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    • 2. 发明授权
    • Method and apparatus for inspection of wafer and semiconductor device
    • 晶圆和半导体器件检验方法及装置
    • US08224062B2
    • 2012-07-17
    • US11837261
    • 2007-08-10
    • Yoshihiro OhkuraYoshio Fukuda
    • Yoshihiro OhkuraYoshio Fukuda
    • G06K9/62
    • G01N21/9501G01N21/9505
    • An individually isolated wafer adapted to a semiconductor chip is subjected to inspection in which an infrared ray is irradiated onto the backside of the wafer whose surface is sealed with a resin layer such that the optical axis thereof perpendicularly or slantingly crosses the surface of the wafer, whereby an image clearly showing cracks formed in the wafer is produced based on the reflected ray. Before or after an exterior inspection process, a tape inspection process is performed by use of an image of the surface of a dicing tape, in which a plurality of semiconductor chips are once attached onto and then separated from, so as to detect at least one of a defective element, a crack mark, and a foreign mark with regard to the semiconductor chip subjected to inspection.
    • 对半导体芯片进行单独隔离的晶片进行检查,其中将红外线照射到其表面被树脂层密封的晶片的背面,使得其光轴垂直或倾斜地穿过晶片的表面, 从而基于反射光线产生清楚地显示晶片中形成的裂纹的图像。 在外部检查过程之前或之后,通过使用其中多个半导体芯片一旦被附着到其上并随后分离的切割带的表面的图像来进行带检查处理,以便检测至少一个 缺陷元件,裂纹标记和外部标记。
    • 3. 发明申请
    • APPARATUS FOR TESTING A SEMICONDUCTOR DEVICE
    • 用于测试半导体器件的装置
    • US20080094094A1
    • 2008-04-24
    • US11860229
    • 2007-09-24
    • YOSHIHIRO OHKURA
    • YOSHIHIRO OHKURA
    • G01R31/26
    • G01R31/2887G01R31/2893
    • An apparatus for testing a semiconductor device that has opposing first and second sides is provided. The semiconductor device includes at least one functional unit on the first side and a plurality of terminals on the second side. The apparatus may include, but is not limited to, a mounting structure, and a plurality of electrodes. The mounting structure has at least one stage that is configured to allow the semiconductor device to be mounted thereon. The mounting structure has a communicating hole that penetrates the mounting structure from the stage. The communicating hole allows the at least one functional unit to face to the communicating hole while the semiconductor device is mounted on the stage. Each of the plurality of electrodes is configured to be contactable to a corresponding one of the plurality of terminals, while the semiconductor device is mounted on the stage.
    • 提供一种用于测试具有相对的第一和第二侧面的半导体器件的装置。 半导体器件包括第一侧上的至少一个功能单元和第二侧上的多个端子。 该装置可以包括但不限于安装结构和多个电极。 安装结构具有至少一个构造成允许半导体器件安装在其上的级。 安装结构具有从工作台穿过安装结构的连通孔。 连通孔允许至少一个功能单元面对连通孔,而半导体器件安装在平台上。 多个电极中的每一个被配置为可以与多个端子中的相应一个端子相接触,同时半导体器件安装在平台上。
    • 5. 发明授权
    • Input device for use in vehicles for inputting settings pertaining to driver's intention of acceleration and deceleration
    • 用于车辆输入与驾驶员加速和减速意图有关的设置的输入装置
    • US06621176B1
    • 2003-09-16
    • US09649968
    • 2000-08-28
    • Chikao NagasakaYoshihiro OhkuraHiroshi TsugeToru Nakamura
    • Chikao NagasakaYoshihiro OhkuraHiroshi TsugeToru Nakamura
    • B60L100
    • F16H59/0204B60K20/06B60K26/00B60K31/042F16H2059/0239F16H2059/0247Y10T74/20067
    • An input device for use in a vehicle for inputting settings pertaining to a driver's intention of acceleration and deceleration includes a running mode selection switch and an acceleration/deceleration switch. A plurality of modes, for example, a manual speed change mode, an automatic speed change mode, a speed setting mode, and a distance-between-cars setting mode, are selectively set in the running mode selection switch. The acceleration/deceleration switch allows an accelerating or decelerating operation in correspondence to the selected mode. Operation switches which have been conventionally provided separately for each of functions are integrated into two parts, that is, the running mode selection switch and the acceleration/deceleration switch. After a desired mode has been selected, a desired function can be realized only by operation corresponding to a driver's intention of acceleration or deceleration. Accordingly, even if the driver is not experienced in using a plurality of functions, more reasonable operation suited for human perception and reaction allows the driver to become easily accustomed to use the device.
    • 用于车辆中用于输入关于驾驶员的加速和减速意图的设置的输入装置包括行驶模式选择开关和加速/减速开关。 在运行模式选择开关中选择性地设置多种模式,例如手动变速模式,自动变速模式,速度设定模式和轿厢间距离设定模式。 加速/减速开关允许对应于所选模式的加速或减速操作。 通常为每个功能单独提供的操作开关集成在两个部分中,即行驶模式选择开关和加速/减速开关。 在选择了期望的模式之后,可以仅通过对应于驾驶员的加速或减速的意图的操作来实现期望的功能。 因此,即使驾驶员在使用多种功能方面没有经验,适合于人的感知和反应的更合理的操作使驾驶员变得容易地习惯使用该装置。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR INSPECTION OF WAFER AND SEMICONDUCTOR DEVICE
    • 用于检查波形和半导体器件的方法和装置
    • US20080037859A1
    • 2008-02-14
    • US11837261
    • 2007-08-10
    • YOSHIHIRO OHKURAYOSHIO FUKUDA
    • YOSHIHIRO OHKURAYOSHIO FUKUDA
    • G06K9/00G01N21/88
    • G01N21/9501G01N21/9505
    • An individually isolated wafer adapted to a semiconductor chip is subjected to inspection in which an infrared ray is irradiated onto the backside of the wafer whose surface is sealed with a resin layer such that the optical axis thereof perpendicularly or slantingly crosses the surface of the wafer, whereby an image clearly showing cracks formed in lie wafer is produced based on the reflected ray. Before or after an exterior inspection process, a tape inspection process is performed by use of an image of the surface of a dicing tape, in which a plurality of semiconductor chips are once attached onto and then separated from, so as to detect at least one of a defective element, a crack mark, and a foreign mark with regard to the semiconductor chip subjected to inspection,
    • 对半导体芯片进行单独隔离的晶片进行检查,其中将红外线照射到其表面被树脂层密封的晶片的背面,使得其光轴垂直或倾斜地穿过晶片的表面, 从而基于反射的光线产生清楚地显示晶片上形成的裂纹的图像。 在外部检查过程之前或之后,通过使用其中多个半导体芯片一旦被附着到其上并随后分离的切割带的表面的图像来进行带检查处理,以便检测至少一个 关于被检查的半导体芯片的缺陷元件,裂纹标记和外部标记,
    • 9. 发明授权
    • Electron microscope
    • 电子显微镜
    • US07388198B2
    • 2008-06-17
    • US11191147
    • 2005-07-27
    • Yoshihiro Ohkura
    • Yoshihiro Ohkura
    • G21K7/00
    • H01J37/256H01J2237/24455H01J2237/2538
    • An electron microscope capable of producing EELS (electron energy-loss spectroscopy) has a spectral position correcting signal supply circuit for supplying a spectral position correcting signal H to a first driver amplifier to project spectra at the center of a CCD camera. This correcting signal H corresponds to a beam deflection signal A′ supplied from a scan generator to a second driver amplifier, an excitation signal B′ supplied from an intermediate lens excitation signal supply circuit to a third driver amplifier, and another excitation signal supplied from a projector lens excitation signal supply circuit to a fourth driver amplifier.
    • 能够产生EELS(电子能量损失光谱)的电子显微镜具有光谱位置校正信号供给电路,用于将光谱位置校正信号H提供给第一驱动放大器,以在CCD照相机的中心投影光谱。 该校正信号H对应于从扫描发生器向第二驱动放大器提供的光束偏转信号A',从中间透镜激励信号供给电路提供给第三驱动放大器的激励信号B',以及从第 投影镜头激励信号供应电路到第四个驱动放大器。