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1. 发明授权

US09151387B2 Ultra-high vacuum metallic seal 有权
标题翻译：超高真空金属密封
公开(公告)号：US09151387B2
公开(公告)日：2015-10-06
申请号：US12354578
申请日：2009-01-15
申请人： Amitava Datta , Hai-Ping Ma , Jeremy Payne
发明人： Amitava Datta , Hai-Ping Ma , Jeremy Payne
IPC分类号： F16J15/08
CPC分类号： F16J15/0887 , B23P13/04 , Y10T29/49995 , Y10T29/49996
摘要： A metallic seal design that reduces manufacturing costs by minimizing production steps and also lowers the sealing force by incorporating a thin-wall, high height/width ratio annular column. The seal has two horizontal ribs which constrain the thin-wall column from unstable buckling to thereby reduce or eliminate the tendency of the sealing dams to become inclined to sealing flange surfaces.
摘要翻译：一种金属密封设计，通过最小化生产步骤降低制造成本，并通过结合薄壁，高高/高比率的环形柱来降低密封力。密封件具有两个水平的肋条，其限制了薄壁柱的不稳定屈曲，从而减少或消除了密封坝倾向于密封凸缘表面的倾向。

2. 发明申请

US20090179389A1 ULTRA-HIGH VACUUM METALLIC SEAL 有权
标题翻译：超高真空金属密封
公开(公告)号：US20090179389A1
公开(公告)日：2009-07-16
申请号：US12354578
申请日：2009-01-15
申请人： Amitava Datta , Hai-Ping Ma , Jeremy Payne
发明人： Amitava Datta , Hai-Ping Ma , Jeremy Payne
IPC分类号： F16L17/00 , B23P13/04
CPC分类号： F16J15/0887 , B23P13/04 , Y10T29/49995 , Y10T29/49996
摘要： A metallic seal design that reduces manufacturing costs by minimizing production steps and also lowers the sealing force by incorporating a thin-wall, high height/width ratio annular column. The seal has two horizontal ribs which constrain the thin-wall column from unstable buckling to thereby reduce or eliminate the tendency of the sealing dams to become inclined to sealing flange surfaces.
摘要翻译：一种金属密封设计，通过最小化生产步骤降低制造成本，并通过结合薄壁，高高/高比率的环形柱来降低密封力。密封件具有两个水平的肋条，其限制了薄壁柱的不稳定屈曲，从而减少或消除了密封坝倾向于密封凸缘表面的倾向。

3. 发明授权

US6042121A Metallic sealing ring 失效
标题翻译：金属密封圈
公开(公告)号：US6042121A
公开(公告)日：2000-03-28
申请号：US897694
申请日：1997-07-21
申请人： Hai-Ping Ma , Matthew D. Cunningham , Amitava Datta
发明人： Hai-Ping Ma , Matthew D. Cunningham , Amitava Datta
IPC分类号： F16J15/08 , F16S15/08
CPC分类号： F16J15/0887 , Y10S277/91
摘要： A seal assembly includes a first plate or member having a recess with a bottom mating surface which receives sealing ring therein and a second plate or member having a sealing surface for contacting a metallic sealing ring. First and second plates or members are coupled together by a plurality of fasteners or bolts. By tightening the fasteners the sealing ring is loaded, and thus, compressed to plastically deform and create an annular seal between the first and second members. Metallic sealing ring has a first annular sealing surface, a second annular sealing surface, an annular inner surface and an annular outer surface. The first annular sealing surface faces in a first axial direction to contact sealing surface of first member for creating a first annular sealing dam therebetween. The second annular sealing surface faces in a second axial direction, which is opposite to the first axial direction of the annular sealing surface, to contact sealing surface of second member for creating a second annular sealing dam therebetween. Preferably, the first and second annular sealing surfaces are substantially flat surfaces which are parallel to one another. An annular column section is formed between the first and second annular surfaces. The minimum radial width of the annular column determines the force necessary to deform the sealing ring to its sealing position. A pair of beam sections extend substantially perpendicular to the column section to create the sealing surfaces. At least one brace extends diagonally between the column section and one of the between sections to obtain proper sealing during compression of the sealing ring.
摘要翻译：密封组件包括具有凹部的第一板或构件，所述凹部具有接纳密封环的底部配合表面，以及具有用于接触金属密封环的密封表面的第二板或构件。第一和第二板或构件通过多个紧固件或螺栓联接在一起。通过紧固紧固件，密封环被加载，并且因此被压缩以塑性变形并且在第一和第二构件之间产生环形密封。金属密封环具有第一环形密封表面，第二环形密封表面，环形内表面和环形外表面。第一环形密封表面面向第一轴向方向以接触第一构件的密封表面，用于在其之间形成第一环形密封堤坝。所述第二环形密封面在与所述环形密封面的第一轴向相反的第二轴向方向上面对，以接触所述第二构件的密封面，以在其间形成第二环形密封堤。优选地，第一和第二环形密封表面是彼此平行的大致平坦的表面。在第一和第二环形表面之间形成环形柱部分。环形柱的最小径向宽度决定了将密封环变形到其密封位置所需的力。一对梁部分基本上垂直于柱部分延伸以形成密封表面。至少一个支架在柱部分和两个部分之间的对角线上延伸，以在密封环的压缩期间获得适当的密封。

4. 发明授权

US08104770B2 Semiconductor process chamber 有权
标题翻译：半导体处理室
公开(公告)号：US08104770B2
公开(公告)日：2012-01-31
申请号：US12024187
申请日：2008-02-01
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： F16J15/10
CPC分类号： H01L21/67126 , Y10S277/913 , Y10S277/939 , Y10S277/944 , Y10S414/139 , Y10T29/49719
摘要： A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.
摘要翻译：处理室10包括容器（12），盖（14）和密封的界面（16）。容器的界面（30）和/或盖的界面（32）包括至少一个凹槽（36），密封件（40）位于其中。密封件（40）包括弹性体元件（50）和金属元件（60）。弹性体元件（50）和金属元件（60）可以被布置和适于在其转换成密封状态期间依次密封腔室的界面（16）。和/或弹性体元件（50）和金属元件（60）可以被布置和适合于一旦盖子（14）处于其密封状态，就将密封室的界面串联。

5. 发明申请

US20110076848A1 SEMICONDUCTOR PROCESS CHAMBER AND SEAL 审中-公开
标题翻译：半导体工艺室和密封件
公开(公告)号：US20110076848A1
公开(公告)日：2011-03-31
申请号：US12827089
申请日：2010-06-30
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： H01L21/306 , C23C14/00 , F16J15/02 , H01L21/30 , G06F17/50
CPC分类号： F16J15/062 , B01J3/03 , C23C16/4409 , F16J15/104 , F16J15/122
摘要： A seal (40) for sealing an interface between a container and a lid of a process chamber. The seal (40) comprises a metallic or polymeric sealing element (50) and an elastomeric sealing element (60) that are arranged to seal the interface in series, with the metallic or polymeric sealing element (50) being situated to encounter processing activity upstream of the elastomeric sealing element (60).
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件（40）。密封件（40）包括金属或聚合物密封元件（50）和弹性体密封元件（60），弹性体密封元件（60）被布置成串联地密封界面，金属或聚合物密封元件（50）位于上游以处理加工活动的弹性体密封元件（60）。

6. 发明申请

US20080106046A1 High temperature spring seals 有权
标题翻译：高温弹簧密封
公开(公告)号：US20080106046A1
公开(公告)日：2008-05-08
申请号：US11977041
申请日：2007-10-23
申请人： Amitava Datta , Dominick More , Kenneth Cornett , Jeremy Payne
发明人： Amitava Datta , Dominick More , Kenneth Cornett , Jeremy Payne
IPC分类号： F16J15/32
CPC分类号： F16J15/0887
摘要： A spring seal for sealing in high temperature applications includes a jacket and a spring member disposed within the jacket. The spring member is constructed to control a sealing load or spring rate of the spring seal relative to opposing flanges while the jacket is constructed to provide a sealing surface relative to the opposing flanges. The spring member is manufactured from a cast blade alloy, thereby allowing the spring member to maintain its spring back characteristics at relatively high temperatures of about 1300° F. and greater. Accordingly, the spring member minimizes the formation of a leak path between the spring seal and the opposing flanges. In one embodiment, the spring member is manufactured with a substantially U-shaped cross-section. With such a configuration, the spring seal provides substantially balanced, opposing forces on the jacket to minimize the formation of gaps between the spring seal and the flanges.
摘要翻译：用于在高温应用中密封的弹簧密封件包括外壳和设置在护套内的弹簧构件。弹簧构件被构造成控制弹簧密封件相对于相对的凸缘的密封载荷或弹簧刚度，而护套构造成相对于相对的凸缘提供密封表面。弹簧构件由铸造叶片合金制成，从而允许弹簧构件在约1300°F和更高的相对高的温度下保持其回弹特性。因此，弹簧构件最小化弹簧密封件和相对的凸缘之间的泄漏路径的形成。在一个实施例中，弹簧构件制造成具有基本上U形的横截面。通过这种构造，弹簧密封件在套管上提供基本上平衡的相反的力，以最小化弹簧密封件和凸缘之间的间隙的形成。

7. 发明授权

US07938407B2 High temperature spring seals 有权
标题翻译：高温弹簧密封
公开(公告)号：US07938407B2
公开(公告)日：2011-05-10
申请号：US11977041
申请日：2007-10-23
申请人： Amitava Datta , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： F16J15/00 , F16J15/02
CPC分类号： F16J15/0887
摘要： A spring seal for sealing in high temperature applications includes a jacket and a spring member disposed within the jacket. The spring member is constructed to control a sealing load or spring rate of the spring seal relative to opposing flanges while the jacket is constructed to provide a sealing surface relative to the opposing flanges. The spring member is manufactured from a cast blade alloy, thereby allowing the spring member to maintain its spring back characteristics at relatively high temperatures of about 1300° F. and greater. Accordingly, the spring member minimizes the formation of a leak path between the spring seal and the opposing flanges. In one embodiment, the spring member is manufactured with a substantially U-shaped cross-section. With such a configuration, the spring seal provides substantially balanced, opposing forces on the jacket to minimize the formation of gaps between the spring seal and the flanges.
摘要翻译：用于在高温应用中密封的弹簧密封件包括外壳和设置在护套内的弹簧构件。弹簧构件被构造成控制弹簧密封件相对于相对的凸缘的密封载荷或弹簧刚度，而护套构造成相对于相对的凸缘提供密封表面。弹簧构件由铸造叶片合金制成，从而允许弹簧构件在约1300°F和更高的相对高的温度下保持其回弹特性。因此，弹簧构件最小化弹簧密封件和相对的凸缘之间的泄漏路径的形成。在一个实施例中，弹簧构件制造成具有基本上U形的横截面。通过这种构造，弹簧密封件在套管上提供基本上平衡的相反的力，以最小化弹簧密封件和凸缘之间的间隙的形成。

8. 发明申请

US20080187430A1 SEMICONDUCTOR PROCESS CHAMBER 有权
标题翻译：半导体工艺室
公开(公告)号：US20080187430A1
公开(公告)日：2008-08-07
申请号：US12024187
申请日：2008-02-01
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： H01L21/673 , B65D53/00 , B23P6/00
CPC分类号： H01L21/67126 , Y10S277/913 , Y10S277/939 , Y10S277/944 , Y10S414/139 , Y10T29/49719
摘要： A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.
摘要翻译：处理室10包括容器（12），盖（14）和密封的界面（16）。容器的界面（30）和/或盖的界面（32）包括至少一个凹槽（36），密封件（40）位于其中。密封件（40）包括弹性体元件（50）和金属元件（60）。弹性体元件（50）和金属元件（60）可以被布置和适于在其转换成密封状态期间依次密封腔室的界面（16）。和/或弹性体元件（50）和金属元件（60）可以被布置和适合于一旦盖子（14）处于其密封状态，就将密封室的界面串联。

9. 发明授权

US08168056B2 Electrocomposite coatings for hard chrome replacement 失效
公开(公告)号：US08168056B2
公开(公告)日：2012-05-01
申请号：US12331623
申请日：2008-12-10
申请人： Amitava Datta , John D. Carpenter
发明人： Amitava Datta , John D. Carpenter
IPC分类号： C25D15/00 , C25D3/12
CPC分类号： C25D5/50 , C25D3/562 , C25D15/00 , Y10T428/12576 , Y10T428/12861 , Y10T428/12931 , Y10T428/25 , Y10T428/256 , Y10T428/259
摘要： The invention provides a method and system for electrolytically coating an article. The method includes providing an article to be coated and disposing the article in an electrolytic cell. The cell includes an anode, a cathode in operable communication with the article, and an electrolyte bath. During electrolysis, the electrolyte bath comprises cobalt ions, phosphorous acid, and tribological particles selected from the group consisting of refractory materials, solid lubricants and mixtures thereof dispersed therein. The method further includes applying steady direct electric current through the anode, the electrolyte bath and the cathode to coat the article with cobalt, phosphorous and the tribological particles. An improved composition of matter is also provided that may be used as a coating, or the composition may be electroformed on a mandrel to form an article made from the composition of matter.

10. 发明申请

US20070296158A1 Non-contacting seal for rotating surfaces 有权
标题翻译：用于旋转表面的非接触式密封
公开(公告)号：US20070296158A1
公开(公告)日：2007-12-27
申请号：US11803337
申请日：2007-05-14
申请人： Amitava Datta
发明人： Amitava Datta
IPC分类号： F01D11/02
CPC分类号： F16J15/3224 , F01D11/02 , F16J15/442
摘要： A non-contacting seal for sealing in high temperature applications includes at least one segment having an inner pad with a hydrodynamic/hydrostatic lift-off geometry enabling the seal to run in a non-contact mode, and at least one finger spring supported on the pad that aids in making the seal radially compliant while also being axially stiff, compared to the radial direction. In one embodiment, multiple segments are supported on a support member spaced from the pad to form a gap (g) therebetween. The pad preferably includes a wear resistant layer on its inner diameter (ID) which prevents excessive wear of the pad. In one embodiment, the hydrodynamic/hydrostatic lift-off geometry is in the form of a groove formed on the inner pad. A cover may also be provided between inner pads at the ID and the support ring at the outer diameter OD in order to prevent leakage through the gap.
摘要翻译：用于在高温应用中密封的非接触密封件包括至少一个具有内衬垫的区段，所述内垫具有能够使密封件以非接触模式运行的流体动力/静液压脱离几何形状，以及至少一个支撑在垫，其有助于使密封件径向顺应，同时与径向方向相比轴向刚性。在一个实施例中，多个段被支撑在与垫隔开的支撑构件上，以在它们之间形成间隙（g）。衬垫优选地包括其内径（ID）上的耐磨层，其防止垫的过度磨损。在一个实施例中，流体动力/静液压剥离几何形状是形成在内垫上的凹槽的形式。也可以在外径OD处的ID和支撑环的内垫之间设置盖，以防止通过间隙的泄漏。

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