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    • 3. 发明申请
    • DEEP SUBMICRON AND NANO CMOS SINGLE PHOTON PHOTODETECTOR PIXEL WITH EVENT BASED CIRCUITS FOR READOUT DATA-RATE REDUCTION COMMUNICATION SYSTEM
    • DEEP SUBMICRON和NANO CMOS单根光电子像素与基于事件的电路,用于读取数据速率减少通信系统
    • US20100245809A1
    • 2010-09-30
    • US12531191
    • 2008-03-17
    • Andreas G. AndreouMiriam Adlerstein MarwickPhilippe O. Pouliquen
    • Andreas G. AndreouMiriam Adlerstein MarwickPhilippe O. Pouliquen
    • H01L27/144H01L31/107G01J1/44
    • H01L27/14603H01L31/107
    • An avalanche photodiode and a sensor array comprising an array of said avalanche photodiodes is disclosed. Then avalanche photodiode comprises a substrate of a first conductivity type; a first well of a second conductivity type formed within the substrate; a second well of the second conductivity type formed substantially overlying and extending into the first well; a heavily doped region of the first conductivity type formed substantially overlying and extending into the first well, the junction between the heavily doped region and the second well forming an avalanche multiplication region; a guard ring formed from a first conductivity material positioned substantially about the periphery of the multiplication region at least partially underlying the heavily doped region; and an outer well ring of the second conductivity type formed about the perimeter of the deep well and the guard ring. The sensor array comprises a plurality of pixel elements, each of the pixel elements being configured to operate on discrete value continuous time (DVCT) basis. Each of the pixel elements can include the avalanche photodiode previously described.
    • 公开了一种雪崩光电二极管和包括所述雪崩光电二极管阵列的传感器阵列。 然后雪崩光电二极管包括第一导电类型的衬底; 在衬底内形成的第二导电类型的第一阱; 第二导电类型的第二阱基本上覆盖并延伸到第一阱中; 第一导电类型的重掺杂区域基本上覆盖并延伸到第一阱中,重掺杂区域和形成雪崩倍增区域的第二阱之间的结; 由第一导电材料形成的保护环,该第一导电材料基本上围绕至少部分地位于重掺杂区域下方的倍增区域的周边; 以及围绕深井和保护环的周边形成的第二导电类型的外阱环。 传感器阵列包括多个像素元件,每个像素元件被配置为基于离散值连续时间(DVCT)进行操作。 每个像素元件可以包括先前描述的雪崩光电二极管。