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1. 发明授权

US08104770B2 Semiconductor process chamber 有权
标题翻译：半导体处理室
公开(公告)号：US08104770B2
公开(公告)日：2012-01-31
申请号：US12024187
申请日：2008-02-01
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： F16J15/10
CPC分类号： H01L21/67126 , Y10S277/913 , Y10S277/939 , Y10S277/944 , Y10S414/139 , Y10T29/49719
摘要： A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.
摘要翻译：处理室10包括容器（12），盖（14）和密封的界面（16）。容器的界面（30）和/或盖的界面（32）包括至少一个凹槽（36），密封件（40）位于其中。密封件（40）包括弹性体元件（50）和金属元件（60）。弹性体元件（50）和金属元件（60）可以被布置和适于在其转换成密封状态期间依次密封腔室的界面（16）。和/或弹性体元件（50）和金属元件（60）可以被布置和适合于一旦盖子（14）处于其密封状态，就将密封室的界面串联。

2. 发明申请

US20110076848A1 SEMICONDUCTOR PROCESS CHAMBER AND SEAL 审中-公开
标题翻译：半导体工艺室和密封件
公开(公告)号：US20110076848A1
公开(公告)日：2011-03-31
申请号：US12827089
申请日：2010-06-30
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： H01L21/306 , C23C14/00 , F16J15/02 , H01L21/30 , G06F17/50
CPC分类号： F16J15/062 , B01J3/03 , C23C16/4409 , F16J15/104 , F16J15/122
摘要： A seal (40) for sealing an interface between a container and a lid of a process chamber. The seal (40) comprises a metallic or polymeric sealing element (50) and an elastomeric sealing element (60) that are arranged to seal the interface in series, with the metallic or polymeric sealing element (50) being situated to encounter processing activity upstream of the elastomeric sealing element (60).
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件（40）。密封件（40）包括金属或聚合物密封元件（50）和弹性体密封元件（60），弹性体密封元件（60）被布置成串联地密封界面，金属或聚合物密封元件（50）位于上游以处理加工活动的弹性体密封元件（60）。

3. 发明申请

US20080187430A1 SEMICONDUCTOR PROCESS CHAMBER 有权
标题翻译：半导体工艺室
公开(公告)号：US20080187430A1
公开(公告)日：2008-08-07
申请号：US12024187
申请日：2008-02-01
申请人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Peter G. Amos , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： H01L21/673 , B65D53/00 , B23P6/00
CPC分类号： H01L21/67126 , Y10S277/913 , Y10S277/939 , Y10S277/944 , Y10S414/139 , Y10T29/49719
摘要： A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.
摘要翻译：处理室10包括容器（12），盖（14）和密封的界面（16）。容器的界面（30）和/或盖的界面（32）包括至少一个凹槽（36），密封件（40）位于其中。密封件（40）包括弹性体元件（50）和金属元件（60）。弹性体元件（50）和金属元件（60）可以被布置和适于在其转换成密封状态期间依次密封腔室的界面（16）。和/或弹性体元件（50）和金属元件（60）可以被布置和适合于一旦盖子（14）处于其密封状态，就将密封室的界面串联。

4. 发明授权

US07938407B2 High temperature spring seals 有权
标题翻译：高温弹簧密封
公开(公告)号：US07938407B2
公开(公告)日：2011-05-10
申请号：US11977041
申请日：2007-10-23
申请人： Amitava Datta , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
发明人： Amitava Datta , Dominick G. More , Kenneth W. Cornett , Jeremy Payne
IPC分类号： F16J15/00 , F16J15/02
CPC分类号： F16J15/0887
摘要： A spring seal for sealing in high temperature applications includes a jacket and a spring member disposed within the jacket. The spring member is constructed to control a sealing load or spring rate of the spring seal relative to opposing flanges while the jacket is constructed to provide a sealing surface relative to the opposing flanges. The spring member is manufactured from a cast blade alloy, thereby allowing the spring member to maintain its spring back characteristics at relatively high temperatures of about 1300° F. and greater. Accordingly, the spring member minimizes the formation of a leak path between the spring seal and the opposing flanges. In one embodiment, the spring member is manufactured with a substantially U-shaped cross-section. With such a configuration, the spring seal provides substantially balanced, opposing forces on the jacket to minimize the formation of gaps between the spring seal and the flanges.
摘要翻译：用于在高温应用中密封的弹簧密封件包括外壳和设置在护套内的弹簧构件。弹簧构件被构造成控制弹簧密封件相对于相对的凸缘的密封载荷或弹簧刚度，而护套构造成相对于相对的凸缘提供密封表面。弹簧构件由铸造叶片合金制成，从而允许弹簧构件在约1300°F和更高的相对高的温度下保持其回弹特性。因此，弹簧构件最小化弹簧密封件和相对的凸缘之间的泄漏路径的形成。在一个实施例中，弹簧构件制造成具有基本上U形的横截面。通过这种构造，弹簧密封件在套管上提供基本上平衡的相反的力，以最小化弹簧密封件和凸缘之间的间隙的形成。

5. 发明申请

US20090208775A1 PROTECTIVE COATING FOR METALLIC SEALS 有权
标题翻译：金属密封保护涂层
公开(公告)号：US20090208775A1
公开(公告)日：2009-08-20
申请号：US12388792
申请日：2009-02-19
申请人： Jeremy M. Payne , James E. Beach , Amitava Datta , Kenneth W. Cornett , Dominick G. More
发明人： Jeremy M. Payne , James E. Beach , Amitava Datta , Kenneth W. Cornett , Dominick G. More
IPC分类号： B32B15/00 , C25D3/56 , C25D3/00
CPC分类号： F16J15/0806 , C25D3/12 , C25D3/20 , C25D3/22 , C25D3/30 , C25D3/38 , C25D3/54 , C25D3/562 , C25D15/00 , C25D21/02 , C25D21/10 , F01D5/288 , Y02T50/672 , Y10T428/12493 , Y10T428/12507 , Y10T428/12576 , Y10T428/12583 , Y10T428/12618 , Y10T428/12861
摘要： A composition and process for forming an electrodeposited coating comprising a co-deposit of a metal and MCrAlY particles. The composition includes a metal and a MCrAlY particles, and the electrodeposited coating comprises a metal matrix and MCrAlY particles dispersed in the matrix. In one aspect, a coating is provided that exhibits excellent oxidation resistance and tribological characteristics at high temperatures, including up to at least about 1350° F. A high temperature coating may comprise a nickel/cobalt alloy matrix comprising MCrAlY particles and chromium carbide particles dispersed in the nickel/cobalt matrix.
摘要翻译：一种用于形成电沉积涂层的组合物和方法，其包括金属和MCrAlY颗粒的共沉积物。该组合物包括金属和MCrAlY颗粒，并且电沉积涂层包含分散在基质中的金属基质和MCrAlY颗粒。在一个方面，提供了一种涂层，其在高温下显示优异的抗氧化性和摩擦学特性，包括至多约1350°F。高温涂层可包括包含MCrAlY颗粒和分散的碳化铬颗粒的镍/钴合金基质在镍/钴基体中。

6. 发明授权

US08431238B2 Protective coating for metallic seals 有权
标题翻译：金属密封保护涂层
公开(公告)号：US08431238B2
公开(公告)日：2013-04-30
申请号：US12388792
申请日：2009-02-19
申请人： Jeremy M. Payne , James E. Beach , Amitava Datta , Kenneth W. Cornett , Dominick G. More
发明人： Jeremy M. Payne , James E. Beach , Amitava Datta , Kenneth W. Cornett , Dominick G. More
IPC分类号： B32B15/04 , B32B15/01 , C03C27/00 , C23C22/24 , B05D1/04 , H05C1/00
CPC分类号： F16J15/0806 , C25D3/12 , C25D3/20 , C25D3/22 , C25D3/30 , C25D3/38 , C25D3/54 , C25D3/562 , C25D15/00 , C25D21/02 , C25D21/10 , F01D5/288 , Y02T50/672 , Y10T428/12493 , Y10T428/12507 , Y10T428/12576 , Y10T428/12583 , Y10T428/12618 , Y10T428/12861
摘要： A composition and process for forming an electrodeposited coating comprising a co-deposit of a metal and MCrAlY particles. The composition includes a metal and a MCrAlY particles, and the electrodeposited coating comprises a metal matrix and MCrAlY particles dispersed in the matrix. In one aspect, a coating is provided that exhibits excellent oxidation resistance and tribological characteristics at high temperatures, including up to at least about 1350° F. A high temperature coating may comprise a nickel/cobalt alloy matrix comprising MCrAlY particles and chromium carbide particles dispersed in the nickel/cobalt matrix.
摘要翻译：一种用于形成电沉积涂层的组合物和方法，其包括金属和MCrAlY颗粒的共沉积物。该组合物包括金属和MCrAlY颗粒，并且电沉积涂层包含分散在基质中的金属基质和MCrAlY颗粒。在一个方面，提供了一种涂层，其在高温下显示优异的抗氧化性和摩擦学特性，包括至多约1350°F。高温涂层可包括包含MCrAlY颗粒和分散的碳化铬颗粒的镍/钴合金基质在镍/钴基体中。

7. 发明申请

US20100028075A1 SEALING JOINT FOR CONNECTING ADJOINING DUCT PIECES IN A ENGINE EXHAUST SYSTEM 有权
标题翻译：密封接头用于连接发动机排气系统中的辅助排水管
公开(公告)号：US20100028075A1
公开(公告)日：2010-02-04
申请号：US12499423
申请日：2009-07-08
申请人： Dominick G. More , Kenneth W. Cornett , Paul A. Dudzinski , Jeremy M. Payne
发明人： Dominick G. More , Kenneth W. Cornett , Paul A. Dudzinski , Jeremy M. Payne
IPC分类号： F16D1/12 , F02F11/00
CPC分类号： F16L51/00 , F01N13/10 , F01N13/1816 , F16J15/062 , F16J15/0887 , F16L25/12 , F16L25/14 , F16L27/12 , F16L51/022 , F16L57/06 , Y10T403/257
摘要： An engine exhaust system comprises duct pieces (201, 202) and a sealing joint (30) for interconnecting their adjoining ends. The sealing joint (30) comprises a one-piece tubular body (31) including includes a first axial end portion (331), a second axial end portion (332), and a bridge portion (34) extending therebetween. The first end portion (331) is at least partially positioned within a female recess (231) of the first duct piece (201) and the second end portion (332) is at least partially positioned with a female recess (232) of the second duct piece (202). Depending upon the thermal expansion-contraction conditions in the exhaust system, the bridge portion (34) can extend across a gap (24) and/or it can be positioned partially within female recesses (231) and (232).
摘要翻译：发动机排气系统包括管道件（201,202）和用于互连其相邻端部的密封接头（30）。密封接头（30）包括一体式管状体（31），其包括第一轴向端部（331），第二轴向端部（332）和在其间延伸的桥接部分（34）。第一端部部分（331）至少部分地定位在第一管道片（201）的阴凹部（231）内，并且第二端部部分（332）至少部分地定位成具有第二管状部件（201）的阴凹部（232）管道片（202）。取决于排气系统中的热膨胀 - 收缩条件，桥接部分（34）可以延伸穿过间隙（24）和/或其可以部分地位于凹槽（231）和（232）内。

8. 发明申请

US20100181765A1 SEALING JOINT FOR CONNECTING ADJOINING DUCT PIECES IN AN ENGINE EXHAUST SYSTEM 有权
标题翻译：密封接头用于连接发动机排气系统中的辅助排水管
公开(公告)号：US20100181765A1
公开(公告)日：2010-07-22
申请号：US12750293
申请日：2010-03-30
申请人： Dominick G. More , Jeremy M. Payne , Kenneth W. Cornett , Paul A. Dudzinski
发明人： Dominick G. More , Jeremy M. Payne , Kenneth W. Cornett , Paul A. Dudzinski
IPC分类号： F16L9/22 , F16L27/00
CPC分类号： F16J15/062 , F01N13/10 , F01N13/1816 , F02M26/14 , F16J15/0887 , F16L25/12 , F16L27/1017 , F16L27/12 , F16L51/00 , F16L51/022 , F16L57/06 , Y10T403/257
摘要： An engine exhaust system comprises duct pieces and a thermally expandable sealing joint for interconnecting their adjoining ends. The sealing joint comprises a tubular body including includes a first axial end portion, a second axial end portion, and a bridge portion extending therebetween. The first end portion is at least partially positioned within a female recess of the first duct piece and the second end portion is at least partially positioned with a female recess of the second duct piece. The bridge portion can extend across a gap and/or it can be positioned partially within female recesses. Upon thermal activation, the sealing joint radially expands permanently to engage the inner radial surfaces of the duct pieces.
摘要翻译：发动机排气系统包括管道件和用于互连其相邻端部的可热膨胀的密封接头。密封接头包括管状体，其包括第一轴向端部，第二轴向端部和在其间延伸的桥接部。第一端部至少部分地定位在第一管道件的阴凹部内，并且第二端部至少部分地定位有第二管件的凹槽。桥接部分可以跨越间隙延伸和/或其可以部分地位于凹槽内。在热激活时，密封接头将永久地径向膨胀以与管道件的内部径向表面接合。

9. 发明授权

US08220843B2 Sealing joint for connecting adjoining duct pieces in an engine exhaust system 有权
标题翻译：用于在发动机排气系统中连接相邻管道件的密封接头
公开(公告)号：US08220843B2
公开(公告)日：2012-07-17
申请号：US12750293
申请日：2010-03-30
申请人： Dominick G. More , Jeremy M. Payne , Kenneth W. Cornett , Paul A. Dudzinski
发明人： Dominick G. More , Jeremy M. Payne , Kenneth W. Cornett , Paul A. Dudzinski
IPC分类号： F16L25/00
CPC分类号： F16J15/062 , F01N13/10 , F01N13/1816 , F02M26/14 , F16J15/0887 , F16L25/12 , F16L27/1017 , F16L27/12 , F16L51/00 , F16L51/022 , F16L57/06 , Y10T403/257
摘要： An engine exhaust system comprises duct pieces and a thermally expandable sealing joint for interconnecting their adjoining ends. The sealing joint comprises a tubular body including a first axial end portion, a second axial end portion, and a bridge portion extending therebetween. The first end portion is at least partially positioned within a female recess of the first duct piece and the second end portion is at least partially positioned with a female recess of the second duct piece. The bridge portion can extend across a gap and/or it can be positioned partially within female recesses. Upon thermal activation, the sealing joint radially expands permanently to engage the inner radial surfaces of the duct pieces.
摘要翻译：发动机排气系统包括管道件和用于互连其相邻端部的可热膨胀的密封接头。密封接头包括管状主体，其包括第一轴向端部部分，第二轴向端部部分和在其间延伸的桥接部分。第一端部至少部分地定位在第一管道件的阴凹部内，并且第二端部至少部分地定位有第二管件的凹槽。桥接部分可以跨越间隙延伸和/或其可以部分地位于凹槽内。在热激活时，密封接头将永久地径向膨胀以与管道件的内部径向表面接合。

10. 发明授权

US08172274B2 Sealing joint for connecting adjoining duct pieces in an engine exhaust system 有权
标题翻译：用于在发动机排气系统中连接相邻管道件的密封接头
公开(公告)号：US08172274B2
公开(公告)日：2012-05-08
申请号：US12499423
申请日：2009-07-08
申请人： Dominick G. More , Kenneth W. Cornett , Paul A. Dudzinski , Jeremy M. Payne
发明人： Dominick G. More , Kenneth W. Cornett , Paul A. Dudzinski , Jeremy M. Payne
IPC分类号： F16L21/00
CPC分类号： F16L51/00 , F01N13/10 , F01N13/1816 , F16J15/062 , F16J15/0887 , F16L25/12 , F16L25/14 , F16L27/12 , F16L51/022 , F16L57/06 , Y10T403/257
摘要： An engine exhaust system comprises duct pieces (201, 202) and a sealing joint (30) for interconnecting their adjoining ends. The sealing joint (30) comprises a one-piece tubular body (31) including a first axial end portion (331), a second axial end portion (332), and a bridge portion (34) extending therebetween. The first end portion (331) is at least partially positioned within a female recess (231) of the first duct piece (201) and the second end portion (332) is at least partially positioned within a female recess (232) of the second duct piece (202). Depending upon the thermal expansion-contraction conditions in the exhaust system, the bridge portion (34) can extend across a gap (24) and/or it can be positioned partially within female recesses (231) and (232).
摘要翻译：发动机排气系统包括管道件（201,202）和用于互连其相邻端部的密封接头（30）。密封接头（30）包括一体式管状体（31），其包括第一轴向端部（331），第二轴向端部（332）和在其间延伸的桥接部分（34）。第一端部（331）至少部分地定位在第一管道片（201）的阴凹槽（231）内，并且第二端部部分（332）至少部分地定位在第二管段管道片（202）。取决于排气系统中的热膨胀 - 收缩条件，桥接部分（34）可以延伸穿过间隙（24）和/或其可以部分地位于凹槽（231）和（232）内。

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