专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080232672A1 DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFER AND USE OF THE DEVICE IN INSPECTION SYSTEM FOR WAFERS 有权
标题翻译：用于评估WAFER边缘区域中缺陷的设备和方法以及设备在WAFERS检查系统中的使用
公开(公告)号：US20080232672A1
公开(公告)日：2008-09-25
申请号：US12039047
申请日：2008-02-28
申请人： Andreas Birkner , Michael Hofmann , Wolfgang Vollrath
发明人： Andreas Birkner , Michael Hofmann , Wolfgang Vollrath
IPC分类号： G06K9/00
CPC分类号： G01N21/9503
摘要： A device for evaluating defects in the edge area of a wafer (6) is disclosed. The evaluation may also be performed automatically. In particular, the device includes three cameras (25, 26, 27), each provided with an objective (30), wherein a first camera (25) is arranged such that the first camera (25) is opposite to an edge area on the upper surface (6a) of the wafer (6), wherein a second camera (26) is arranged such that the second camera (26) is opposite to a front surface (6b) of the wafer (6), and wherein a third camera (27) is arranged such that the third camera (27) is opposite to an edge area on the lower surface (6c) of the wafer (6).
摘要翻译：公开了一种用于评估晶片（6）的边缘区域中的缺陷的装置。评价也可以自动进行。特别地，该装置包括三个相机（25,26,27），每个相机设置有物镜（30），其中第一相机（25）布置成使得第一相机（25）与第一相机晶片（6）的上表面（6a），其中第二相机（26）布置成使得第二相机（26）与晶片（6）的前表面（6b）相对，并且其中第三相机（27）布置成使得第三相机（27）与晶片（6）的下表面（6c）上的边缘区域相对。

2. 发明授权

US08089622B2 Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers 有权
标题翻译：用于评估晶片边缘区域中的缺陷并在晶片检查系统中使用该装置的装置和方法
公开(公告)号：US08089622B2
公开(公告)日：2012-01-03
申请号：US12039047
申请日：2008-02-28
申请人： Andreas Birkner , Michael Hofmann , Wolfgang Vollrath
发明人： Andreas Birkner , Michael Hofmann , Wolfgang Vollrath
IPC分类号： G01N21/00 , G06K9/62
CPC分类号： G01N21/9503
摘要： A device for evaluating defects in the edge area of a wafer (6) is disclosed. The evaluation may also be performed automatically. In particular, the device includes three cameras (25, 26, 27), each provided with an objective (30), wherein a first camera (25) is arranged such that the first camera (25) is opposite to an edge area on the upper surface (6a) of the wafer (6), wherein a second camera (26) is arranged such that the second camera (26) is opposite to a front surface (6b) of the wafer (6), and wherein a third camera (27) is arranged such that the third camera (27) is opposite to an edge area on the lower surface (6c) of the wafer (6).
摘要翻译：公开了一种用于评估晶片（6）的边缘区域中的缺陷的装置。评价也可以自动进行。特别地，该装置包括三个相机（25,26,27），每个相机设置有物镜（30），其中第一相机（25）布置成使得第一相机（25）与第一相机晶片（6）的上表面（6a），其中第二相机（26）布置成使得第二相机（26）与晶片（6）的前表面（6b）相对，并且其中第三相机（27）被布置成使得第三相机（27）与晶片（6）的下表面（6c）上的边缘区域相对。

3. 发明授权

US06789436B2 Method and arrangement for transporting and inspecting semiconductor substrates 有权
标题翻译：运输和检查半导体衬底的方法和装置
公开(公告)号：US06789436B2
公开(公告)日：2004-09-14
申请号：US10379677
申请日：2003-03-06
申请人： Andreas Birkner , Frank Bernhardt , Knut Hiltawski
发明人： Andreas Birkner , Frank Bernhardt , Knut Hiltawski
IPC分类号： B65G4907
CPC分类号： H01L21/67745 , H01L21/67161 , H01L21/6719 , H01L21/67207 , H01L21/67259 , H01L21/67748
摘要： The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).
摘要翻译：本发明涉及一种用于运输和检查具有至少三个工作站（8,10,12）的半导体衬底（6）的装置，具有至少三个臂（14a，14b，14c）的更换器（14）设计用于将各个工作站（8,10,12）加载到半导体衬底（6）上。测量装置（15）被分配给第二工作站（10），确定半导体衬底（6）的当前位置的偏差，使其可用于该装置（3）以进一步检查半导体衬底（6））。此外，更换器（14）没有配备用于将半导体衬底（6）精确地定位在工作站（8,10,12）中的装置。

4. 发明授权

US07028565B2 Method and arrangement for transporting and inspecting semiconductor substrates 有权
标题翻译：运输和检查半导体衬底的方法和装置
公开(公告)号：US07028565B2
公开(公告)日：2006-04-18
申请号：US10768688
申请日：2004-02-02
申请人： Andreas Birkner , Frank Bernhardt , Knut Hiltawski
发明人： Andreas Birkner , Frank Bernhardt , Knut Hiltawski
IPC分类号： B65G49/07
CPC分类号： H01L21/67745 , H01L21/67161 , H01L21/6719 , H01L21/67207 , H01L21/67259 , H01L21/67748
摘要： The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).
摘要翻译：本发明涉及一种用于传送和检查具有至少三个工作站（8,10,12）的半导体衬底（6）的装置，一个更换器（14），其具有至少三个臂（14a，14b，14c ），其被设计为将半导体衬底（6）加载到各个工作站（8,10,12）。测量装置（15）被分配给第二工作站（10），确定半导体衬底（6）的当前位置的偏差，使其可用于该装置（3）以进一步检查半导体衬底（6））。此外，更换器（14）没有配备用于将半导体衬底（6）精确地定位在工作站（8,10,12）中的装置。

5. 发明授权

US4406790A Method for operating a biological sewage purification plant 失效
标题翻译：操作生物污水净化装置的方法
公开(公告)号：US4406790A
公开(公告)日：1983-09-27
申请号：US396940
申请日：1982-07-09
申请人： Andreas Birkner
发明人： Andreas Birkner
IPC分类号： C02F3/02 , C02F3/16
CPC分类号： C02F3/02 , C02F3/16 , Y02W10/15 , Y10S261/76
摘要： A method and apparatus for operating a biological sewage purification plant wherein the water to be treated is aerated in a tank containing bacteria by means of a rotating impeller or the like, characterized in that a heating medium, preferably steam, is fed onto the surface of the water to maintain it at the optimum temperature for facilitating decomposition by bacteria without excessive heating and resultant destruction of the bacteria.
摘要翻译：一种用于操作生物污水净化设备的方法和装置，其中待处理的水通过旋转叶轮等在含有细菌的罐中充气，其特征在于，将加热介质（优选蒸汽）供给到水保持在最佳温度，以便于细菌分解，而不会过度加热，从而破坏细菌。

6. 发明授权

US06962471B2 Substrate conveying module and system made up of substrate conveying module and workstation 有权
标题翻译：基板输送模块和系统由基板输送模块和工作站组成
公开(公告)号：US06962471B2
公开(公告)日：2005-11-08
申请号：US09880100
申请日：2001-06-14
申请人： Andreas Birkner , Knut Hiltawski , Karsten Urban , Joachim Wienecke
发明人： Andreas Birkner , Knut Hiltawski , Karsten Urban , Joachim Wienecke
IPC分类号： H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67196 , H01L21/67775
摘要： The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).
摘要翻译：本发明基于用于将基板输送到工作站（3）中用于基板的检查，测量或处理的基板输送模块（1），其中由于连接元件（4a，b）至少在两侧基板输送模块（1）的壁（1a，b，c）和/或工作站（3）的至少两个侧壁（3a，b，c，d），基板输送模块（1）可以在工作站（3）的安装位置处以相对于工作站（3）的不同取向灵活地连接到工作站（3）并且/或可以在不同点处联接到工作站（3）。

7. 发明授权

US5636724A Device for transferring a transport object between two end positions 失效
标题翻译：用于在两个终端位置之间传输传输对象的设备
公开(公告)号：US5636724A
公开(公告)日：1997-06-10
申请号：US396673
申请日：1995-03-01
申请人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
发明人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
IPC分类号： B65G49/07 , H01L21/677 , H01R13/24 , H01R41/00 , B65G47/24
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.
摘要翻译：用于在两个终端位置之间传送传输对象的设备的目的是在确保高度灵活的传送的同时，在可靠性和洁净室条件以及冗长的传输路径中排除负面影响。为了控制用于传送的驱动器的可移动部分的传感器和致动器的操作，这些传感器和致动器之间的电接触以及位于驱动器的静止部分中的供应单元仅在两个端部位置进行。该器件特别用于制造半导体，例如用于对半导体加工机进行充电，但不限于此。

8. 发明申请

US20130205822A1 SYSTEM AND METHOD FOR COOLING A COMPUTER SYSTEM 审中-公开
标题翻译：用于冷却计算机系统的系统和方法
公开(公告)号：US20130205822A1
公开(公告)日：2013-08-15
申请号：US13808310
申请日：2011-02-10
申请人： Peter Heiland , Andreas Birkner
发明人： Peter Heiland , Andreas Birkner
IPC分类号： F25D31/00
CPC分类号： F25D31/00 , G01M3/04 , H05K7/2079 , H05K7/20827 , H05K7/20836
摘要： The invention relates to a system for cooling a computing system, the computing system being cooled using at least two cooling circuits.
摘要翻译：本发明涉及一种用于冷却计算系统的系统，该计算系统使用至少两个冷却回路进行冷却。

9. 发明申请

US20130050931A1 SYSTEM AND METHOD FOR COOLING A PROCESSING SYSTEM 审中-公开
标题翻译：用于冷却加工系统的系统和方法
公开(公告)号：US20130050931A1
公开(公告)日：2013-02-28
申请号：US13516036
申请日：2010-12-14
申请人： Peter Heiland , Andreas Birkner
发明人： Peter Heiland , Andreas Birkner
IPC分类号： G06F1/20 , G06F1/16
CPC分类号： H05K7/20827
摘要： The invention relates to a system for cooling a computing system, wherein waste heat of the computing system is supplied as driving energy to a refrigeration machine for cooling the computing system.
摘要翻译：本发明涉及一种用于冷却计算系统的系统，其中计算系统的废热作为驱动能量被提供给用于冷却计算系统的制冷机。

10. 发明授权

US06845174B2 Arrangement and method for the identification of substrates 有权
标题翻译：底物鉴定的布置方法
公开(公告)号：US06845174B2
公开(公告)日：2005-01-18
申请号：US10050114
申请日：2002-01-18
申请人： Dominik Grau , Andreas Birkner , Knut Hiltawski , Frank Bernhardt
发明人： Dominik Grau , Andreas Birkner , Knut Hiltawski , Frank Bernhardt
IPC分类号： G06K9/20 , G06K9/00
CPC分类号： G06K9/20
摘要： An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprising a turntable (2) for rotating a substrate (S) placed thereon; an illumination source (4) and a receiving device (5) for evaluating the intensity of the light emerging from the illumination source (4), the edge zone of the substrate (S) placed on the turntable (2), upon rotation thereof, influencing the light intensity striking the receiving device (5); a device (6) for reading the identification marking (I), having a sensing region (E); and a calculation device that calculates a manipulated variable for a correction rotation angle about the rotation axis (A) for alignment of the identification marking (I) with respect to the sensing region (E), and a manipulated variable for a correction motion for changing the position of the sensing region (E) with respect to the rotation axis (A) or with respect to the actual position of the identification marking (I), and outputs them to a positioning device. A corresponding identification method is also described.
摘要翻译：一种用于识别具有至少一个识别标记（I）的衬底（S）的装置，包括用于旋转放置在其上的衬底（S）的转台（2）;照明源（4）和接收装置（5），用于评估从照明源（4）出射的光的强度，旋转时放置在转台（2）上的基板（S）的边缘区域，影响撞击接收装置（5）的光强度;装置（6），用于读取具有感测区域（E）的识别标记（I）; 以及计算装置，用于计算关于所述识别标记（I）相对于所述感测区域（E）的对准的所述旋转轴线（A）的校正旋转角度的操作变量，以及用于改变所述校正运动的操作变量感测区域（E）相对于旋转轴线（A）的位置或相对于识别标记（I）的实际位置的位置，并将其输出到定位装置。还描述了相应的识别方法。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式