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    • 3. 发明授权
    • Method of producing a thin layer of crystalline material
    • 生产薄层结晶材料的方法
    • US06806171B1
    • 2004-10-19
    • US10213593
    • 2002-08-07
    • Alexander UlyashinAlexander Usenko
    • Alexander UlyashinAlexander Usenko
    • H01L2120
    • H01L21/02381H01L21/0245H01L21/02513H01L21/02532H01L21/02579H01L21/0262H01L21/02658H01L21/76259Y10S438/96
    • A technique for forming a film of crystalline material, preferably silicon. The technique creates a sandwich structure with a weakened region at a selected depth underneath the surface. The weakened region is a layer of porous silicon with high porosity. The high porosity enclosed layer is formed by (1) forming a porous silicon layer with low porosity on surface of the substrate, (2) epitaxial growth of a non-porous layer over the low-porous layer (3) increasing of porosity of the low-porous layer making the said layer hi-porous, (4) cleaving the semiconductor substrate at said high porous layer. The porosity of the buried low-porous layer is increased by hydrogenation techniques, for example, by processing in hydrogen plasma. The process is preferentially used to produce silicon-on-insulator wafers.
    • 用于形成结晶材料的膜,优选硅的技术。 该技术在表面下方的选定深度产生具有弱化区域的夹层结构。 弱化区域是具有高孔隙率的多孔硅层。 高孔隙率封闭层通过以下方式形成:(1)在衬底的表面上形成具有低孔隙率的多孔硅层,(2)在低孔层(3)上的无孔层的外延生长增加孔隙率 使所述层高分子化的多孔层,(4)在所述高多孔层处切割半导体衬底。 通过加氢技术,例如通过在氢等离子体中加工,增加了掩埋的低孔层的孔隙率。 该方法优选用于制造绝缘体上硅晶片。