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1. 发明授权

US11088013B2 Supplementary tool for chip transfer device with removal tool and turning tool 有权
公开(公告)号：US11088013B2
公开(公告)日：2021-08-10
申请号：US16163758
申请日：2018-10-18
申请人： ASM Assembly Systems GmbH & Co. KG
发明人： Sebastian Lohmeier , Thomas Rossmann , Michele Trigiani
IPC分类号： H01L21/687 , H01L21/67 , H01L21/683
摘要： A device for transferring chips from a wafer to a placement head of an automatic placement machine. The device includes a removal tool rotatable about a first axis of rotation (i) for the removing of singulated chips from the wafer, (ii) for turning the chips to provide them as FCOB chips at a first collection position, and (iii) for transferring, at a common transfer position, the chips to a turning tool rotatable about a second axis of rotation; and the rotatable turning tool (i) for receiving of chips from the removal tool, and (ii) for again turning the received chips, in order to provide them as COB chips at a second collection position. The removal tool has a plurality of first grippers, which are arranged protruding radially from the first axis of rotation in a first plane. The turning tool has a plurality of second grippers, which are arranged radially protruding from the second axis of rotation in a second plane. At least one rotatable tool of the removal tool and the turning tool has a first interface, at which a supplementary tool with a plurality of further grippers can be mounted, which are arranged radially protruding from a center axis in a further plane. The first interface is designed such that the center axis coincides with the first or second axis of rotation. A chip transfer system with such a device and with such a supplementary tool, a placement system with such a system, and a method for replacing a gripper in such a system.

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