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    • 2. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07456400B2
    • 2008-11-25
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G12B21/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.
    • 扫描探针显微镜具有探针和控制部,其控制探针和样品表面之间的平行于样品表面的至少一个方向上的相对扫描运动,并且控制探针与样品表面之间的相对运动 垂直于样品表面的方向。 振动源以相对于样品表面的振动频率振动探针。 接近/分离驱动部分使得探针相对于样品表面以预定距离相对接近和分离,同时探针以振动源相对于样品表面的振动频率振动。 检测部根据探针与样本面的距离来检测探针的振动状态的变化率。 当由检测部检测到的探针的振动状态的变化率超过预选阈值时,观察部分从样本表面收集观察数据。
    • 6. 发明申请
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US20060113472A1
    • 2006-06-01
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G21K7/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • In order to provide a scanning probe microscope and a scanning method which are capable of accurately approaching or contacting a probe needle and a sample surface irrespective of an irregularities shape of the sample surface, it comprises a probe needle 2 for relatively performing, with respect to a sample surface S, scans in two directions parallel to the sample surface S and a movement in a perpendicular direction of the sample surface S, a detection means 4 for detecting a measurement amount changing in compliance with a distance between the probe needle 2 and the sample surface S, an observation means 6 for gathering an observation data in a point of time at which the probe needle 2 has approached to or contacted with the sample surface S, a control means 5 for controlling the sans in the two directions and the movement in the perpendicular direction and an approach/separation drive section 24 for causing the probe needle 2 to relatively approach to and separate from the sample surface S at a predetermined distance, wherein the detection means 4 detects a change rate of the measurement amount at an approach time and a separation time by the approach/separation drive section 24, and the observation means 6 gathers the observation data when the change rate of the observation amount exceeds a previously set threshold value.
    • 为了提供能够精确地接近或接触探针和样品表面的扫描探针显微镜和扫描方法,而与样品表面的不规则形状无关,其包括用于相对于相对于 样品表面S在平行于样品表面S的两个方向上扫描并沿着样品表面S的垂直方向移动;检测装置4,用于检测测量量根据探针2和 样本表面S,用于在探针2接近或接触样本表面S的时间点收集观察数据的观察装置6,用于控制两个方向上的无效的控制装置5和运动 以及用于使探针2相对于样品su相对接近和分离的接近/分离驱动部24 表面S在预定距离处,其中检测装置4通过接近/分离驱动部分24检测接近时间的测量量和分离时间的变化率,并且观察装置6在变化率 的观察量超过预先设定的阈值。
    • 7. 发明申请
    • SENSOR FOR OBSERVATIONS IN LIQUID ENVIRONMENTS AND OBSERVATION APPARATUS FOR USE IN LIQUID ENVIRONMENTS
    • 用于液体环境观测的传感器和用于液体环境的观察装置
    • US20090265819A1
    • 2009-10-22
    • US12416634
    • 2009-04-01
    • Naoya WatanabeMasatsugu ShigenoMasato Iyoki
    • Naoya WatanabeMasatsugu ShigenoMasato Iyoki
    • G01N13/10
    • G01Q20/04G01Q30/14
    • The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
    • 传感器具有包括主体部分,细长带状柔性基板,连接部件,树脂部分和形成在柔性基板的端部的外部触点的自检探测器。 探头还包括一个悬臂,其基端支撑在主体部分,一个应变阻力元件,其电阻值根据悬臂的位移量而变化,并且与应变电阻元件电连接。 探针尖端形成在悬臂的前端。 柔性基板具有夹在两个绝缘片之间的互连图案。 柔性基板支撑主体部分,而悬臂向外突出。 将柔性基板的至少一端从液体中取出。 连接构件将互连件与互连图案连接。 互连件,连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。
    • 9. 发明授权
    • Sensor for observations in liquid environments and observation apparatus for use in liquid environments
    • 用于液体环境中观察的传感器和用于液体环境的观察设备
    • US07945965B2
    • 2011-05-17
    • US12416634
    • 2009-04-01
    • Naoya WatanabeMasatsugu ShigenoMasato Iyoki
    • Naoya WatanabeMasatsugu ShigenoMasato Iyoki
    • H01J37/252
    • G01Q20/04G01Q30/14
    • The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
    • 传感器具有包括主体部分,细长带状柔性基板,连接部件,树脂部分和形成在柔性基板的端部的外部触点的自检探测器。 探头还包括一个悬臂,其基端支撑在主体部分,一个应变阻力元件,其电阻值根据悬臂的位移量而变化,并且与应变电阻元件电连接。 探针尖端形成在悬臂的前端。 柔性基板具有夹在两个绝缘片之间的互连图案。 柔性基板支撑主体部分,而悬臂向外突出。 将柔性基板的至少一端从液体中取出。 连接构件将互连件与互连图案连接。 互连件,连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。