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1. 发明授权

US5718949A Diamond-like carbon encapsulation of magnetic heads 失效
标题翻译：钻石状碳封装磁头
公开(公告)号：US5718949A
公开(公告)日：1998-02-17
申请号：US722910
申请日：1996-09-27
申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
发明人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
IPC分类号： G11B5/31 , C23C16/26 , G11B5/127
CPC分类号： G11B5/3106
摘要： A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.
摘要翻译：支撑在基板上的薄膜磁换能器包括终止在衬底上的衬垫上的线圈。一层类似钻石的碳材料封装了头部，基底和线圈，但不包括垫片。在传感器，线圈和基板的暴露部分上沉积一层类似金刚石的碳。描述了三种技术，用于曝光焊盘，包括采用光致抗蚀剂掩模，在导电路径上沉积硅粘合剂层而不是焊盘，并且使用光致抗蚀剂掩模在焊盘上蚀刻类金刚石碳层并分解硅具有设计电压的粘合剂层。

2. 发明授权

US5681426A Diamond-like carbon wet etchant stop for formation of magnetic transducers 失效
标题翻译：钻石状碳湿蚀刻剂停止形成磁性换能器
公开(公告)号：US5681426A
公开(公告)日：1997-10-28
申请号：US571469
申请日：1995-12-13
申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
发明人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
IPC分类号： G11B5/31 , G11B5/39 , H01F41/34 , B44C1/22
CPC分类号： G11B5/3906 , G11B5/3163 , H01F41/34 , G11B5/3903 , Y10T409/303752
摘要： A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.
摘要翻译：通过在第一材料的暴露表面上沉积一层类金刚石碳并将一层第二材料沉积到类金刚石碳层上而形成磁性结构。将光致抗蚀剂施加到第二层的暴露表面，并以期望结构的形式进行图案化。用不侵蚀类金刚石碳层的湿蚀刻剂去除第二层的暴露部分。此后，除去任何剩余的光致抗蚀剂。

3. 发明授权

US5640292A Diamond-like carbon encapsulation of magnetic heads 失效
标题翻译：钻石状碳封装磁头
公开(公告)号：US5640292A
公开(公告)日：1997-06-17
申请号：US587270
申请日：1996-01-17
申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
发明人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
IPC分类号： G11B5/31 , G11B5/127
CPC分类号： G11B5/3106
摘要： A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.
摘要翻译：支撑在基板上的薄膜磁换能器包括终止在衬底上的衬垫上的线圈。一层类似钻石的碳材料封装了头部，基底和线圈，但不包括垫片。在传感器，线圈和基板的暴露部分上沉积一层类似金刚石的碳。描述了三种技术，用于曝光焊盘，包括采用光致抗蚀剂掩模，在导电路径上沉积硅粘合剂层而不是焊盘，并且使用光致抗蚀剂掩模在焊盘上蚀刻类金刚石碳层并分解硅具有设计电压的粘合剂层。

4. 发明授权

US4822467A Disk plating system 失效
标题翻译：磁盘电镀系统
公开(公告)号：US4822467A
公开(公告)日：1989-04-18
申请号：US113872
申请日：1987-10-27
申请人： David Young , Richard Lamoure , William Bratt , Vincent Ruscello , John E. Wilson
发明人： David Young , Richard Lamoure , William Bratt , Vincent Ruscello , John E. Wilson
IPC分类号： C25D17/00
CPC分类号： C25D17/005 , C25D17/06
摘要： The invention is an electroplating apparatus which partially submerges disks in the electrolytic solution, and provides electrical contact to the portions of the disk protruding above the solution. The disks are rotated during plating such that successive portions of the disk emerge from the solution, contact the electrical contact and then re-enter the solution. The disks are inserted into individual disk holders consisting of non-conductive shielding rings attached to a common bracket. The shielding rings are hinged such that the rings may be opened to insert the disks. When the disks are enclosed in the rings, they are supported by small non-conductive support wheels rotatably mounted in the rings. The rings remain stationary as the disks are rotated. To promote even plating, selectively-coated anode sheets are interleaved with the disk holding rings such that each holder has an anode sheet on either side.
摘要翻译：本发明是一种电镀设备，其部分地浸没在电解溶液中的盘，并且提供与在溶液上突出的盘的部分的电接触。盘在电镀过程中旋转，使得盘的连续部分从溶液中出现，接触电接触，然后重新进入溶液。盘被插入由连接到公共支架的非导电屏蔽环组成的单个盘保持器中。屏蔽环被铰接，使得环可以打开以插入盘。当盘被封闭在环中时，它们由可旋转地安装在环中的小的非导电支撑轮支撑。当盘旋转时，环保持静止。为了促进均匀电镀，选择性涂覆的阳极片与盘保持环交错，使得每个保持器在任一侧具有阳极片。

5. 发明授权

US06215630B1 Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers 失效
标题翻译：用于磁阻换能器的类金刚石碳和氧化物双层绝缘体
公开(公告)号：US06215630B1
公开(公告)日：2001-04-10
申请号：US08741277
申请日：1996-10-30
申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
发明人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
IPC分类号： G11B533
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/3903 , H01F41/34 , Y10T409/303752
摘要： A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.
摘要翻译：通过在第一材料的暴露表面上沉积一层类金刚石碳并将一层第二材料沉积到类金刚石碳层上形成磁性结构。将光致抗蚀剂施加到第二层的暴露表面，并以期望结构的形式进行图案化。用不侵蚀类金刚石碳层的湿蚀刻剂去除第二层的暴露部分。此后，除去任何剩余的光致抗蚀剂。

6. 发明授权

US5658470A Diamond-like carbon for ion milling magnetic material 失效
标题翻译：用于离子研磨磁性材料的类金刚石碳
公开(公告)号：US5658470A
公开(公告)日：1997-08-19
申请号：US571395
申请日：1995-12-13
申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
发明人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
IPC分类号： C23F4/00 , G11B5/31 , B44C1/22 , C23F1/00
CPC分类号： C23F4/00 , G11B5/3163 , G11B5/3116
摘要： A diamond-like carbon mask is formed on the surface of the magnetic material for ion-milling the magnetic material into a magnetic pole of a transducer. The mask is formed by depositing a layer of diamond-like carbon over the magnetic material. Successive layers of photoresist, SiO.sub.2 and photoresist are applied over the magnetic material. The second layer of photoresist is patterned in the shape of the pole being formed. The exposed insulating layer is etched with an etchant that does not attack the diamond-like carbon, the exposed portions of the photoresist are exposed and removed, and the exposed portion of the diamond-like carbon is etched with an oxygen etchant. The remaining photoresist is washed away to remove the remaining insulating material. In one form of the invention, a layer of SiO.sub.2 may additionally be formed over the diamond-like carbon to protect the diamond-like carbon from being affected by any undercut of the photoresist by the oxygen etchant. The SiO.sub.2 layer is etched prior to etching the diamond-like carbon. The mask is used to ion mill the magnetic material to the desired pole.
摘要翻译：在磁性材料的表面上形成类金刚石碳掩模，用于将磁性材料离子研磨成换能器的磁极。掩模通过在磁性材料上沉积一层类金刚石碳而形成。光致抗蚀剂，SiO 2和光致抗蚀剂的连续层被施加在磁性材料上。第二层光致抗蚀剂被图案化成形成的极的形状。暴露的绝缘层用不侵蚀类金刚石碳的蚀刻剂蚀刻，光刻胶的暴露部分被暴露和去除，并且用氧蚀刻剂蚀刻类金刚石碳的暴露部分。洗去剩余的光致抗蚀剂以除去剩余的绝缘材料。在本发明的一种形式中，还可以在类金刚石碳之上形成SiO 2层，以保护类金刚石碳免受氧蚀刻剂的光刻胶的任何底切的影响。在蚀刻类金刚石碳之前蚀刻SiO 2层。该掩模用于将磁性材料离子研磨到所需的极点。

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