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    • 2. 发明申请
    • METHOD FOR CHEMICALLY TREATING A SUBSTRATE
    • 化学处理基材的方法
    • US20110183524A1
    • 2011-07-28
    • US13059560
    • 2009-09-29
    • Andreas TeppeBerthold SchumDieter FrankeIngo SchwirtlichKnut VaasWilfried Schmidt
    • Andreas TeppeBerthold SchumDieter FrankeIngo SchwirtlichKnut VaasWilfried Schmidt
    • H01L21/306
    • H01L21/30604H01L21/67057H01L21/67086H01L31/1804Y02E10/547Y02P70/521
    • A method for chemically treating a disc-shaped substrate having a bottom surface, a top surface and side surfaces by contacting a process medium that is fluid-chemically active with at least the bottom surface of the substrate. The substrate is moved relative to the process medium while forming a triple line between the substrate, the substrate medium and the atmosphere surrounding the substrate and medium. In order to chemically remove errors, particularly in the side surfaces, relative motion should be carried out while avoiding a contacting of the process medium with the top surface of the substrate, where the triple line is formed at a desired height of the side surface facing away from the process medium flow side in relation to the relative motion between the substrate and the process medium. In this way, the atmosphere can be adjusted in relation to the partial pressures of the components in the process medium such that the top surface preserves hydrophobic characteristics.
    • 一种用于通过使具有流体化学活性的处理介质与至少底物的底表面接触来化学处理具有底表面,顶表面和侧表面的盘形基底的方法。 衬底相对于处理介质移动,同时在衬底,衬底介质和围绕衬底和介质的气氛之间形成三线。 为了化学去除错误,特别是在侧表面中,应当进行相对运动,同时避免处理介质与基板的顶表面的接触,其中三线形成在面向侧面的所需高度 相对于衬底和处理介质之间的相对运动而离开工艺介质流动侧。 以这种方式,可以相对于处理介质中的组分的分压来调整气氛,使得顶表面保持疏水特性。
    • 8. 发明授权
    • System for monitoring units excited by oscillations
    • 监控振荡系统
    • US06233527B1
    • 2001-05-15
    • US09125046
    • 1999-02-17
    • Dieter FrankeSteffen BühlerMartin Weichselbaumer
    • Dieter FrankeSteffen BühlerMartin Weichselbaumer
    • G06F1500
    • G07C3/00G01H1/00
    • A system for monitoring units excited by oscillations, having a computer-controlled central processing unit and a computer-controlled, transportable measuring apparatus. The measuring apparatus is programmed by the central processing unit, by way of a data transmission, with at least some measuring points which can be inspected in a prescribable time period within prescribable time limits from a total number of measuring points assigned to the units. The measuring points are automatically displayed in the measuring apparatus and are processed using the measuring apparatus, in order to execute a measuring task determined by the central processing unit. After ending the route, the measuring apparatus transmits the measured data to the central processing unit by way of a data transmission. The central processing unit has an evaluator and/or display for the measured data. In the central processing unit, for each of the measuring points, at least one standard measuring task and at least one extended measuring task is stored. These are loaded into the measuring apparatus according to the selected route. Only the standard measuring task is carried out at the measuring points and at least one of the extended measuring tasks is automatically displayed and carried out at the relevant measuring point as a function of the occurrence of a registrable event which can be assigned to the unit having the measuring point. The measurement results of the standard and extended measurements carried out are transferred into the central processing unit and evaluated.
    • 用于监测被振荡激励的单元的系统,具有计算机控制的中央处理单元和计算机控制的可运送的测量装置。 测量装置由中央处理单元通过数据传输由至少一些测量点编程,该测量点可以在从分配给单元的总测量点的规定时间内以可规定的时间段内进行检查。 测量点自动显示在测量装置中,并使用测量装置进行处理,以便执行由中央处理单元确定的测量任务。 在结束路线之后,测量装置通过数据传输将测量数据发送到中央处理单元。 中央处理单元具有用于测量数据的评估器和/或显示器。 在中央处理单元中,对于每个测量点,存储至少一个标准测量任务和至少一个扩展测量任务。 根据所选择的路线将它们装载到测量装置中。 在测量点仅进行标准测量任务,并且至少一个扩展测量任务在相关测量点处被自动显示并执行,作为可注册事件的发生的功能,该可注册事件可被分配给具有 测量点。 将进行的标准和扩展测量的测量结果转移到中央处理单元中并进行评估。
    • 9. 发明申请
    • Carbonyl-substituted titanocenes
    • 羰基取代的二茂钛
    • US20090005338A1
    • 2009-01-01
    • US11942659
    • 2007-11-19
    • Andreas GansauerAram ProkopAnja SeligDieter Franke
    • Andreas GansauerAram ProkopAnja SeligDieter Franke
    • A61K31/7068C07F17/00A61P35/00A61P31/00A61P37/00A61P29/00A61K31/28
    • A61K31/28A61K31/7008C07F17/00Y02A50/411A61K2300/00
    • A medicament containing a compound of the following formulas (Ia) and (Ib): wherein Z is selected from the group consisting of a covalent bond, at least one at least divalent hetero atom, a saturated, unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain, a saturated or unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain provided with hetero atoms in the chain thereof, or combinations thereof; R′1 to R′4 and R″1 to R″5 independently represent H, at least one hetero atom, especially oxygen, nitrogen or halogens, a saturated, unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain, a saturated or unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain provided with hetero atoms in the chain thereof, or combinations thereof; the two cyclopentadienyl rings are optionally linked together via any of residues R″1 to R″5; R1 and R2 independently represent H, a hetero atom, especially oxygen, nitrogen or halogens, a saturated, unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain, a saturated or unsaturated, branched, unbranched and/or cyclic, substituted or unsubstituted hydrocarbon chain provided with hetero atoms in the chain thereof, or combinations thereof; A′, A″ is independently F, Cl, Br, I and/or a physiologically acceptable acid residue of an organic or inorganic acid; n is a positive integer, especially 1, 2, 3; X=O, S, NH, NR3 or NH4R5, wherein R3, R4 and R5 independently have the meanings as mentioned above for R′1 to R′4; Y is a covalent bond, O, S or NR6, wherein R6 has the meanings as mentioned above for R′1 to R′4.
    • 含有下式(Ia)和(Ib)化合物的药物:其中Z选自共价键,至少一个至少二价杂原子,饱和,不饱和,支链,无支链和/或 环状,取代或未取代的烃链,在其链中提供有杂原子的饱和或不饱和,支链,无支链和/或环状,取代或未取代的烃链,或其组合; R'1至R'4和R'1至R'5独立地表示H,至少一个杂原子,特别是氧,氮或卤素,饱和,不饱和,支链,未分支和/或环状,取代或未取代的 烃链,在其链中提供有杂原子的饱和或不饱和,支链,非支链和/或环状,取代或未取代的烃链,或其组合; 两个环戊二烯基环任选地通过残基R'1至R'5任意连接在一起; 饱和的,不饱和的,支链的,无支链的和/或环状的取代或未取代的烃链,饱和或不饱和的,支链的,非支链的和/或环状的, 在其链中提供有杂原子的取代或未取代的烃链,或其组合; A',A“独立地是F,Cl,Br,I和/或有机或无机酸的生理上可接受的酸残基; n是正整数,特别是1,2,3; X = O,S,NH,NR 3或NH 4 R 5,其中R 3,R 4和R 5独立地具有如上对R'1至R'4所述的含义; Y是共价键,O,S或NR 6,其中R 6具有如上对R'1至R'4所述的含义。