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1. 发明申请

US20100078865A1 Sheet clamping apparatus 审中-公开
标题翻译：纸张夹紧装置
公开(公告)号：US20100078865A1
公开(公告)日：2010-04-01
申请号：US12323581
申请日：2008-11-26
申请人： Yung Shuen PAN , Chia-Hao YANG
发明人： Yung Shuen PAN , Chia-Hao YANG
IPC分类号： H01L21/683
CPC分类号： H01L21/68721 , H01L21/68728
摘要： The present invention discloses a sheet clamping apparatus for a reticle, a wafer, a glass substrate, a LCD panel et al. The apparatus comprises a pair of brackets, each bracket having at least one cam groove thereon for defining a movement route by two opposing sides of the cam groove, and one end of each bracket being joined with a connecting frame. One end of a clamping arm is joined with each cam groove, and the other end of the clamping arm is clamping the sheet (ex: a reticle, a wafer, a glass substrate, a LCD panel et al.). The characteristic of the sheet clamping apparatus is that: on the other end of each clamping arm is formed with a clamping head with recess, and at least a pair of rollers are disposed on the recess of clamping head for stably clamping the reticle or a semiconductor component stored in the pod.
摘要翻译：本发明公开了一种用于掩模版，晶片，玻璃基板，LCD面板等的片材夹紧装置。该装置包括一对支架，每个支架在其上具有至少一个凸轮槽，用于通过凸轮槽的两个相对侧限定运动路线，并且每个支架的一端与连接框架连接。夹持臂的一端与每个凸轮槽接合，并且夹紧臂的另一端夹紧片材（例如，掩模版，晶片，玻璃基板，LCD面板等）。夹紧装置的特征在于：每个夹紧臂的另一端形成有具有凹槽的夹紧头，并且至少一对辊设置在夹紧头的凹部上，用于稳定地夹紧掩模版或半导体组件存储在pod中。

2. 发明申请

US20100089491A1 Gas Filling Socket, Gas Filling Socket Set, and Gas Filling Apparatus 审中-公开
标题翻译：气体填充插座，气体填充套筒和气体填充装置
公开(公告)号：US20100089491A1
公开(公告)日：2010-04-15
申请号：US12339143
申请日：2008-12-19
申请人： Yung-Shuen PAN
发明人： Yung-Shuen PAN
IPC分类号： F17C5/00 , H01L21/67
CPC分类号： H01L21/67784 , H01L21/67766
摘要： The present invention is related to a gas filling socket, gas filling socket set, and gas filling apparatus. The gas filling socket comprises a carrying base having an upper surface and a lower surface, the upper surface being used to carry a semiconductor storage device or a reticle pod; at least a pair of through holes being set on and through the carrying base; at least one gas input port connecting to one through hole, and at least one gas output port connecting to another through hole, wherein the characteristic of the gas filling socket is that: the upper surface of the carrying base includes an angle guiding board disposed on one side of the carrying base for providing a guiding function to ensure the positioning of the semiconductor storage device or the reticle pod while the semiconductor storage device or the reticle pod is placed into the gas filling socket.
摘要翻译：本发明涉及一种气体填充插座，充气插座组和气体充填装置。气体填充插座包括具有上表面和下表面的承载基座，上表面用于承载半导体存储装置或掩模版盒; 至少一对通孔设置在承载基座上并穿过承载基座; 连接到一个通孔的至少一个气体输入端口和连接到另一通孔的至少一个气体输出端口，其中所述气体填充插座的特征是：所述承载基座的上表面包括设置在用于提供引导功能的承载基座的一侧，以确保半导体存储装置或标线盒的定位，同时将半导体存储装置或标线盒放置在充气插座中。

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