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    • 9. 发明授权
    • Method and system for providing a perpendicular magnetic recording pole having a leading edge bevel
    • 用于提供具有前缘斜面的垂直磁记录极的方法和系统
    • US08277669B1
    • 2012-10-02
    • US12643954
    • 2009-12-21
    • Tsung Yuan ChenYimin GuoJinqiu ZhangUt Tran
    • Tsung Yuan ChenYimin GuoJinqiu ZhangUt Tran
    • B44C1/22
    • G11B5/3116G11B5/315G11B5/3163Y10T29/49046
    • A method and system for providing a pole of magnetic transducer having an air-bearing surface (ABS) are described. Leading shield and planarization stop layers are provided. Portions of the planarization stop and shield layers distal from the ABS location are removed, providing a depression forming a bevel. The bevel has an angle greater than zero and less than ninety degrees. An intermediate layer having a top surface substantially perpendicular to the ABS location is provided. Part of the intermediate layer is removed, forming a trench having a bottom corresponding to the leading shield and a location and profile corresponding to the pole. A nonmagnetic layer is provided at least partially in the trench. The pole with a leading edge bevel corresponding to the bevel is provided in the trench. A capping layer covering the pole is provided, at least part of the intermediate layer removed, and a wrap-around shield provided.
    • 描述了一种用于提供具有空气轴承表面(ABS)的磁换能器极的方法和系统。 提供了领先的屏蔽和平坦化停止层。 除去远离ABS位置的平坦化停止和屏蔽层的部分,提供形成斜面的凹陷。 斜面角度大于零,小于九十度。 提供具有基本上垂直于ABS位置的顶表面的中间层。 中间层的一部分被去除,形成具有对应于前屏蔽的底部的沟槽和对应于极的位置和轮廓。 至少部分地在沟槽中提供非磁性层。 在沟槽中设置有与斜面相对应的前缘斜面的极。 提供覆盖极的覆盖层,去除中间层的至少一部分和设置的环绕护罩。