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1. 发明授权

US08281794B2 Stage device and stage cleaning method 有权
标题翻译：舞台装置和舞台清洁方法
公开(公告)号：US08281794B2
公开(公告)日：2012-10-09
申请号：US12799675
申请日：2010-04-29
申请人： Yoshihisa Oae , Youichi Shimizu
发明人： Yoshihisa Oae , Youichi Shimizu
IPC分类号： B08B3/00
CPC分类号： G03F7/70925 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70775 , G03F7/70816 , G03F7/70916 , H01J37/3174 , H01J37/32862 , H01L21/67028
摘要： A stage device for use in a vacuum includes a frame-shaped movable stage having a sample mounting surface, a fixed stage surrounded by the movable stage, an air bearing to float the movable stage by supplying gas to a gap between the stages, a pressure regulator to regulate a pressure of the gas, a differential pumping portion to prevent the gas from flowing outside the gap, and a controller. The controller moves the movable stage within a predetermined range under a pressure in the differential pumping portion set equal to that for movable stage in use when setting a floating height of the movable stage lower than that for movable stage in use, and under the pressure in the differential pumping portion set higher than that for movable stage in use when setting the floating height of the movable stage equal to that for movable stage in use.
摘要翻译：用于真空的舞台装置包括：具有样品安装表面的框架式可移动台，由可动台环绕的固定台，通过向台架之间的间隙供应气体来浮动可移动台的空气轴承，压力用于调节气体的压力的调节器，用于防止气体流过间隙的差动泵送部分和控制器。当将可移动平台的浮动高度设定得比使用中的可移动平台的浮动高度低时，控制器将可移动平台移动到与使用中的可移动平台相同的差动泵送部分的压力下的预定范围内，并且在当使可移动台的浮动高度等于在使用中的可移动台的浮动高度时，差分泵送部分设定得高于使用中的可动台的差动泵送部分。

2. 发明申请

US20120118325A1 STAGE DEVICE AND STAGE CLEANING METHOD 有权
标题翻译：阶段设备和阶段清洁方法
公开(公告)号：US20120118325A1
公开(公告)日：2012-05-17
申请号：US13340251
申请日：2011-12-29
申请人： Yoshihisa Oae , Youichi Shimizu
发明人： Yoshihisa Oae , Youichi Shimizu
IPC分类号： B08B5/02 , B08B7/00
CPC分类号： G03F7/70925 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70775 , G03F7/70816 , G03F7/70916 , H01J37/3174 , H01J37/32862 , H01L21/67028
摘要： A stage device for use in a vacuum includes a frame-shaped movable stage having a sample mounting surface, a fixed stage surrounded by the movable stage, an air bearing to float the movable stage by supplying gas to a gap between the stages, a pressure regulator to regulate a pressure of the gas, a differential pumping portion to prevent the gas from flowing outside the gap, and a controller. The controller moves the movable stage within a predetermined range under a pressure in the differential pumping portion set equal to that for movable stage in use when setting a floating height of the movable stage lower than that for movable stage in use, and under the pressure in the differential pumping portion set higher than that for movable stage in use when setting the floating height of the movable stage equal to that for movable stage in use.
摘要翻译：用于真空的舞台装置包括：具有样品安装表面的框架式可移动台，由可动台环绕的固定台，通过向台架之间的间隙供应气体来浮动可移动台的空气轴承，压力用于调节气体的压力的调节器，用于防止气体流过间隙的差动泵送部分和控制器。当将可移动平台的浮动高度设定得比使用中的可移动平台的浮动高度低时，控制器将可移动平台移动到与使用中的可移动平台相同的差动泵送部分的压力下的预定范围内，并且在当使可移动台的浮动高度等于在使用中的可移动台的浮动高度时，差分泵送部分设定得高于使用中的可动台的差动泵送部分。

3. 发明申请

US20110204255A1 Stage device 有权
标题翻译：舞台装置
公开(公告)号：US20110204255A1
公开(公告)日：2011-08-25
申请号：US12932246
申请日：2011-02-22
申请人： Yoshihisa Ooae , Youichi Shimizu
发明人： Yoshihisa Ooae , Youichi Shimizu
IPC分类号： H01J37/20
CPC分类号： F16C29/025 , F16C32/0614 , F16C2300/62 , F16C2360/45 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01J2237/2006 , H01J2237/202 , H01J2237/3175
摘要： A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having four of upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to supply the gas from an inlet port for letting in the gas generated by the gas supply unit to an outlet port for supplying the gas to the air chamber of the slider.
摘要翻译：在真空中使用的平台装置包括：用于产生气体的气体供应单元; 具有上，下，右和左表面四个的基部构件; 滑块，其形成为围绕所述基座构件且具有面向所述基座构件的各个表面的表面并且被设置为可移动的框架形状; 以及空气轴承，其构造成通过将气体供给到基部构件和滑块之间的空间来浮动滑块。滑块包括：设置在面向基部构件的表面上用于积聚空气的空气室，并且基座构件包括滑块移动空气流动通道，该滑动器移动空气流动通道构造成从用于从气体产生的气体中的入口端口供应气体供给单元到用于将气体供应到滑块的空气室的出口。

4. 发明授权

US4442456A Solid-state imaging device 失效
标题翻译：固态成像装置
公开(公告)号：US4442456A
公开(公告)日：1984-04-10
申请号：US265809
申请日：1981-05-21
申请人： Yoshio Iwata , Tsutomu Fujita , Tsunehisa Horiuchi , Youichi Shimizu
发明人： Yoshio Iwata , Tsutomu Fujita , Tsunehisa Horiuchi , Youichi Shimizu
IPC分类号： H01L27/14 , H01L27/146 , H04N5/225 , H04N5/335 , H04N5/372 , H04N5/374 , H04N3/14
CPC分类号： H04N5/2253 , H01L27/14618 , H01L27/14643 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2924/14 , H01L2924/15787 , H01L2924/16195
摘要： An accommodation portion of a solid-state imaging device having a recessed shape in section is so formed in a package such that the center thereof is deviated from the center of the package. A light-receiving element having a light-receiving portion as well as a circuit portion for driving the light-receiving portion that are formed on the same plane, is so disposed in the accommodation portion such that the center of the light-receiving portion is in agreement with the center of the package. The outer diameter of the imaging device can be reduced, and the imaging center can be brought into agreement with the center of the light-receiving portion.
摘要翻译：具有凹形形状的固态成像装置的容纳部分形成为包装体，使得其中心偏离包装的中心。具有光接收部分的光接收元件以及用于驱动形成在同一平面上的光接收部分的电路部分设置在容纳部分中，使得光接收部分的中心为与中心的包裹一致。可以减小成像装置的外径，并且可以使成像中心与光接收部分的中心一致。

5. 发明授权

US08382911B2 Stage device and stage cleaning method 有权
标题翻译：舞台装置和舞台清洁方法
公开(公告)号：US08382911B2
公开(公告)日：2013-02-26
申请号：US13340251
申请日：2011-12-29
申请人： Yoshihisa Oae , Youichi Shimizu
发明人： Yoshihisa Oae , Youichi Shimizu
IPC分类号： B08B7/04
CPC分类号： G03F7/70925 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70775 , G03F7/70816 , G03F7/70916 , H01J37/3174 , H01J37/32862 , H01L21/67028
摘要： A method for a stage device of an electron beam exposure system which conducts a cleaning operation and an electron beam (EB) exposure operation is disclosed. The method includes the steps of moving a movable stage within a predetermined range and regulating pressure of gas supplied to an air bearing; and setting a floating height of the movable stage in the cleaning operation lower than that in the EB exposure operation and setting the pressure in a differential pumping portion in the cleaning operation equal to that in the EB exposure operation, or setting the floating height of the movable stage in the cleaning operation equal to that in the EB exposure operation and setting the pressure in the differential pumping portion in the cleaning operation higher than that in the EB exposure operation.
摘要翻译：公开了一种进行清洗操作和电子束（EB）曝光操作的电子束曝光系统的平台装置的方法。该方法包括以下步骤：将可移动台移动到预定范围内并调节供应给空气轴承的气体的压力; 并且在清洁操作中将移动台的浮动高度设置为低于EB曝光操作中的浮动高度，并将清洁操作中的差动泵送部分中的压力设置为等于EB曝光操作中的压力，或者设置浮动高度清洁操作中的可移动级等于EB曝光操作中的可移动级，并且将清洁操作中的差动泵送部中的压力设置为高于EB曝光操作中的压力。

6. 发明授权

US5123937A Deaerating film and deaerating method 失效
标题翻译：加工薄膜和加工方法
公开(公告)号：US5123937A
公开(公告)日：1992-06-23
申请号：US742025
申请日：1991-08-08
申请人： Yoshihiko Shibata , Yoshihiro Chikamori , Youichi Shimizu
发明人： Yoshihiko Shibata , Yoshihiro Chikamori , Youichi Shimizu
IPC分类号： B01D69/00 , B01D19/00 , B01D71/36 , B01D71/70 , B32B5/18
CPC分类号： B01D19/0031 , B01D71/36
摘要： A degassing method comprising directing a liquid feed containing gas and bubbles into a breathable membrane to remove the bubbles and then into a deaerating module containing a gas-permeable membrane.

7. 发明申请

US20100236576A1 Stage device and stage cleaning method 有权
标题翻译：舞台装置和舞台清洁方法
公开(公告)号：US20100236576A1
公开(公告)日：2010-09-23
申请号：US12799675
申请日：2010-04-29
申请人： Yoshihisa Oae , Youichi Shimizu
发明人： Yoshihisa Oae , Youichi Shimizu
IPC分类号： B08B7/00 , F16C32/06
CPC分类号： G03F7/70925 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70775 , G03F7/70816 , G03F7/70916 , H01J37/3174 , H01J37/32862 , H01L21/67028
摘要： A stage device for use in a vacuum includes a frame-shaped movable stage having a sample mounting surface, a fixed stage surrounded by the movable stage, an air bearing to float the movable stage by supplying gas to a gap between the stages, a pressure regulator to regulate a pressure of the gas, a differential pumping portion to prevent the gas from flowing outside the gap, and a controller. The controller moves the movable stage within a predetermined range under a pressure in the differential pumping portion set equal to that for movable stage in use when setting a floating height of the movable stage lower than that for movable stage in use, and under the pressure in the differential pumping portion set higher than that for movable stage in use when setting the floating height of the movable stage equal to that for movable stage in use.
摘要翻译：用于真空的舞台装置包括：具有样品安装表面的框架式可移动台，由可动台环绕的固定台，通过向台架之间的间隙供应气体来浮动可移动台的空气轴承，压力用于调节气体的压力的调节器，用于防止气体流过间隙的差动泵送部分和控制器。当将可移动平台的浮动高度设定得比使用中的可移动平台的浮动高度低时，控制器将可移动平台移动到与使用中的可移动平台相同的差动泵送部分的压力下的预定范围内，并且在当使可移动台的浮动高度等于在使用中的可移动台的浮动高度时，差分泵送部分设定得高于使用中的可动台的差动泵送部分。

8. 发明授权

US08530857B2 Stage device 有权
标题翻译：舞台装置
公开(公告)号：US08530857B2
公开(公告)日：2013-09-10
申请号：US12932246
申请日：2011-02-22
申请人： Yoshihisa Ooae , Youichi Shimizu
发明人： Yoshihisa Ooae , Youichi Shimizu
IPC分类号： G21K5/08
CPC分类号： F16C29/025 , F16C32/0614 , F16C2300/62 , F16C2360/45 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01J2237/2006 , H01J2237/202 , H01J2237/3175
摘要： A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to guide the gas from an inlet port to an outlet port for supplying the gas to the air chamber of the slider.
摘要翻译：在真空中使用的平台装置包括：用于产生气体的气体供应单元; 具有上，下，右和左表面的基部构件; 滑块，其形成为围绕所述基座构件且具有面向所述基座构件的各个表面的表面并且被设置为可移动的框架形状; 以及空气轴承，其构造成通过将气体供给到基部构件和滑块之间的空间来浮动滑块。该滑块包括：设置在面向基座部件的表面上的用于积聚空气的空气室，底座部件包括滑块移动空气流动通道，该滑动件移动空气流动通道构造成将气体从入口引导到出口以将气体供应到滑块的气室。

9. 发明授权

US5129366A Deaeration system for a boiler 失效
标题翻译：锅炉加油系统
公开(公告)号：US5129366A
公开(公告)日：1992-07-14
申请号：US676656
申请日：1991-03-28
申请人： Yoshihiro Chikamori , Yoshihiko Shibata , Takushi Yokota , Youichi Shimizu
发明人： Yoshihiro Chikamori , Yoshihiko Shibata , Takushi Yokota , Youichi Shimizu
IPC分类号： F22D1/28 , B01D19/00 , F22D11/06 , F24D19/08
CPC分类号： B01D19/0021 , F22D11/06 , F24D19/083
摘要： A boiler system having a condensate line and a deaeration or and a condensate tank characterized by the fact that the deaerator is placed between the condensation tank and the boiler.

10. 发明授权

US5098562A Apparatus for treating deaerated water 失效
标题翻译：用于处理脱气水的设备
公开(公告)号：US5098562A
公开(公告)日：1992-03-24
申请号：US647320
申请日：1991-01-29
申请人： Yoshihiko Shibata , Yoshihiro Chikamori , Youichi Shimizu
发明人： Yoshihiko Shibata , Yoshihiro Chikamori , Youichi Shimizu
IPC分类号： B01D19/00 , B01D61/00 , C02F1/42 , C02F9/00
CPC分类号： C02F9/005 , B01D19/0031 , B01D61/00 , C02F1/42
摘要： A water treating apparatus is provided with a softening section, including an ion-exchange resin-filled section and a softening section disposed integrally with a vacuum deaerating membrane section so as to allow gases to pass through the membrane while a liquid is prevented from passing therethrough. The apparatus is compact in size and easily handled. The softened water provided thereby is useful as deionized and degassed water for boiler water and for the preparation of integrated circuits.
摘要翻译：水处理装置设置有软化部，该软化部包括离子交换树脂填充部和与真空脱气膜部整体设置的软化部，以使液体能够防止液体流过而使气体通过膜。该设备尺寸紧凑，易于处理。由此提供的软化水可用作锅炉水的去离子水和脱气水，并用于制备集成电路。

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