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    • 3. 发明授权
    • Semiconductor light emitting device with II-VI group semiconductor contact layer containing alkali metal impurity, method of producing the same, and optical device including same
    • 具有含有碱金属杂质的II-VI族半导体接触层的半导体发光器件及其制造方法以及包括其的光学器件
    • US06456639B2
    • 2002-09-24
    • US09864758
    • 2001-05-24
    • Akira IshibashiYoshinori HatanakaToru AokiMasaharu Nagai
    • Akira IshibashiYoshinori HatanakaToru AokiMasaharu Nagai
    • H01S500
    • H01L33/40H01L33/28H01L33/285
    • The invention provides a semiconductor light emitting device whose operating voltage can be easily reduced, a method of producing the same, and an optical device. An n-type clad layer, a first guide layer, an active layer, a second guide layer, a p-type clad layer, a first semiconductor layer, and a second semiconductor layer of ZnSe are successively grown on an n-type substrate. An alkali compound layer of Na2Se is then formed thereon. Subsequently, a heat treatment is performed by means of irradiation of an excimer laser beam so that at least a part of the second semiconductor layer and at least a part of the alkali compound layer are altered thereby forming a contact layer. Furthermore, a p-side electrode is formed on the contact layer. The contact layer contains an alkali metal serving as a p-type impurity so that the contact layer has a low electric resistance thereby achieving a reduction in the operating voltage and thus a reduction in the operating power. As a result of the reduction in the operating power, the device life is improved.
    • 本发明提供一种可以容易地降低其工作电压的半导体发光器件,其制造方法和光学器件。 在n型衬底上依次生长n型覆盖层,第一引导层,有源层,第二引导层,p型覆盖层,第一半导体层和第二半导体层。 然后在其上形成Na 2 Se的碱性化合物层。 随后,通过照射准分子激光束进行热处理,使得第二半导体层和至少一部分碱性化合物层的至少一部分被改变,从而形成接触层。 此外,在接触层上形成p侧电极。 接触层含有用作p型杂质的碱金属,使得接触层具有低电阻,从而实现工作电压的降低,从而降低工作电力。 由于操作功率的降低,设备寿命得到改善。
    • 4. 发明授权
    • Semiconductor light emitting device with II-VI group semiconductor contact layer containing alkali metal impurity, method of producing same, and optical device including same
    • 具有含有碱金属杂质的II-VI族半导体接触层的半导体发光器件及其制造方法以及包括其的光学器件
    • US06414975B1
    • 2002-07-02
    • US09048048
    • 1998-03-26
    • Akira IshibashiYoshinori HatanakaToru AokiMasaharu Nagai
    • Akira IshibashiYoshinori HatanakaToru AokiMasaharu Nagai
    • H01S500
    • H01L33/40H01L33/28H01L33/285
    • The invention provides a semiconductor light emitting device whose operating voltage can be easily reduced, a method of producing the same, and an optical device. An n-type clad layer, a first guide layer, an active layer, a second guide layer, a p-type clad layer, a first semiconductor layer, and a second semiconductor layer of ZnSe are successively grown on an n-type substrate. An alkali compound layer of Na2Se is then formed thereon. Subsequently, a heat treatment is performed by means of irradiation of an excimer laser beam so that at least a part of the second semiconductor layer and at least a part of the alkali compound layer are altered thereby forming a contact layer. Furthermore, a p-side electrode is formed on the contact layer. The contact layer contains an alkali metal serving as a p-type impurity so that the contact layer has a low electric resistance thereby achieving a reduction in the operating voltage and thus a reduction in the operating power. As a result of the reduction in the operating power, the device life is improved.
    • 本发明提供一种可以容易地降低其工作电压的半导体发光器件,其制造方法和光学器件。 在n型衬底上依次生长n型覆盖层,第一引导层,有源层,第二引导层,p型覆盖层,第一半导体层和第二半导体层。 然后在其上形成Na 2 Se的碱性化合物层。 随后,通过照射准分子激光束进行热处理,使得第二半导体层的至少一部分和碱性化合物层的至少一部分被改变,从而形成接触层。 此外,在接触层上形成p侧电极。 接触层含有用作p型杂质的碱金属,使得接触层具有低电阻,从而实现工作电压的降低,从而降低工作电力。 由于操作功率的降低,设备寿命得到改善。
    • 7. 发明申请
    • LIGHT EXPOSURE MASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
    • 光曝光掩模及使用其制造半导体器件的方法
    • US20110170084A1
    • 2011-07-14
    • US13069491
    • 2011-03-23
    • Hideto OhnumaMasaharu Nagai
    • Hideto OhnumaMasaharu Nagai
    • G03B27/72
    • H01L27/1288G03F1/50H01L27/1214H01L27/124H01L27/127H01L29/42384H01L29/66757H01L29/78621
    • The present invention provides a light exposure mask which can form a photoresist layer in a semi-transmissive portion with uniform thickness, and a method for manufacturing a semiconductor device in which the number of photolithography steps (the number of masks) necessary for manufacturing a TFT substrate is reduced by using the light exposure mask. A light exposure mask is used, which includes a transmissive portion, a light shielding portion, and a semi-transmissive portion having a light intensity reduction function where lines and spaces are repeatedly formed, wherein the sum of a line width L of a light shielding material and a space width S between light shielding materials in the semi-transmissive portion satisfies a conditional expression (2n/3)×m≦L+S≦(6n/5)×m when a resolution of a light exposure apparatus is represented by n and a projection magnification is represented by 1/m (m≧1).
    • 本发明提供一种能够在均匀厚度的半透射部分中形成光致抗蚀剂层的曝光掩模,以及制造半导体器件的方法,其中制造TFT所需的光刻步骤数(掩模数) 通过使用曝光掩模来减少衬底。 使用曝光掩模,其包括透射部分,遮光部分和具有重复形成线和间隔的光强降低功能的半透射部分,其中遮光层的线宽L之和 材料和半透射部分的遮光材料之间的空间宽度S满足条件表达式(2n / 3)×m≦̸ L + S≦̸(6n / 5)×m,当曝光装置的分辨率由 n,投影倍率由1 / m(m≥1)表示。