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    • 3. 发明授权
    • Thin film resistor
    • 薄膜电阻
    • US08570140B2
    • 2013-10-29
    • US13153041
    • 2011-06-03
    • Van MieczkowskiJason Gurganus
    • Van MieczkowskiJason Gurganus
    • H01C1/012
    • H01C1/02H01C1/034H01C7/006H01C17/075
    • The present disclosure relates to a thin film resistor that is formed on a substrate along with other semiconductor devices to form all or part of an electronic circuit. The thin film resistor includes a resistor segment that is formed over the substrate and a protective cap that is formed over the resistor segment. The protective cap is provided to keep at least a portion of the resistor segment from oxidizing during fabrication of the thin film resistor and other components that are provided on the semiconductor substrate. As such, no oxide layer is formed between the resistor segment and the protective cap. Contacts for the thin film resistor may be provided at various locations on the protective cap, and as such, are not provided solely over a portion of the resistor segment that is covered with an oxide layer.
    • 本公开涉及一种薄膜电阻器,其与其它半导体器件一起形成在衬底上以形成电子电路的全部或部分。 薄膜电阻器包括形成在衬底上的电阻器段和形成在电阻器段上的保护帽。 提供保护盖以在薄膜电阻器和设置在半导体衬底上的其它部件的制造期间保持电阻器段的至少一部分不被氧化。 因此,在电阻器段和保护帽之间不形成氧化物层。 可以在保护盖上的各个位置设置用于薄膜电阻器的触点,因此,不仅仅在覆盖有氧化物层的电阻器段的一部分上提供。
    • 8. 发明授权
    • Semiconductor devices having improved adhesion and methods of fabricating the same
    • 具有改进的附着力的半导体器件及其制造方法
    • US08907350B2
    • 2014-12-09
    • US12769307
    • 2010-04-28
    • Van MieczkowskiHelmut Hagleitner
    • Van MieczkowskiHelmut Hagleitner
    • H01L29/15H01L29/778H01L29/423H01L29/66H01L29/06H01L29/20
    • H01L29/7787H01L29/0649H01L29/2003H01L29/42316H01L29/66462
    • Wide bandgap semiconductor devices are fabricated by providing a wide bandgap semiconductor layer, providing a plurality of recesses in the wide bandgap semiconductor layer, and providing a metal gate contact in the plurality of recesses. A protective layer may be provided on the wide bandgap semiconductor layer, the protective layer having a first opening extending therethrough, a dielectric layer may be provided on the protective layer, the dielectric layer having a second opening extending therethrough that is narrower than the first opening, and a gate contact may be provided in the first and second openings. The metal gate contact may be provided to include a barrier metal layer in the plurality of recesses, and a current spreading layer on the barrier metal layer remote from the wide bandgap semiconductor layer. Related devices and fabrication methods are also discussed.
    • 宽带隙半导体器件通过提供宽带隙半导体层制造,在宽带隙半导体层中提供多个凹槽,并在多个凹槽中提供金属栅极接触。 可以在宽带隙半导体层上设置保护层,保护层具有延伸穿过其的第一开口,电介质层可以设置在保护层上,电介质层具有延伸穿过的第二开口,该第二开口窄于第一开口 并且可以在第一和第二开口中设置栅极接触。 可以提供金属栅极接触以在多个凹部中包括阻挡金属层,以及在远离宽带隙半导体层的阻挡金属层上的电流扩散层。 还讨论了相关设备和制造方法。