensitive mass. The acceleration sensor has an rotation axis parallel to the second direction, and the sensitive mass is sensitive to forces acting in a third direction perpendicular to the other directions. The capacitive sensing electrode is formed by a conductive material region extending underneath the sensitive mass and spaced therefrom by an air gap.
摘要翻译：一种集成陀螺仪，包括加速度传感器，该加速度传感器由以下部件构成：驱动组件; 在至少一个第一和第二方向上延伸并被驱动组件沿第一方向移动的敏感物质; 并通过电容式感测电极面对敏感质量。加速度传感器具有平行于第二方向的旋转轴，并且敏感质量对垂直于其它方向的第三方向作用的力敏感。电容感测电极由传导材料区域形成，导电材料区域延伸在敏感质量块的下方并与气隙隔开。

8. 发明授权

US06766689B2 Integrated gyroscope of semiconductor material 有权
标题翻译：半导体材料的集成陀螺仪
公开(公告)号：US06766689B2
公开(公告)日：2004-07-27
申请号：US10128133
申请日：2002-04-23
申请人： Guido Spinola Durante , Sarah Zerbini , Simone Gardella
发明人： Guido Spinola Durante , Sarah Zerbini , Simone Gardella
IPC分类号： G01P904
CPC分类号： G01C19/5747
摘要： The gyroscope is formed by a driving system including a driving mass having an open concave shape; an accelerometer including a sensing mass and comprising mobile sensing electrodes; a linkage connecting the driving mass to the sensing mass. The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes extend integral with the sensing mass from the peripheral portion not facing the driving mass and are interleaved with fixed sensing electrodes. Thereby, there are no passing electrical connections extending below the sensing mass. Moreover the linkage includes springs placed equidistant from the center of gravity of the accelerometer, and the gyroscope is anchored to the substrate with anchoring springs placed equidistant from the center of gravity of the assembly formed by the driving system and by the accelerometer.
摘要翻译：陀螺仪由包括具有开口凹形状的驱动块的驱动系统形成; 包括感测质量并包括移动感测电极的加速度计; 将驱动质量与感测质量连接的连杆。感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。移动感测电极与来自不面向驱动质量块的周边部分的感测质量一体地延伸并且与固定感测电极交错。因此，在感测质量下方没有延伸的电连接。此外，联动装置包括与加速度计的重心等距离的弹簧，并且陀螺仪通过与由驱动系统和加速度计形成的组件的重心等距离的锚定弹簧锚定到基底。

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