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    • 1. 发明授权
    • Ceramic heater and manufacturing method of ceramic heater
    • 陶瓷加热器和陶瓷加热器的制造方法
    • US06924464B2
    • 2005-08-02
    • US10343833
    • 2001-11-26
    • Yanling ZhouYasutaka ItoSatoru Kariya
    • Yanling ZhouYasutaka ItoSatoru Kariya
    • H05B3/14H05B3/26H05B3/68C23C16/00
    • H05B3/143H05B3/265
    • A ceramic heater manufacturing method capable of preventing reflection of a laser beam at the time the performing trimming by irradiation using a laser beam and performing trimming of a resistance heating element or a conductor layer. The ceramic heater manufacturing method includes forming a resistance heating element having a pattern on a surface of a ceramic substrate; and irradiating a laser beam onto the resistance heating element to form a gutter or a cut after a preceding step to adjust a resistance value of the resistance element. When the resistance heating element is formed on the surface of the ceramic substrate, the resistance heating element is adjusted to have a surface roughness Ra of 0.01 μm or more in accordance with MS B 0601.
    • 一种陶瓷加热器制造方法,其能够防止在通过使用激光束的照射进行修整和进行电阻加热元件或导体层的修整时激光束的反射。 陶瓷加热器制造方法包括在陶瓷基板的表面上形成具有图案的电阻加热元件; 并且将激光束照射到所述电阻加热元件上以在前一步骤之后形成沟槽或切口以调节所述电阻元件的电阻值。 当在陶瓷基板的表面上形成电阻加热元件时,根据MS B 0601将电阻加热元件调整为表面粗糙度Ra为0.01μm或更大。