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1. 发明授权

US5485861A Cleaning tank 失效
标题翻译：清洗槽
公开(公告)号：US5485861A
公开(公告)日：1996-01-23
申请号：US317351
申请日：1994-10-04
申请人： Yutaka Hiratsuka , Tadashi Akiyama
发明人： Yutaka Hiratsuka , Tadashi Akiyama
IPC分类号： B08B3/10 , B08B3/04 , H01L21/00 , H01L21/304 , B08B11/00
CPC分类号： H01L21/67057 , B08B3/04 , Y10S134/902
摘要： A cleaning tank defining therein a cleaning chamber adapted to receive an article to be cleaned and having an upper opening for carrying the article into and out of the cleaning chamber, a plurality of small holes provided in the bottom wall of the cleaning chamber and communicated with an outlet port, and at least one inlet port for introducing a cleaning liquid into the cleaning tank and into the cleaning chamber only through the upper opening thereof.
摘要翻译：清洁槽，其中限定有适于容纳要清洁的物品的清洁室，并具有用于将物品运入和移出清洁室的上部开口;多个小孔，设置在清洁室的底壁中并与出口和至少一个入口，用于仅通过其上开口将清洁液引入清洗槽并进入清洁室。

2. 发明授权

US4976815A Draft chamber 失效
标题翻译：起草室
公开(公告)号：US4976815A
公开(公告)日：1990-12-11
申请号：US426208
申请日：1989-10-25
申请人： Yutaka Hiratsuka , Tadahiro Ohmi , Junichi Murota , Yoshio Fujisaki , Masato Noda , Yoshimitsu Kitada , Terutaka Sahara
发明人： Yutaka Hiratsuka , Tadahiro Ohmi , Junichi Murota , Yoshio Fujisaki , Masato Noda , Yoshimitsu Kitada , Terutaka Sahara
IPC分类号： B01L1/00 , H01L21/00 , H01L21/304 , H01L21/306
CPC分类号： H01L21/67023
摘要： A draft chamber is located within a clean room for sequentially immersing and processing carriers such as silicone wafers in a plurality of solution vessels provided in the draft chamber. In the draft chamber, a first air flow moves in a substantially horizontal direction from the front portion of the draft chamber toward the rear portion above the surfaces of solutions contained in chemical solution vessels which generate toxic gasses and a second air flow moves downward from the ceiling of the draft chamber. Thus, the toxic gasses generated from the chemical solution vessels are prevented from leaking into the clean room.
摘要翻译：抽气室位于洁净室内，用于在设置在通风室中的多个溶液容器中顺序浸渍和处理诸如硅胶片的载体。在通气室中，第一气流沿着大致水平的方向从引流室的前部朝向包含在产生有毒气体的化学溶液容器中的溶液表面上方的后部移动，并且第二气流从起草室的天花板。因此，防止从化学溶液容器产生的有毒气体泄漏到洁净室中。

3. 发明授权

US4890481A System for measuring foreign materials in liquid 失效
标题翻译：用于测量液体中异物的系统
公开(公告)号：US4890481A
公开(公告)日：1990-01-02
申请号：US226204
申请日：1988-07-29
申请人： Masayoshi Ezawa , Shigeru Wakana , Akira Misumi , Yoshifumi Tomita , Yutaka Hiratsuka
发明人： Masayoshi Ezawa , Shigeru Wakana , Akira Misumi , Yoshifumi Tomita , Yutaka Hiratsuka
IPC分类号： G01N15/00 , G01N15/06 , G01N21/05 , G01N21/85
CPC分类号： G01N15/06 , G01N2015/0053 , G01N2021/054 , G01N21/85
摘要： A system for measuring a foreign material in a liquid, includes a sampling section, vacuum deaerators, foreign material measuring sensors. The sampling section prepares a sample liquid containing various foreign materials having particles of different sizes and numbers and a calibration standard liquid containing particles of known sizes and numbers. The vacuum deaerators deaerate gases mixed in the sample and calibration standard liquids. The sensors detect the foreign materials in the deaerated liquids. These sensors are arranged in front of the deaerators, respectively.
摘要翻译：一种用于测量液体中异物的系统，包括取样部分，真空除氧器，异物测量传感器。采样部分准备含有具有不同尺寸和数量的颗粒的各种异物的样品液体和含有已知尺寸和数量的颗粒的校准标准液。真空除氧器对样品中混合的气体和校准标准液体进行脱气。传感器检测脱气液体中的异物。这些传感器分别布置在除气器的前面。

4. 发明授权

US4779451A System for measuring foreign materials in liquid 失效
公开(公告)号：US4779451A
公开(公告)日：1988-10-25
申请号：US14787
申请日：1987-02-13
申请人： Masayoshi Ezawa , Shigeru Wakana , Akira Misumi , Yoshifumi Tomita , Yutaka Hiratsuka
发明人： Masayoshi Ezawa , Shigeru Wakana , Akira Misumi , Yoshifumi Tomita , Yutaka Hiratsuka
IPC分类号： G01N29/036 , G01N15/00 , G01N15/06 , G01N21/05 , G01N21/85 , G01N15/07
CPC分类号： G01N15/06 , G01N2015/0053 , G01N2021/054 , G01N21/85
摘要： A system for measuring a foreign material in a liquid, includes a sampling section, vacuum deaerators, foreign material measuring sensors. The sampling section prepares a sample liquid containing various foreign materials having particles of different sizes and numbers and a calibration standard liquid containing particles of known sizes and numbers. The vacuum deaerators deaerate gases mixed in the sample and calibration standard liquids. The sensors detect the foreign materials in the deaerated liquids. These sensors are arranged in front of the deaerators, respectively.

5. 发明授权

US4569592A Plasma monitor 失效
标题翻译：等离子显示器
公开(公告)号：US4569592A
公开(公告)日：1986-02-11
申请号：US445093
申请日：1982-11-29
申请人： Hisajiro Osada , Yutaka Hiratsuka
发明人： Hisajiro Osada , Yutaka Hiratsuka
IPC分类号： C23C14/54 , G01N21/27 , G01N21/64 , H05H1/00 , G01J3/443
CPC分类号： H05H1/0012 , C23C14/54 , G01N21/6402
摘要： A plasma monitor which measures the distribution of particular chemical species (atom, molecule, ion) in plasma generated inside an instrument making use of the plasma. Laser light having a particular wavelength is radiated to the particular chemical species so as to let it generate fluorescence. The fluorescence is picked up for each of a plurality of zones divided in the radiating direction of the laser light and the construction of the chemical species in each zone is determined on the basis of the intensity of the fluorescence in each zone in order to determine the concentration distribution of the particular chemical species contained in the plasma. The operative condition within the sealed vessel can be grasped more accurately by measuring the distribution of the concentration of the chemical species which is closely related with the condition of deposition or etching.
摘要翻译：一种等离子体监测器，用于测量使用等离子体的仪器内产生的等离子体中特定化学物质（原子，分子，离子）的分布。具有特定波长的激光被辐射到特定的化学物质，以使其产生荧光。根据激光的辐射方向划分的多个区域中的每一个拾取荧光，并且基于每个区域中的荧光强度来确定每个区域中的化学物质的构造，以便确定血浆中包含的特定化学物质的浓度分布。通过测量与沉积或蚀刻条件密切相关的化学物质的浓度分布，可以更精确地掌握密封容器内的操作条件。

6. 发明授权

US4541718A Plasma monitoring method and plasma monitor 失效
标题翻译：等离子体监测方法和等离子体显示器
公开(公告)号：US4541718A
公开(公告)日：1985-09-17
申请号：US455802
申请日：1983-01-05
申请人： Hisajiro Osada , Yutaka Hiratsuka , Masahiro Watanabe
发明人： Hisajiro Osada , Yutaka Hiratsuka , Masahiro Watanabe
IPC分类号： G01N21/64 , G01N21/62 , H05H1/00
CPC分类号： H05H1/0037 , G01N21/62
摘要： A plasma monitoring method and a plasma monitor in a dry process which utilizes a plasma. Among a large number of chemical species which constitute the plasma, one or two specified chemical species suited to grasp the situation of the dry process has/have its/their plasma light/lights detected so as to obtain the three-dimensional distribution of the densities of the single specified chemical species or the ratios of the two specified chemical species in the plasma.
摘要翻译：等离子体监测方法和使用等离子体的干法中的等离子体监测器。在构成等离子体的大量化学物质中，适合于掌握干法处理情况的一种或两种特定化学物质已经检测到其等离子体光/光，以获得密度的三维分布的单一指定化学物质或等离子体中两种特定化学物质的比例。

7. 发明授权

US4566116A Soft X-ray generator 失效
标题翻译：软X射线发生器
公开(公告)号：US4566116A
公开(公告)日：1986-01-21
申请号：US488758
申请日：1983-04-26
申请人： Asao Nakano , Yutaka Hiratsuka
发明人： Asao Nakano , Yutaka Hiratsuka
IPC分类号： G03F7/20 , H01J35/16 , H05G1/02 , H01J35/00 , H01J5/18 , H01J35/10 , H01J35/14
CPC分类号： G03F7/70191 , G03F7/70808 , G03F7/70916 , H01J35/16 , H05G1/02 , H01J2235/168
摘要： A soft X-ray generator comprises an electron gun and an anode which are disposed in individual vacuum containers, respectively but are interconnected by a conduit provided with an electron lens so that an electron beam generated from the electron gun is guided through the conduit on the anode in a focused form, thereby emitting soft X-rays from the surface of the anode.
摘要翻译：软X射线发生器包括分别设置在各个真空容器中的电子枪和阳极，但是通过设置有电子透镜的导管互连，使得从电子枪产生的电子束被引导通过导管阳极，从而从阳极的表面发射软X射线。

8. 发明授权

US4505586A Laser Raman spectrophotometry system and adjustment thereof 失效
标题翻译：激光拉曼分光光度法及其调整
公开(公告)号：US4505586A
公开(公告)日：1985-03-19
申请号：US337818
申请日：1982-01-07
申请人： Kenji Tochigi , Yoshiaki Hanyu , Yutaka Hiratsuka
发明人： Kenji Tochigi , Yoshiaki Hanyu , Yutaka Hiratsuka
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01N21/65 , G01J3/44
摘要： A laser Raman spectrophotometry system for analyzing a sample material by measuring spectrum of Raman scattering produced by the sample under irradiation of laser light includes a laser light source for excitation of luminescence in addition to a laser light source for the excitation of the Raman scattering, and an optical system for rendering the optical path of the laser beam for luminescence excitation to substantially coincide with the optical path of the laser beam for the Raman scattering immediately before irradiation of the specimen. Luminescence spectrum brought about by the laser beam for luminescence excitation is adjusted by adjusting the laser power to simulate the luminescence spectrum concurrently produced by the laser beam for the excitation of Raman scattering, wherein both spectra of luminescence are subtractively combined together, to thereby cancel the luminescence component and allow only the spectrum of Raman-scattered light to be measured with a correspondingly enhanced accuracy.
摘要翻译：通过在激光照射下测量由样品产生的拉曼散射光谱来分析样品材料的激光拉曼分光光度测定系统包括除了用于激发拉曼散射的激光源之外还激发发光的激光光源，以及用于使用于发光激发的激光束的光路的光学系统在紧接在样品的照射之前与用于拉曼散射的激光束的光路基本一致。通过调整激光功率来调整由激光束产生的用于发光激发的发光光谱，以模拟由用于激发拉曼散射的激光束同时产生的发光光谱，其中发光的两个光谱被相减地组合在一起，从而取消发光成分，仅允许以相应增强的精度测量拉曼散射光的光谱。

9. 发明授权

US4586819A Laser Raman microprobe 失效
标题翻译：激光拉曼微探针
公开(公告)号：US4586819A
公开(公告)日：1986-05-06
申请号：US510912
申请日：1983-07-05
申请人： Kenji Tochigi , Yoshiaki Hanyu , Yutaka Hiratsuka
发明人： Kenji Tochigi , Yoshiaki Hanyu , Yutaka Hiratsuka
IPC分类号： G01N21/65 , G01J3/44
CPC分类号： G01N21/65 , G01N2021/656
摘要： A laser Raman microprobe separates a laser beam reflected by a sample and a Raman scattered light generated by the sample by a filter which transmits or reflects a light in a predetermined wavelength region including a wavelength region of the reflected laser beam and applies only the Raman scattered light separated by the filter to a single-monochromator for spectroanalysis. A high sensitivity analysis is attained by the single-monochromator.
摘要翻译：激光拉曼微探针将由样品反射的激光束和由样品产生的拉曼散射光通过滤光器分离，所述滤光器透射或反射包括反射激光束的波长区域的预定波长区域中的光，并仅施加拉曼散射过滤器将光分离成单色仪进行光谱分析。通过单色仪实现高灵敏度分析。

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