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    • 1. 发明授权
    • Adaptive X-ray optics
    • 自适应X射线光学
    • US08030629B2
    • 2011-10-04
    • US12520551
    • 2007-12-06
    • Zacharias HelmutMartin Silles
    • Zacharias HelmutMartin Silles
    • G21K1/06H01L31/0232G01N23/20
    • G21K1/06G02B26/0825G21K2201/062
    • The invention relates to an adaptive optical device for the reflection of impinging radiation, the adaptive optical device comprising at least one actuator and at least one partially reflective volume. The at least one partially reflective volume has a first surface that is oriented to the impinging radiation. The at least one partially reflective volume is at least partially deformable by said at least one actuator such that the impinging radiation is reflected at the at least one partially reflective volume substantially in accordance with Bragg's law. Further, the invention relates to a method and apparatus for controlling the shape of an adaptive optical device.
    • 本发明涉及用于反射入射辐射的自适应光学装置,所述自适应光学装置包括至少一个致动器和至少一个部分反射体积。 至少一个部分反射体积具有被定向到入射辐射的第一表面。 所述至少一个部分反射体积可由所述至少一个致动器至少部分地变形,使得所述入射辐射基本上根据布拉格定律在所述至少一个部分反射体积处反射。 此外,本发明涉及一种用于控制自适应光学装置的形状的方法和装置。