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    • 2. 发明授权
    • Integrated circuit layout modification
    • 集成电路布局修改
    • US08856696B2
    • 2014-10-07
    • US13354707
    • 2012-01-20
    • Wen-Hao ChenYuan-Te HouYi-Kan Cheng
    • Wen-Hao ChenYuan-Te HouYi-Kan Cheng
    • G06F17/50
    • G06F17/5068G06F17/5077
    • Methods are disclosed of modifying an integrated circuit (IC) design that utilizes multiple patterning technology (MPT). The methods include configuring a first layout of an integrated circuit, having at least one layer with features to be formed utilizing fabrication by at least two masks. The at least one layer includes a plurality of active cells and a plurality of spare cells. A second layout is configured to re-route the spare cells and active cells, wherein the re-routing utilizes at least a portion of the plurality of spare cells. Fewer than all of the at least two masks are replaced to configure the second layout.
    • 公开了改进利用多重图案化技术(MPT)的集成电路(IC)设计的方法。 所述方法包括配置集成电路的第一布局,其具有至少一层具有通过至少两个掩模的制造而形成的特征的层。 该至少一层包括多个活动单元和多个备用单元。 第二布局被配置为重新路由备用单元和活动单元,其中重新路由使用多个备用单元的至少一部分。 比所有至少两个掩模更少,以配置第二个布局。
    • 6. 发明申请
    • COLORING/GROUPING PATTERNS FOR MULTI-PATTERNING
    • 多种颜色/分组图案
    • US20130205266A1
    • 2013-08-08
    • US13365546
    • 2012-02-03
    • Wen-Hao ChenYuan-Te HouYi-Kan Cheng
    • Wen-Hao ChenYuan-Te HouYi-Kan Cheng
    • G06F17/50
    • G06F17/5077G06F2217/62
    • A method comprises: accessing a persistent, machine readable storage medium containing data representing an integrated circuit (IC) design to be fabricated using multi-patterning; identifying at least one network of conductive patterns configured to transmit signals that substantially impact timing of at least one circuit in the IC; pre-grouping the at least one network of conductive patterns in a first group; and electronically providing data to an electronic design automation (EDA) tool to cause inclusion in a first single photomask of all portions of the patterns within the first group that are to be formed in a single layer of the IC, wherein the single layer is to be multi-patterned using at least two photomasks.
    • 一种方法包括:访问包含表示将使用多图案化制造的集成电路(IC)设计的数据的持久的机器可读存储介质; 识别被配置为传输基本上影响所述IC中的至少一个电路的定时的信号的导电图案的至少一个网络; 将第一组中的至少一个导电图案网络预分组; 以及将电子数据提供给电子设计自动化(EDA)工具,以使所述第一组中将被形成在所述IC的单个层中的所述图案的所有部分的第一单个光掩模包括在其中,所述单层为 使用至少两个光掩模进行多图案化。
    • 7. 发明授权
    • Methodology for analysis and fixing guidance of pre-coloring layout
    • 预先着色布局的分析和固定指导方法
    • US08434043B1
    • 2013-04-30
    • US13480847
    • 2012-05-25
    • Chin-Chang HsuHungLung LinWen-Ju YangHsiao-Shu ChaoYi-Kan Cheng
    • Chin-Chang HsuHungLung LinWen-Ju YangHsiao-Shu ChaoYi-Kan Cheng
    • G06F17/50
    • G06F17/5081
    • The present disclosure relates to a method and apparatus for identifying pre-coloring violations and for providing hints and/or warnings to a designer to eliminate the pre-coloring violations. In some embodiments, the method is performed by identifying G0-spaces within a double patterning technology (DPT) layer, of an integrated chip (IC) layout, having a plurality of pre-colored shapes. Violation paths extending between the pre-colored shapes are identified based upon the G0-spaces. Good paths (i.e., paths that will not cause a violation) and bad paths (i.e., paths that will cause a violation) between the pre-colored shapes are also identified. Hints and/or warnings are generated based upon the identified good and bad paths, wherein the hints and/or warnings provide guidance to eliminate the violation paths and develop a violation free IC layout.
    • 本公开涉及一种用于识别预着色违规的方法和装置,并且用于向设计者提供提示和/或警告以消除预着色违规。 在一些实施例中,该方法通过识别具有多个预着色形状的集成芯片(IC)布局的双图案形成技术(DPT)层内的G0空间来执行。 基于G0空格识别在预色图案之间延伸的违规路径。 还识别出良好路径(即,不会引起违规的路径)和不良路径(即将导致违规的路径)。 提示和/或警告是基于所识别的好路径和不良路径生成的,其中提示和/或警告提供指导以消除违规路径并开发无违规IC布局。
    • 9. 发明授权
    • Methods for cell boundary isolation in double patterning design
    • 双图案设计中单元边界隔离的方法
    • US08255837B2
    • 2012-08-28
    • US12616970
    • 2009-11-12
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • G06F17/50
    • G03F1/70G03F1/00
    • A method of designing a double patterning mask set for a layout of a chip includes designing standard cells. In each of the standard cells, all left-boundary patterns are assigned with one of a first indicator and a second indicator, and all right-boundary patterns are assigned with an additional one of the first indicator and the second indicator. The method further includes placing the standard cells in a row of the layout of the chip. Starting from one of the standard cells in the row, indicator changes to the standard cells are propagated throughout the row. All patterns in the standard cells having the first indicator are transferred to a first mask of the double patterning mask set. All patterns in the standard cells having the second indicator are transferred to a second mask of the double patterning mask set.
    • 设计用于芯片布局的双重图案掩模组的方法包括设计标准单元。 在每个标准单元中,所有左边界图案被分配有第一指示符和第二指示符中的一个,并且所有右边图案都被分配有第一指示符和第二指示符中的另外一个。 该方法还包括将标准单元放置在芯片布局的一行中。 从行中的一个标准单元开始,标记单元的指示符更改在整行中传播。 具有第一指示符的标准单元中的所有图案被转移到双图案掩模组的第一掩模。 具有第二指示器的标准单元中的所有图案被转移到双重图案掩模组的第二掩模。
    • 10. 发明授权
    • Routing system and method for double patterning technology
    • 双重图案化技术的路由系统和方法
    • US08239806B2
    • 2012-08-07
    • US12649979
    • 2009-12-30
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • G06F17/50
    • G06F17/5077
    • A method includes receiving an identification of a plurality of circuit components to be included in an IC layout. Data are generated representing a first pattern to connect two of the circuit components. The first pattern has a plurality of segments. At least two of the segments have lengthwise directions perpendicular to each other. At least one pattern-free region is reserved adjacent to at least one of the at least two segments. Data are generated representing one or more additional patterns near the first pattern. None of the additional patterns is formed in the pattern-free region. The first pattern and the additional patterns form a double-patterning compliant set of patterns. The double-patterning compliant set of patterns are output to a machine readable storage medium to be read by a system for controlling a process to fabricate a pair of masks for patterning a semiconductor substrate using double patterning technology.
    • 一种方法包括接收要包括在IC布局中的多个电路部件的标识。 生成表示连接两个电路部件的第一图案的数据。 第一图案具有多个片段。 至少两个片段具有彼此垂直的纵向方向。 保留与至少两个段中的至少一个相邻的至少一个无图案区域。 生成表示在第一图案附近的一个或多个附加图案的数据。 在无模式区域中没有形成附加图案。 第一种图案和附加图案形成双重图案化顺应的图案集合。 将双图案化顺应的图案集合输出到机器可读存储介质,以由用于控制制造用于使用双重图案化技术图案化半导体衬底的一对掩模的工艺的系统读取。