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    • 1. 发明申请
    • Exposure apparatus and exposure method
    • 曝光装置和曝光方法
    • US20110207035A1
    • 2011-08-25
    • US12932033
    • 2011-02-16
    • Akiya SaitoAkitoshi SuzukiToru AidaShinobu Hayashi
    • Akiya SaitoAkitoshi SuzukiToru AidaShinobu Hayashi
    • G03F7/20G03B27/52
    • G03B27/52G11B7/1267G11B7/261G11B7/263
    • An exposure apparatus includes an exposure unit selectively performing exposure on a resist layer with a first laser beam, focused by a lens system, in a pattern including pits and lands arranged in a scanning direction; a detecting unit detecting a reflection of a second laser beam applied through the lens system to the resist layer selectively exposed to the first laser beam, the second laser beam being produced by changing a focal length of the lens system such that the resist layer is prevented from responding thereto; a calculating unit calculating, from a result of the detection, a displacement between center axes of signal waveforms representing beams reflected from first and second portions of the pattern having a smallest width and a larger width, respectively; a setting unit setting the focal length of the lens system to such a value that the displacement is maximal; and a control unit controlling the exposure unit to expose the resist layer to the first laser beam focused with the focal length set by the setting unit.
    • 曝光装置包括曝光单元,其以包括沿扫描方向布置的凹坑和平台的图案以由透镜系统聚焦的第一激光束选择性地对抗蚀剂层进行曝光; 检测单元,其检测通过透镜系统施加的第二激光束对选择性地暴露于第一激光束的抗蚀剂层的反射,第二激光束是通过改变透镜系统的焦距而产生的,以防止抗蚀剂层 从响应; 计算单元,从所述检测结果计算分别表示从具有最小宽度和较大宽度的图案的第一和第二部分反射的光束的信号波形的中心轴之间的位移; 设置单元,将透镜系统的焦距设定为位移最大的值; 以及控制单元,其控制所述曝光单元将所述抗蚀剂层暴露于由所述设定单元设定的所述焦距聚焦的所述第一激光束。
    • 4. 发明申请
    • MASTER STRATEGY ADJUSTMENT METHOD AND DISC MANUFACTURING METHOD
    • 主策略调整方法和盘制作方法
    • US20120236697A1
    • 2012-09-20
    • US13411975
    • 2012-03-05
    • Akiya SaitoToru AidaShinobu Hayashi
    • Akiya SaitoToru AidaShinobu Hayashi
    • G11B7/095
    • G11B7/261G11B7/00456
    • A master strategy adjustment method includes performing first recording on a master with a predetermined strategy, performing first measurement of an evaluation value of the master of the first recording, forming a first optical disc based on the master after the first recording, performing second measurement of an evaluation value of the optical disc formed as the first optical disc, calculating a target value of the evaluation value of the master based on a difference with the first measurement evaluation value and the second measurement evaluation value, and adjusting the strategy so that the evaluation value with regard to the master matches the target value, performing recording on the master with the adjusted writing strategy, performing measurement of the evaluation value of the master, and performing determination of whether the evaluation value is within a predetermined range with the target value as a reference until an affirmative result is obtained.
    • 主策略调整方法包括以预定的策略在主机上执行第一记录,对第一记录的主装置的评估值进行第一测量,在第一记录之后,基于主装置形成第一光盘,执行第二记录 形成为第一光盘的光盘的评估值,基于与第一测量评估值和第二测量评估值的差异来计算主机的评估值的目标值,并且调整策略,使得评估 相对于主机的值与目标值相匹配,利用调整后的写入策略对主机进行记录,对主机的评价值进行测量,并且以目标值为判定值是否处于预定范围内 直到获得肯定结果为止。
    • 5. 发明授权
    • Master strategy adjustment method and disc manufacturing method
    • 主要策略调整方法及盘片制造方法
    • US08582410B2
    • 2013-11-12
    • US13411975
    • 2012-03-05
    • Akiya SaitoToru AidaShinobu Hayashi
    • Akiya SaitoToru AidaShinobu Hayashi
    • G11B7/00
    • G11B7/261G11B7/00456
    • A master strategy adjustment method includes performing first recording on a master with a predetermined strategy, performing first measurement of an evaluation value of the master of the first recording, forming a first optical disc based on the master after the first recording, performing second measurement of an evaluation value of the optical disc formed as the first optical disc, calculating a target value of the evaluation value of the master based on a difference with the first measurement evaluation value and the second measurement evaluation value, and adjusting the strategy so that the evaluation value with regard to the master matches the target value, performing recording on the master with the adjusted writing strategy, performing measurement of the evaluation value of the master, and performing determination of whether the evaluation value is within a predetermined range with the target value as a reference until an affirmative result is obtained.
    • 主策略调整方法包括以预定的策略在主机上执行第一记录,对第一记录的主装置的评估值进行第一测量,在第一记录之后,基于主装置形成第一光盘,执行第二记录 形成为第一光盘的光盘的评估值,基于与第一测量评估值和第二测量评估值的差异来计算主机的评估值的目标值,并且调整策略,使得评估 相对于主机的值与目标值相匹配,利用调整后的写入策略对主机进行记录,对主机的评价值进行测量,并且以目标值为判定值是否处于预定范围内 直到获得肯定结果为止。
    • 9. 发明申请
    • METHOD OF MANUFACTURING MASTER DISC, METHOD OF MANUFACTURING RECORDING MEDIUM, PROGRAM, AND RECORDING MEDIUM
    • 制造主盘的方法,制作记录介质,程序和记录介质的方法
    • US20130215732A1
    • 2013-08-22
    • US13881384
    • 2011-11-07
    • Shinobu Hayashi
    • Shinobu Hayashi
    • G11B7/007
    • G11B7/007G11B7/00736G11B7/261G11B7/263G11B7/28G11B20/1217G11B2220/213G11B2220/2537
    • Information unique on a group basis is allowed to be efficiently added to a recording medium in which read-only contents data is recorded. Master data (cutting master) having a data structure in which data to be replaced is managed by a file system as data to be arranged in a specific folder or a specific file is produced by authoring. In manufacturing of a recording medium master disc through premastering and mastering using the master data, replacement data unique to each group is prepared, and the data to be replaced is replaced with the replacement data to perform the mastering (master disc exposure). Then, a stamper is produced from the produced master disc, and recording media is mass-produced by using the stamper. In other words, the replacement data are changed on the group basis to allow the recording media in which the replacement data (such as GP1 and GP2) unique to each group is recorded as read-only data to be manufactured, as recording media containing the same content.
    • 允许以组为基础唯一的信息被有效地添加到其中记录只读内容数据的记录介质。 具有数据结构的主数据(切割主机),其中要被替换的数据由文件系统管理,作为将被布置在特定文件夹中的数据或特定文件通过创作来生成。 在通过使用主数据进行预处理和母盘制作的记录介质母盘的制造中,准备每组唯一的替换数据,并且用替换数据替换要替换的数据以执行母盘(母盘曝光)。 然后,从所制造的母盘产生压模,并且通过使用压模批量生产记录介质。 换句话说,替换数据是以组为基础而改变的,以便将其中每个组唯一的替换数据(例如GP1和GP2)记录为要制造的只读数据的记录介质作为包含 相同的内容。