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    • 4. 发明授权
    • Semiconductor memory devices and methods of fabricating the same
    • 半导体存储器件及其制造方法
    • US08652897B2
    • 2014-02-18
    • US13337999
    • 2011-12-27
    • Youngkuk KimInsang JeonYoungseok KimYoung-Lim ParkHo-Kyun An
    • Youngkuk KimInsang JeonYoungseok KimYoung-Lim ParkHo-Kyun An
    • H01L21/8238
    • H01L45/12H01L27/101H01L27/1021H01L27/2409H01L45/06H01L45/1233H01L45/126H01L45/144H01L45/1683
    • Provided are semiconductor memory devices and the methods of fabricating the same. The method may include forming a plurality of diode patterns in each of a plurality of first trenches, each of the plurality of first trenches including at least two active regions, the plurality of diode patterns occupying a plurality of spaces, treating the plurality of diode patterns to form a plurality of semiconductor patterns in each of the plurality of spaces, removing portions of the plurality of semiconductor patterns to form a recess in each of the plurality of spaces, treating the of the plurality of semiconductor patterns to form a plurality of diodes in each of the plurality of spaces, forming a bottom electrode on each of the plurality of diodes, forming a plurality of memory elements on each of the bottom electrodes, and forming a plurality of upper interconnection lines on the plurality of memory elements.
    • 提供半导体存储器件及其制造方法。 该方法可以包括在多个第一沟槽的每一个中形成多个二极管图案,多个第一沟槽中的每一个包括至少两个有效区域,多个二极管图案占据多个空间,处理多个二极管图案 在所述多个空间中的每一个中形成多个半导体图案,去除所述多个半导体图案的部分以在所述多个空间中的每一个中形成凹部,处理所述多个半导体图案以形成多个二极管 多个空间中的每一个,在所述多个二极管中的每一个上形成底部电极,在每个所述底部电极上形成多个存储元件,并且在所述多个存储元件上形成多个上部互连线。