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    • 2. 发明授权
    • Method for cleaning photo mask
    • 清洁光罩的方法
    • US07718008B2
    • 2010-05-18
    • US11839655
    • 2007-08-16
    • Shu ShimadaNoriyuki TakahashiHiroko TanakaHiroyuki IshiiYusuke ShojiMasashi Ohtsuki
    • Shu ShimadaNoriyuki TakahashiHiroko TanakaHiroyuki IshiiYusuke ShojiMasashi Ohtsuki
    • B08B7/00G01N21/00
    • G03F7/70925G03F1/64G03F1/82
    • The present invention provides a method for cleaning a photo mask without the need for removal of the pellicle mounted on the photo mask, without the large scale equipment for washing with a solution, with a small number of steps for cleaning and inspection, and without the increase of the production cost. The method for cleaning a photo mask with a pellicle mounted, in which the pellicle frame has a gas introducing hole and a gas discharging hole, comprises: a step of introducing a gaseous substituting substance from the gas introducing hole in a pellicle inner space surrounded by the photo mask and the pellicle, substituting foreign substances on the photo mask, and discharging the foreign substances from the gas discharging hole; and a step of irradiating an ultraviolet ray to the photo mask, while an air or a nitrogen gas or a rare gas is introduced from the gas introducing hole, for degrading the substituted substituting substance so as to be gaseous, and discharging the same from the gas discharging hole.
    • 本发明提供了一种清洁光掩模的方法,而不需要除去安装在光掩模上的防护薄膜组件,而不需要用溶液洗涤的大规模设备,具有少量用于清洁和检查的步骤,并且没有 增加生产成本。 用防护薄膜组件清洁光罩的方法,其中防护薄膜组件框架具有气体导入孔和气体排出孔,包括:将气体取代物质从气体导入孔引入防护薄膜组件内部空间的步骤, 光掩模和防护薄膜组件,在光掩模上代替异物,并从排气孔排出异物; 以及从气体导入孔导入空气或氮气或稀有气体而将紫外线照射到光掩模的步骤,使取代的取代物质降解成气态,并将其从 气体排放孔。
    • 3. 发明申请
    • METHOD FOR CLEANING PHOTO MASK
    • 清洁照相胶片的方法
    • US20080251100A1
    • 2008-10-16
    • US11839655
    • 2007-08-16
    • Shu SHIMADANoriyuki TAKAHASHIHiroko TANAKAHiroyuki ISHIIYusuke SHOJIMasashi OHTSUKI
    • Shu SHIMADANoriyuki TAKAHASHIHiroko TANAKAHiroyuki ISHIIYusuke SHOJIMasashi OHTSUKI
    • B08B5/00
    • G03F7/70925G03F1/64G03F1/82
    • The present invention provides a method for cleaning a photo mask without the need for removal of the pellicle mounted on the photo mask, without the large scale equipment for washing with a solution, with a small number of steps for cleaning and inspection, and without the increase of the production cost. The method for cleaning a photo mask with a pellicle mounted, in which the pellicle frame has a gas introducing hole and a gas discharging hole, comprises: a step of introducing a gaseous substituting substance from the gas introducing hole in a pellicle inner space surrounded by the photo mask and the pellicle, substituting foreign substances on the photo mask, and discharging the foreign substances from the gas discharging hole; and a step of irradiating an ultraviolet ray to the photo mask, while an air or a nitrogen gas or a rare gas is introduced from the gas introducing hole, for degrading the substituted substituting substance so as to be gaseous, and discharging the same from the gas discharging hole.
    • 本发明提供了一种清洁光掩模的方法,而不需要除去安装在光掩模上的防护薄膜组件,而不需要用溶液洗涤的大规模设备,具有少量用于清洁和检查的步骤,并且没有 增加生产成本。 用防护薄膜组件清洁光罩的方法,其中防护薄膜组件框架具有气体导入孔和气体排出孔,包括:将气体取代物质从气体导入孔引入防护薄膜组件内部空间的步骤, 光掩模和防护薄膜组件,在光掩模上代替异物,并从排气孔排出异物; 以及从气体导入孔导入空气或氮气或稀有气体而将紫外线照射到光掩模的步骤,使取代的取代物质降解成气态,并将其从 气体排放孔。
    • 5. 发明申请
    • Mower Unit Suspended from a Grass Mower
    • 割草机悬挂在割草机上
    • US20110232250A1
    • 2011-09-29
    • US12872002
    • 2010-08-31
    • Akihito SugioAkira MinouraYoshikazu TogoshiEiji SatouTakahiro ShiragaKazuo KoikeMotosumi ShiotsukiYusuke Shoji
    • Akihito SugioAkira MinouraYoshikazu TogoshiEiji SatouTakahiro ShiragaKazuo KoikeMotosumi ShiotsukiYusuke Shoji
    • A01D19/00
    • A01D34/003
    • A mower unit is disclosed, including a mower deck mounting therein in parallel layout first, second and third rotary blades rotatably driven about vertical axes and a washing device. The mower deck includes a top wall, side walls and first, second and third auxiliary side walls for evacuation, the auxiliary side walls having shapes along at least a machine body rear portion of the rotary path of each rotary blade. The washing device includes a single water supplying unit disposed upwardly of the top wall for supplying washing water and first, second and third water discharging units disposed through the first, second and third auxiliary side walls for discharging water to the first, second and third rotary blades respectively. The washing device includes also a water supplying pipe unit interconnecting and communicating the water supplying unit to the first, second and third water discharging units. The water supplying pipe unit is disposed within a mower deck rear space delimited by outer faces of the first, second and third auxiliary side walls. The first, second and third water discharging units are configured to discharge the washing water in such a manner that the center flow portion of the discharged water respectively therefrom is confined within the inner space of the mower deck.
    • 公开了一种割草机装置,包括以平行布局安装在其中的割草机甲板,第一和第三旋转叶片围绕垂直轴线可旋转地驱动和洗涤装置。 割草机底盘包括顶壁,侧壁以及用于排空的第一,第二和第三辅助侧壁,辅助侧壁具有至少每个旋转叶片的旋转路径的机体后部的形状。 洗涤装置包括设置在顶壁上方用于供应洗涤水的单个供水单元和通过第一,第二和第三辅助侧壁设置的第一,第二和第三排水单元,用于将水排放到第一,第二和第三旋转 刀片分别。 洗涤装置还包括将供水单元互连并连通到第一,第二和第三排水单元的供水管单元。 供水管单元设置在由第一,第二和第三辅助侧壁的外表面限定的割草机甲板后部空间内。 第一,第二和第三排水单元被构造成排出洗涤水,使得分别从其排出的水的中心流动部分被限制在割草机甲板的内部空间内。
    • 8. 发明授权
    • Mower unit with washing device suspended from a grass mower
    • 割草机与洗衣机悬挂在割草机上
    • US08087221B2
    • 2012-01-03
    • US12872002
    • 2010-08-31
    • Akihito SugioAkira MinouraYoshikazu TogoshiEiji SatouTakahiro ShiragaKazuo KoikeMotosumi ShiotsukiYusuke Shoji
    • Akihito SugioAkira MinouraYoshikazu TogoshiEiji SatouTakahiro ShiragaKazuo KoikeMotosumi ShiotsukiYusuke Shoji
    • A01D19/00
    • A01D34/003
    • A mower unit includes a mower deck mounting therein in parallel layout first, second and third rotary blades rotatably driven about vertical axes and a washing device. The mower deck includes a top wall, side walls and first, second and third auxiliary side walls for evacuation. The washing device includes a single water supplying unit disposed upwardly of the top wall for supplying washing water and first, second and third water discharging units disposed through the first, second and third auxiliary side walls for discharging water to the first, second and third rotary blades respectively. The washing device includes also a water supplying pipe unit interconnecting and communicating the water supplying unit to the first, second and third water discharging units. The water supplying pipe unit is disposed within a mower deck rear space delimited by outer faces of the first, second and third auxiliary side walls.
    • 割草机单元包括以平行布局安装在其中的割草机板,第一,第二和第三旋转叶片围绕垂直轴线可旋转地驱动,以及清洗装置。 割草机甲板包括顶壁,侧壁和用于排空的第一,第二和第三辅助侧壁。 洗涤装置包括设置在顶壁上方用于供应洗涤水的单个供水单元和通过第一,第二和第三辅助侧壁设置的第一,第二和第三排水单元,用于将水排放到第一,第二和第三旋转 刀片分别。 洗涤装置还包括将供水单元互连并连通到第一,第二和第三排水单元的供水管单元。 供水管单元设置在由第一,第二和第三辅助侧壁的外表面限定的割草机甲板后部空间内。