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    • 2. 发明授权
    • Method and system for removing an antiferromagnetic seed structure
    • 去除反铁磁种子结构的方法和系统
    • US08419953B1
    • 2013-04-16
    • US13170491
    • 2011-06-28
    • Wencheng SuZhigang ZhouJane AngMing Jiang
    • Wencheng SuZhigang ZhouJane AngMing Jiang
    • B44C1/22
    • H01L43/12G01R33/09G01R33/093G11B5/3163G11B5/3906G11B5/3929
    • A method for fabricating a transducer on a substrate is described. The transducer includes an antiferromagnetic seed structure. The antiferromagnetic seed structure includes a first NiFe layer, a first multilayer including a first Ru layer, a second NiFe layer, and a second multilayer including a second Ru layer. The second multilayer, the second NiFe layer and part of the first Ru layer are removed using a first wet etch, which uses a first etchant combination to remove NiFe and in which Ru is insoluble. The second Ru layer is removed through lift-off due to etching of the second NiFe layer. A remainder of the first Ru layer is removed through a second wet etch, which uses a second etchant combination to remove Ru. A remaining portion of the first multilayer and the first NiFe layer are removed through a third etch, which uses a third etchant combination that removes NiFe.
    • 描述了在衬底上制造换能器的方法。 换能器包括反铁磁种子结构。 反铁磁种子结构包括第一NiFe层,包括第一Ru层的第一多层,第二NiFe层和包含第二Ru层的第二层。 使用第一湿蚀刻去除第二层,第二NiFe层和第一Ru层的一部分,第一湿法蚀刻使用第一蚀刻剂组合去除NiFe,其中Ru不溶。 由于第二NiFe层的蚀刻,第二Ru层被剥离除去。 通过第二湿蚀刻去除第一Ru层的剩余部分,其使用第二蚀刻剂组合去除Ru。 通过第三蚀刻去除第一多层和第一NiFe层的剩余部分,该蚀刻使用去除NiFe的第三蚀刻剂组合。