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    • 2. 发明授权
    • Substrate transport container
    • 基材运输容器
    • US06875282B2
    • 2005-04-05
    • US10145692
    • 2002-05-16
    • Akira TanakaYoko SuzukiTakashi Kishi
    • Akira TanakaYoko SuzukiTakashi Kishi
    • H01L21/673C23C16/00
    • H01L21/67379G03F1/66H01L21/67393Y10S414/135Y10S414/14
    • A substrate transport container is used, for example, in the process of manufacturing integrated circuits of less than 0.13 μm line width, can hold the level of contaminants in the interior of the container for at least particles, acidic gases, basic gases, organic substances and humidity at controlled low levels, and has the size and structure to be compatible with automated semiconductor manufacturing plants. The container is provided with a door for loading and unloading substrates on a surface of a container main body and is constructed so as to hold the substrates inside the container main body at a given distance of separation. Air conditioning apparatuses for reducing the levels of particulate and gaseous contaminants are disposed roughly symmetrically on the container main body.
    • 例如,在制造小于0.13mum线宽的集成电路的过程中使用基板输送容器,可以将至少颗粒,酸性气体,碱性气体,有机物质的容器内部的污染物的水平保持 和湿度控制在低水平,并具有与自动半导体制造工厂兼容的尺寸和结构。 容器设置有用于在容器主体的表面上装载和卸载基板的门,并且被构造成将基板以给定的间隔保持在容器主体内部。 用于降低颗粒状和气态污染物的含量的空气调节装置大致对称地设置在容器主体上。
    • 3. 发明授权
    • Substrate transport apparatus, pod and method
    • 基板运输装置,吊架和方法
    • US06758876B2
    • 2004-07-06
    • US10000304
    • 2001-12-04
    • Yoko SuzukiAkira TanakaTakashi Kishi
    • Yoko SuzukiAkira TanakaTakashi Kishi
    • B01D4600
    • H01L21/67366H01L21/67017H01L21/67379H01L21/67393H01L21/67396H01L21/67772H01L21/67775
    • A method of using a substrate transport pod is provided, which is suitable for manufacturing semiconductor devices with copper wiring and low dielectric insulating film having dielectric constants of less than 3. The method is based on loading the substrates into a pod from an atmosphere of a first process, and circulating a gaseous atmosphere through interior of the pod in such a way to selectively remove at least one contaminant including moisture, particulate substances or chemical substances, and to expose the substrates to a controlled atmosphere intermittently or continually while the substrates are held in the pod before they are unloaded from the pod and introduced into a second process. For a pod that is used to house the substrates for the purpose of retaining or transporting, the pod has a pod main body and a door that provides a hermetic sealing seal, and the pod is made primarily of a materiel that has moisture absorption factor of less than 0.1%, a the pod can contact the substrates directly or indirectly and has a conductive area so as to enable static charges to be guided out of the pod.
    • 提供了一种使用基板传输盒的方法,其适用于制造具有铜布线的半导体器件和具有小于3的介电常数的低介电绝缘膜。该方法基于将基板从 第一工序,并且通过荚的内部循环气体气氛以选择性地去除至少一种包含水分,颗粒物质或化学物质的污染物,并且在保持基板的同时将基板间断地或连续地暴露于可控气氛 在pod中,从pod中卸载并引入第二个进程。 对于用于容纳基材以保持或运输的荚,荚具有荚主体和提供气密密封的门,荚主要由具有湿气吸收系数的材料制成 小于0.1%,荚可以直接或间接接触衬底,并具有导电区域,以使静电荷能够被引导出荚。
    • 6. 发明授权
    • Power supply apparatus for supplying electric power to substrate carrier container
    • 用于向基板载体容器供电的供电装置
    • US06829130B2
    • 2004-12-07
    • US09987383
    • 2001-11-14
    • Akira TanakaTakashi Kishi
    • Akira TanakaTakashi Kishi
    • H05F300
    • H01L21/67386H01L21/67393Y10T307/766
    • A power supply apparatus supplies electric power to a substrate carrier container having a rechargeable cell. The power supply apparatus comprises a body for seating a substrate carrier container thereon, a seating detecting device provided on the body for detecting whether the substrate carrier container is seated on the body or not, and a power supply connector movably provided on the body. The power supply apparatus further comprises a control mechanism for bringing the power supply connector into contact with a charging terminal of the substrate carrier container to charge the rechargeable cell in the substrate carrier container according to a detected signal from the seating detecting device.
    • 电源装置向具有可再充电电池的基板载体容器供电。 电源装置包括用于将基板载体容器放置在其上的主体,设置在主体上用于检测基板载体容器是否位于主体上的检查装置,以及可移动地设置在主体上的电源连接器。 供电装置还包括控制机构,用于使电源连接器与基板载体容器的充电端子接触,以根据来自检测装置的检测信号对基板载体容器中的可再充电电池充电。