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    • 4. 发明申请
    • Polishing Apparatus and Polishing Method
    • 抛光装置和抛光方法
    • US20090239446A1
    • 2009-09-24
    • US11884746
    • 2005-08-30
    • Akira FukudaYoshihiro MochizukiKazuto Hirokawa
    • Akira FukudaYoshihiro MochizukiKazuto Hirokawa
    • B24B49/00B24B1/00B24B49/08B24B49/16B24D11/00B24B37/04
    • B24B37/005
    • A polishing apparatus is provided for polishing wafers at a high yield rate even if roll-off exists. The polishing apparatus polishes a wafer W by applying a pressure between a polishing member (polishing pad) 201 and the wafer W held by a holding member (top ring) 52 and relatively moving the polishing member 201 to the wafer W. The polishing apparatus comprises a top ring 52 for holding the wafer W, a pressure adjusting mechanism 206 for adjusting a supporting pressure with which the wafer W is supported on a supporting surface by a retainer ring 203, and a control unit 208 for controlling the pressure adjusting mechanism 206 to bring the supporting pressure to a desired pressure based on a roll off quantity of the wafer W. The top ring 52 comprises an air bag 202 for pressing the wafer W against the polishing pad 201, a retainer ring 203 which surrounds the wafer W, and an air bag 204 for pressing the retainer ring 203.
    • 提供抛光装置用于以高屈服率抛光晶片,即使存在滚降。 抛光装置通过在抛光构件(抛光垫)201和由保持构件(顶环))52保持的晶片W之间施加压力并将抛光构件201相对移动到晶片W来对晶片W进行抛光。抛光装置包括 用于保持晶片W的顶环52,用于调节通过保持环203将晶片W支撑在支撑表面上的支撑压力的压力调节机构206以及用于将压力调节机构206控制到 基于晶片W的滚降量将支撑压力提高到期望的压力。顶环52包括用于将晶片W压靠在抛光垫201上的气囊202,围绕晶片W的保持环203和 用于按压保持环203的气囊204。
    • 5. 发明申请
    • IMAGE-CAPTURING APPARATUS AND IMAGE PROCESSING METHOD
    • 图像捕获设备和图像处理方法
    • US20080211931A1
    • 2008-09-04
    • US12026026
    • 2008-02-05
    • Toshiki FUJISAWAToru ShionoHitoshi YanoShinichi MaehamaAkira FukudaShinya Nara
    • Toshiki FUJISAWAToru ShionoHitoshi YanoShinichi MaehamaAkira FukudaShinya Nara
    • H04N5/76H04N9/77
    • H04N5/232H04N5/23245H04N5/765H04N5/772H04N5/907H04N9/8047H04N9/8205H04N9/8227H04N2101/00
    • An image-capturing apparatus includes an image-capturing unit configured to sequentially output image data in a RAW format related to each of captured images as a result of a continuous series of image capturing operations; a signal processor configured to perform a predetermined process on the image data in a RAW format and output processed image data; image processing circuits configured to perform a luminance/color-difference conversion process and a data compression process on the processed image data and output compressed image data; and a recording controller configured to cause compressed image data output from the image processing circuits to be recorded in a predetermined recorder. The signal processor includes a selection output unit configured to selectively output the processed image data related to each of the captured images to the image processing circuits and cause the image processing related to each captured image to be shared by the image processing circuits.
    • 图像捕获装置包括:图像拍摄单元,被配置为作为连续的图像捕获操作的结果,顺序地输出与每个拍摄图像相关的RAW格式的图像数据; 信号处理器,被配置为以RAW格式对所述图像数据执行预定处理,并输出处理后的图像数据; 图像处理电路,被配置为对所处理的图像数据执行亮度/色差转换处理和数据压缩处理,并输出压缩图像数据; 以及记录控制器,被配置为使得从图像处理电路输出的压缩图像数据被记录在预定记录器中。 信号处理器包括选择输出单元,其被配置为向图像处理电路选择性地输出与每个拍摄图像相关的处理后的图像数据,并且使得与每个拍摄图像相关的图像处理由图像处理电路共享。
    • 8. 发明授权
    • Polishing apparatus and polishing method
    • 抛光设备和抛光方法
    • US07976358B2
    • 2011-07-12
    • US12613044
    • 2009-11-05
    • Akira FukudaYoshihiro MochizukiKazuto Hirokawa
    • Akira FukudaYoshihiro MochizukiKazuto Hirokawa
    • B24B49/00B24B51/00
    • B24B37/005
    • A polishing apparatus polishes wafers at a high yield rate even if roll-off exists. The polishing apparatus polishes a wafer by applying a pressure between a polishing member (polishing pad) and the wafer held by a holding member (top ring) and moving the polishing member relative to the wafer. The polishing apparatus includes a top ring for holding the wafer, a pressure adjusting mechanism for adjusting a supporting pressure with which the wafer is supported on a supporting surface by a retainer ring, and a control unit for controlling the pressure adjusting mechanism to bring the supporting pressure to a desired pressure based on a roll off quantity of the wafer. The top ring comprises an air bag for pressing the wafer against the polishing pad, a retainer ring which surrounds the wafer, and an air bag for pressing the retainer ring.
    • 即使存在滚降,抛光装置以高屈服率抛光晶片。 抛光装置通过在抛光构件(抛光垫)和由保持构件(顶环)保持的晶片之间施加压力并且相对于晶片移动抛光构件来抛光晶片。 抛光装置包括用于保持晶片的顶环,用于调节通过保持环将晶片支撑在支撑表面上的支撑压力的压力调节机构,以及用于控制压力调节机构以使支撑 基于晶片的滚降量将压力压到所需的压力。 顶环包括用于将晶片压靠在抛光垫上的气囊,围绕晶片的保持环和用于按压保持环的气囊。