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    • 7. 发明授权
    • Optical semiconductor apparatus
    • 光半导体装置
    • US07196357B2
    • 2007-03-27
    • US11192727
    • 2005-07-29
    • Hironobu NaruiTomonori HinoNobukata OkanoJugo Mitomo
    • Hironobu NaruiTomonori HinoNobukata OkanoJugo Mitomo
    • H01L27/15H01L29/16H01L31/12H01L33/00
    • H01L31/16B82Y20/00G02B6/4214G02B6/4246H01L31/173H01S5/02284H01S5/0262H01S5/0425H01S5/183H01S5/3432H01S2301/176
    • The optical semiconductor apparatus includes, on an n-GaAs substrate, a surface-emitting semiconductor laser device and a photodiode integrated on the periphery of the laser device with an isolation region interposed there between. The laser device is composed of an n-DBR mirror, an active region, and a p-DBR mirror and includes a columnar layered structure with its sidewall covered with an insulating film. The photodiode is formed on the substrate and has a circular layered structure wherein an i-GaAs layer and a p-GaAs layer surrounds the laser device with an isolating region interposed between the i-GaAs and p-GaAs layers and the laser device. The diameter of the photodiode is smaller than the diameter of the optical fiber core optically coupled with the optical semiconductor apparatus. Since the laser device and the photodiode are monolithically integrated, the devices do not require optical alignment, and thus, facilitate optical coupling with an optical fiber.
    • 光学半导体装置在n-GaAs衬底上包括表面发射半导体激光器件和集成在激光器周围的光电二极管,其间隔着隔离区域。 激光装置由n-DBR反射镜,有源区和p-DBR反射镜组成,并且包括柱状分层结构,其侧壁被绝缘膜覆盖。 光电二极管形成在基板上,并且具有圆形层状结构,其中i-GaAs层和p-GaAs层围绕激光器件,其间插入在i-GaAs和p-GaAs层之间的隔离区域和激光器件。 光电二极管的直径小于与光半导体装置光耦合的光纤芯的直径。 由于激光器件和光电二极管是单片集成的,所以器件不需要光学对准,因此便于与光纤的光耦合。