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    • 4. 发明授权
    • Process for preparing schottky diode contacts with predetermined barrier
heights
    • 制备具有预定屏障高度的肖特基二极管触点的工艺
    • US5516725A
    • 1996-05-14
    • US85622
    • 1993-06-30
    • Y. Austin ChangChia-Hong JanChia-Ping Chen
    • Y. Austin ChangChia-Hong JanChia-Ping Chen
    • C22C5/04C22C19/00C23C14/14C23C14/18C23C14/34H01L21/28H01L21/285H01L21/768H01L23/522H01L29/40H01L29/47H01L21/44
    • C23C14/185C22C19/00C22C5/04H01L29/475H01L2924/0002
    • A process is provided for producing a Schottky diode having a preselected barrier height .phi..sub.Bn. The substrate is preferably n-GaAs, the metallic contact is derived from a starting alloy of the Formula [.SIGMA.M.sub..delta. ](Al.sub.x Ga.sub.1-x) wherein: .SIGMA.M is a moiety which consists of at least one M, and when more than one M is present, each M is different, M is a Group VIII metal selected from the group consisting of nickel, cobalt, ruthenium, rhodium, indium and platinum, .delta. is a stoichiometric coefficient whose total value in any given .SIGMA.M moiety is 1, and x is a positive number between 0 and 1 (that is, x ranges from greater than 0 to less than 1). Also, the starting alloy is capable of forming with the substrate a two phase equilibrium reciprocal system of the binary alloy mixture [.SIGMA.M.sub..delta. ]Ga-[.SIGMA.M.sub..delta. ]Al-AlAs-GaAs. When members of an alloy subclass within this Formula are each preliminarily correlated with the barrier height .phi..sub.Bn of a contact producable therewith, then Schottky diodes of predetermined barrier heights are producable by sputtering and annealing. Further provided are the product Schottky diodes that are produced according to this process.
    • 提供了一种制备具有预先选择的势垒高度phi Bn的肖特基二极管的工艺。 衬底优选为n-GaAs,金属接触源自式[SIGMA Mδ](Al x Ga 1-x)的起始合金,其中:SIGMA M是由至少一个M组成的部分,并且当多于一个 M存在,每个M不同,M是选自镍,钴,钌,铑,铟和铂的Ⅷ族金属,δ是任何给定的SIGMA M部分的总值为1的化学计量系数, x是0和1之间的正数(即x大于0到小于1)。 此外,起始合金能够与基板一起形成二元合金混合物[SIGMA Mδ] Ga - [SIGMA M] Al-AlAs-GaAs的两相平衡互易系统。 当该式中的合金子类的成员各自与可生产的接触层的势垒高度phi Bn初步相关时,则可以通过溅射和退火产生预定的屏障高度的肖特基二极管。 还提供了根据该方法生产的肖特基二极管产品。