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    • 3. 发明申请
    • ELECTROSTATIC DISCHARGE PROTECTION DEVICES AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICES INCLUDING THE SAME
    • 静电放电保护装置及其制造包括其的半导体器件的方法
    • US20090001472A1
    • 2009-01-01
    • US11771565
    • 2007-06-29
    • Akram SalmanStephen Beebe
    • Akram SalmanStephen Beebe
    • H01L23/62H01L21/336
    • H01L27/0255
    • A method for fabricating a semiconductor device is provided. According to this method, a first gate electrode and a second gate electrode are formed overlying a first portion of a silicon substrate, and ions of a first conductivity-type are implanted into a second portion of the silicon substrate to define a first conductivity-type diode region within the silicon substrate. Ions of a second conductivity-type are implanted into a third portion of the silicon substrate to define a second conductivity-type diode region within the silicon substrate. During one of the steps of implanting ions of the first conductivity-type and implanting ions of the second conductivity-type, ions are also implanted into at least part of the first portion to define a separation region within the first portion. The separation region splits the first portion into a first well device region and a second well device region. The separation region is formed in series between the first well device region and the second well device region.
    • 提供一种制造半导体器件的方法。 根据该方法,在硅衬底的第一部分上形成第一栅电极和第二栅极,将第一导电类型的离子注入到硅衬底的第二部分中以限定第一导电型 硅衬底内的二极管区域。 将第二导电类型的离子注入到硅衬底的第三部分中以在硅衬底内限定第二导电型二极管区。 在植入第二导电类型的第一导电类型的离子和注入第二导电类型的离子的步骤之一中,离子也被注入到第一部分的至少一部分中以在第一部分内限定分离区域。 分离区域将第一部分分成第一阱器件区域和第二阱器件区域。 分离区域在第一阱器件区域和第二阱器件区域之间串联形成。
    • 7. 发明授权
    • Electrostatic discharge protection devices
    • 静电放电保护装置
    • US08013393B2
    • 2011-09-06
    • US11771565
    • 2007-06-29
    • Akram SalmanStephen Beebe
    • Akram SalmanStephen Beebe
    • H01L23/62
    • H01L27/0255
    • A method for fabricating a semiconductor device is provided. According to this method, a first gate electrode and a second gate electrode are formed overlying a first portion of a silicon substrate, and ions of a first conductivity-type are implanted into a second portion of the silicon substrate to define a first conductivity-type diode region within the silicon substrate. Ions of a second conductivity-type are implanted into a third portion of the silicon substrate to define a second conductivity-type diode region within the silicon substrate. During one of the steps of implanting ions of the first conductivity-type and implanting ions of the second conductivity-type, ions are also implanted into at least part of the first portion to define a separation region within the first portion. The separation region splits the first portion into a first well device region and a second well device region. The separation region is formed in series between the first well device region and the second well device region.
    • 提供一种制造半导体器件的方法。 根据该方法,在硅衬底的第一部分上形成第一栅电极和第二栅极,将第一导电类型的离子注入到硅衬底的第二部分中以限定第一导电型 硅衬底内的二极管区域。 将第二导电类型的离子注入到硅衬底的第三部分中以在硅衬底内限定第二导电型二极管区。 在植入第二导电类型的第一导电类型的离子和注入第二导电类型的离子的步骤之一中,离子也被注入到第一部分的至少一部分中以在第一部分内限定分离区域。 分离区域将第一部分分成第一阱器件区域和第二阱器件区域。 分离区域在第一阱器件区域和第二阱器件区域之间串联形成。