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    • 3. 发明授权
    • Methods for preparation of high-purity polysilicon rods using a metallic core means
    • 使用金属芯制备高纯度多晶硅棒的方法
    • US08216643B2
    • 2012-07-10
    • US12160837
    • 2007-05-21
    • Hee Young KimKyung Koo YoonYong Ki ParkWon Choon ChoiSang Jin Moon
    • Hee Young KimKyung Koo YoonYong Ki ParkWon Choon ChoiSang Jin Moon
    • C23C16/24
    • C23C16/4581C01B33/035C23C16/24Y10T428/2913
    • A method for preparing a polysilicon rod using a metallic core means, including: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, the core means being constituted by forming at least one separation layer on the surface of a metallic core element and being connected to an electrode means, heating the core means by supplying electricity through the electrode means, and supplying a reaction gas into the inner space for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means. The deposition output and the core means can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element can be minimized, thereby a high-purity silicon can be prepared more economically and conveniently.
    • 一种使用金属芯装置制备多晶硅棒的方法,包括:将芯装置安装在用于制备硅棒的沉积反应器的内部空间中,所述芯装置通过在至少一个分离层的表面上形成 金属芯元件,与电极装置连接,通过电极装置供电来加热芯装置,并将反应气体供给到用于硅沉积的内部空间中,从而在表面上形成向外的沉积输出 核心手段。 沉积输出和芯装置可以容易地从通过硅沉积过程获得的硅棒输出分离,并且可以最小化由金属芯元件的杂质引起的沉积输出的污染,从而高纯度的硅可以 准备更经济,便捷。