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1. 发明授权

US5788567A Apparatus for guiding air current of equipment used in clean room 失效
标题翻译：用于引导洁净室使用的设备的气流的设备
公开(公告)号：US5788567A
公开(公告)日：1998-08-04
申请号：US603056
申请日：1996-02-16
申请人： Shieh-Ming Chang , Wen-Hong Lee , Jun-Ming Chen
发明人： Shieh-Ming Chang , Wen-Hong Lee , Jun-Ming Chen
IPC分类号： H05K7/20 , H05K5/00
CPC分类号： H05K7/20181
摘要： An apparatus for the guiding an air current of equipment used in a clean room is disclosed which comprises a chassis for protecting the equipment, a cooling fan for bringing warm air generated inside the chassis, and a guiding panel being attached on one side of the chassis for guiding the warm air brought by the cooling fan to conform downwards to the direction of the vertical air flow in a clean room for reducing particulate contamination. The present invention also provides a way for preventing buidup of static charges on the equipment.
摘要翻译：公开了一种用于引导洁净室中使用的设备的气流的装置，其包括用于保护设备的底盘，用于在底盘内产生的暖空气的冷却风扇和附接在底盘的一侧的引导面板用于引导冷却风扇所带来的温暖空气，使其在洁净室内向垂直方向流动，以减少颗粒污染。本发明还提供一种防止设备上的静电荷积聚的方法。

2. 发明授权

US5937907A Manifold having outlets equally spaced from inlet 失效
标题翻译：歧管具有与入口相等的出口
公开(公告)号：US5937907A
公开(公告)日：1999-08-17
申请号：US665569
申请日：1996-06-18
申请人： Wen-Hong Lee
发明人： Wen-Hong Lee
IPC分类号： F15D55/00
CPC分类号： F16L41/03 , Y10T137/87877
摘要： A manifold having a plurality of outlets each equally spaced from the inlet in the radial direction is provided. The equal spacing of the outlets from the inlet provides substantially equal flow across each outlet. Preferably, the manifold has a main body, an inlet coaxial with the main body and a plurality of outlets carried by the main body equally spaced from the inlet. A stop valve can be provided adjacent each outlet to allow each outlet to be independently closed while maintaining a substantially equal flow through the open outlets.
摘要翻译：提供了具有多个出口，每个出口在径向方向上与入口均等间隔开。出口与入口的相等间距在每个出口处提供基本相等的流动。优选地，歧管具有主体，与主体同轴的入口以及由主体承载的与入口等距间隔的多个出口。可以在每个出口附近设置截止阀，以允许每个出口独立地封闭，同时保持通过开放出口的基本相等的流动。

3. 发明授权

US5724825A Automatic temperature controlling system 失效
标题翻译：自动温度控制系统
公开(公告)号：US5724825A
公开(公告)日：1998-03-10
申请号：US712523
申请日：1996-09-11
申请人： Wen Hong Lee , Thomas Chang , Simon Chang
发明人： Wen Hong Lee , Thomas Chang , Simon Chang
IPC分类号： H01L21/00 , F25D17/02
CPC分类号： H01L21/67098
摘要： The present invention relates to an automatic temperature controlling system for semiconductor process, when one of the chillers in the temperature controlling system is out of order, then another chiller will automatically take over the function of the broken one by using the second temperature controlling path. The automatic temperature controlling system includes: at least two chambers used for performing a process having first temperature controlling paths for providing coolant circulations while the system is in normal condition, and having a second temperature controlling path for providing at least one coolant circulation while the system is in abnormal condition; at least two chillers are respectively connected to the chambers for controlling the temperature of the chambers; a plurality of first normal-on valves are used to control the condition of the first temperature controlling paths; a plurality of second normal-on valves are used to control the condition of the first temperature controlling paths; and a plurality of pairs of normal-off valves are used to control the condition of the second temperature controlling paths.
摘要翻译：本发明涉及一种用于半导体工艺的自动温度控制系统，当温度控制系统中的一个冷却器出现故障时，另一冷却器将通过使用第二温度控制路径自动接管破碎机的功能。所述自动温度控制系统包括：用于执行具有用于在所述系统处于正常状态的情况下提供冷却剂循环的第一温度控制路径的过程的至少两个室，并且具有用于在系统中提供至少一个冷却剂循环的第二温度控制路径处于异常状态至少两个冷却器分别连接到室以控制室的温度; 使用多个第一正常阀来控制第一温度控制路径的状态; 使用多个第二正常阀来控制第一温度控制路径的状态; 并且使用多对正常关闭阀来控制第二温度控制路径的状态。

4. 发明授权

US06261171B1 Movable multi-function maintenance apparatus 有权
标题翻译：可移动多功能维护仪器
公开(公告)号：US06261171B1
公开(公告)日：2001-07-17
申请号：US09313169
申请日：1999-05-17
申请人： Wen-Hong Lee
发明人： Wen-Hong Lee
IPC分类号： B08B1502
CPC分类号： B25J21/02 , B08B15/02
摘要： A movable multi-function maintenance apparatus. A first airtight chamber is formed on the second airtight chamber. An exhaust apparatus is placed in a base under the first airtight chamber in order to exhaust first and the second airtight chambers. Thus, the environment is not polluted. A toxic-gas detector is mounted on the first airtight chamber in order to warn workers. A rolling structure is mounted under the base to move the movable multi-function maintenance apparatus.
摘要翻译：一种可移动的多功能维护装置。在第二气密室上形成第一气密室。将排气装置放置在第一气密室下方的基座中，以便先排出第二气密室。因此，环境不会受到污染。一个有毒气体检测器安装在第一个气密室，以警告工人。滚动结构安装在基座下方以移动可移动多功能维护装置。

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