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    • 4. 发明授权
    • Dense SRAM cells with selective SOI
    • 具有选择性SOI的密集SRAM单元
    • US06876040B1
    • 2005-04-05
    • US10735169
    • 2003-12-12
    • Hsingjen WannYing ZhangRobert C. WongAn Steegen
    • Hsingjen WannYing ZhangRobert C. WongAn Steegen
    • H01L21/8244H01L21/84H01L27/11H01L27/12H01L27/01H01L29/76H01L29/94H01L31/0392
    • H01L27/1207H01L21/84H01L27/11H01L27/1104Y10S257/903
    • A SRAM cell fabricated in SSOI (selective silicon on insulator) comprises cross coupled PFET pull-up devices P1, P2 and NFET pull-down devices N1, N2, with the P1, P2 devices being connected to the power supply and the N1, N2 devices being connected to the ground. A first passgate NL is coupled between a first bitline and the junction of the devices P1 and N1, with its gate coupled to a wordline, and a second passgate NR is coupled between a second bitline and the junction of devices P2 and N2, with its gate coupled to the wordline. Each of the pull-up devices P1, P2, the pull-down devices N1, N2, and the first and second passgates NL, NR are fabricated with selective SOI, with buried oxide being selectively provided under the drains of the pull-up devices P1 and P2, the drains of the pull-down devices N1 and N2, and the sources and drains of the passgate devices NL and NR.
    • 在SSOI(选择性绝缘体硅)上制造的SRAM单元包括交叉耦合的PFET上拉器件P1,P2和NFET下拉器件N1,N2,其中P1,P2器件连接到电源,N1,N2 设备连接到地面。 第一通路门NL耦合在第一位线和器件P1和N1的接点之间,其栅极耦合到字线,并且第二通路门NR耦合在第二位线和器件P2和N2的接点之间,其中 门连接到字线。 上拉器件P1,P2,下拉器件N1,N2以及第一和第二通路NL,NR中的每一个被制造成具有选择性SOI,其中掩埋氧化物选择性地设置在上拉器件的漏极下 P1和P2,下拉装置N1和N2的下水道,以及通道装置NL和NR的源极和漏极。
    • 5. 发明申请
    • Trench sidewall passivation for lateral rie in a selective silicon-on-insulator process flow
    • 在选择性绝缘体上硅工艺流程中用于侧向的沟槽侧壁钝化
    • US20060046428A1
    • 2006-03-02
    • US10929990
    • 2004-08-30
    • Christopher BaioccoAn SteegenYing Zhang
    • Christopher BaioccoAn SteegenYing Zhang
    • H01L21/76
    • H01L21/76232
    • A lateral trench in a semiconductor substrate is formed by the following steps. Form a lateral implant mask (LIM) over a top surface of the semiconductor substrate. Implant a heavy dopant concentration into the substrate through the LIM to form a lateral implant region (LIR) in the substrate. Strip the LIM exposing the top surface of the substrate. Form an epitaxial silicon layer over the top surface of the substrate burying the LIR. Form a trench mask over the epitaxial layer. Etch a trench reaching through the epitaxial layer and the LIR. Form oxidized trench sidewalls, an oxidized trench bottom and oxidized sidewalls of the LIR. Etch the oxidized sidewalls of the LIR until the LIR is exposed. Form laterally extending trenches by etching away the LIR.
    • 通过以下步骤形成半导体衬底中的横向沟槽。 在半导体衬底的顶表面上形成横向植入掩模(LIM)。 通过LIM将重掺杂浓度植入到衬底中,以在衬底中形成横向植入区域(LIR)。 剥离LIM暴露衬底的顶部表面。 在掩埋LIR的衬底的顶表面上形成外延硅层。 在外延层上形成沟槽掩模。 蚀刻穿过外延层和LIR的沟槽。 形成氧化的沟槽侧壁,氧化沟槽底部和LIR的氧化侧壁。 蚀刻LIR的氧化侧壁,直到LIR暴露。 通过蚀刻掉LIR形成横向延伸的沟槽。