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1. 发明授权

US06418640B1 Drying apparatus for a substrate and drying method thereof 失效
标题翻译：基材干燥装置及其干燥方法
公开(公告)号：US06418640B1
公开(公告)日：2002-07-16
申请号：US09579134
申请日：2000-05-30
申请人： Hiroshi Fukuda , Yoshitomo Yasuike , Kazuhiko Gommori , Kunio Aburada
发明人： Hiroshi Fukuda , Yoshitomo Yasuike , Kazuhiko Gommori , Kunio Aburada
IPC分类号： F26B300
CPC分类号： H01L21/67034 , F26B5/14 , F26B21/004
摘要： Thin substrate plates are transferred in a horizontal or tilted posture on and by a substrate transfer means. Provided by a substrate transfer path is an air knife nozzle for scraping and drying off a liquid successively from surfaces of the substrates on the substrate transfer means. The air knife nozzle is located substantially at a uniform distance across a drying surface of a substrate plate on the transfer means. The air knife nozzle is provided with a slit-like nozzle hole to spurt jet air to the drying surface from an angular direction relative to a direction perpendicular to the substrate transfer direction and to sweep the substrate across the entire width of the drying surface and with a predetermined angle of incidence relative to the substrate transfer direction. Further, an air augmenting means is located in face to face relation with a corner portion of the substrate which is finally swept by the air knife nozzle, for increasing an amount of jet air to purge a liquid which is gathered in the comer portion as a result of the sweeping action of the air jet nozzle.
摘要翻译：薄衬底板以水平或倾斜的姿势被转移到衬底转移装置上。由基板传送路径提供的是用于从基板传送装置上的基板的表面依次刮取和干燥液体的气刀喷嘴。气刀喷嘴基本上位于传送装置上的基板的干燥表面上的均匀距离处。气刀喷嘴设置有狭缝状喷嘴孔，以从相对于垂直于基板输送方向的方向的角度方向喷射空气到干燥表面，并且在基板的整个宽度上扫掠基板，并且与相对于基板传送方向的预定入射角。此外，空气增加装置与最终被气刀喷嘴扫过的基板的角部面对面地设置，用于增加喷射空气的量以吹扫收集在角部中的液体，作为空气喷嘴的扫掠动作的结果。

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