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1. 发明授权

US06418640B1 Drying apparatus for a substrate and drying method thereof 失效
标题翻译：基材干燥装置及其干燥方法
公开(公告)号：US06418640B1
公开(公告)日：2002-07-16
申请号：US09579134
申请日：2000-05-30
申请人： Hiroshi Fukuda , Yoshitomo Yasuike , Kazuhiko Gommori , Kunio Aburada
发明人： Hiroshi Fukuda , Yoshitomo Yasuike , Kazuhiko Gommori , Kunio Aburada
IPC分类号： F26B300
CPC分类号： H01L21/67034 , F26B5/14 , F26B21/004
摘要： Thin substrate plates are transferred in a horizontal or tilted posture on and by a substrate transfer means. Provided by a substrate transfer path is an air knife nozzle for scraping and drying off a liquid successively from surfaces of the substrates on the substrate transfer means. The air knife nozzle is located substantially at a uniform distance across a drying surface of a substrate plate on the transfer means. The air knife nozzle is provided with a slit-like nozzle hole to spurt jet air to the drying surface from an angular direction relative to a direction perpendicular to the substrate transfer direction and to sweep the substrate across the entire width of the drying surface and with a predetermined angle of incidence relative to the substrate transfer direction. Further, an air augmenting means is located in face to face relation with a corner portion of the substrate which is finally swept by the air knife nozzle, for increasing an amount of jet air to purge a liquid which is gathered in the comer portion as a result of the sweeping action of the air jet nozzle.
摘要翻译：薄衬底板以水平或倾斜的姿势被转移到衬底转移装置上。由基板传送路径提供的是用于从基板传送装置上的基板的表面依次刮取和干燥液体的气刀喷嘴。气刀喷嘴基本上位于传送装置上的基板的干燥表面上的均匀距离处。气刀喷嘴设置有狭缝状喷嘴孔，以从相对于垂直于基板输送方向的方向的角度方向喷射空气到干燥表面，并且在基板的整个宽度上扫掠基板，并且与相对于基板传送方向的预定入射角。此外，空气增加装置与最终被气刀喷嘴扫过的基板的角部面对面地设置，用于增加喷射空气的量以吹扫收集在角部中的液体，作为空气喷嘴的扫掠动作的结果。

2. 发明申请

US20050022930A1 Substrate treatment apparatus, substrate treatment method and substrate manufacturing method 审中-公开
标题翻译：基板处理装置，基板处理方法及基板的制造方法
公开(公告)号：US20050022930A1
公开(公告)日：2005-02-03
申请号：US10813926
申请日：2004-03-31
申请人： Yoshihiro Moriguchi , Ryo Izaki , Yoshitomo Yasuike , Takao Kamaishi , Takahisa Ishida
发明人： Yoshihiro Moriguchi , Ryo Izaki , Yoshitomo Yasuike , Takao Kamaishi , Takahisa Ishida
IPC分类号： F26B5/14 , F26B15/12 , F26B21/00 , H01L21/00 , C23F1/00
CPC分类号： H01L21/67034 , F26B5/14 , F26B15/12 , F26B21/004
摘要： Above a substrate mounted on rollers, an upper board is prepared a predetermined distance apart from the substrate. A pipe fills a space between the upper board and the substrate with washing water by supplying the washing water at a predetermined flow rate. A washing water layer is formed evenly on an upper surface of the substrate when the substrate passes below the upper board. Below the substrate, a lower board is prepared a predetermined distance apart from the substrate. A pipe fills a space between the lower board and the substrate with the washing water by supplying the washing water at a predetermined flow rate. A washing water layer is formed evenly on a lower surface of the substrate when the substrate passes above the lower board. The air emitted from an air knife is sprayed to the upper/lower surface of the substrate slantingly at a predetermined incident angle in an opposite direction of a substrate moving direction. The washing water is pushed away and removed from the upper/lower surface of the substrate.
摘要翻译：在安装在辊上的基板上方，准备与基板隔开预定距离的上板。管道通过以预定的流量供给洗涤水，用洗涤水填充上板和基板之间的空间。当基板通过上板下方时，洗涤水层均匀地形成在基板的上表面上。在基板下方，准备与基板隔开预定距离的下板。通过以预定的流量供给洗涤水，管道用洗涤水填充下板和基板之间的空间。当基板通过下板上方时，洗涤水层均匀地形成在基板的下表面上。从气刀喷出的空气以与基板移动方向相反的方向倾斜地以规定的入射角度向基板的上下表面喷射。将洗涤水从基材的上/下表面推开并除去。

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