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1. 发明申请

US20200287118A1 SUPERCONDUCTOR GROUND PLANE PATTERNING GEOMETRIES THAT ATTRACT MAGNETIC FLUX 审中-公开
公开(公告)号：US20200287118A1
公开(公告)日：2020-09-10
申请号：US16296007
申请日：2019-03-07
申请人： ANNA Y. HERR , VLADIMIR V. TALANOV , QUENTIN P. HERR
发明人： ANNA Y. HERR , VLADIMIR V. TALANOV , QUENTIN P. HERR
IPC分类号： H01L39/14 , H01L39/24 , H01L39/08
摘要： Superconducting integrated circuit layouts are proofed against the detrimental effects of stray flux by designing and fabricating them to have one or more ground planes patterned in the x-y plane with a regular grid of low-aspect-ratio flux-trapping voids. The ground plane(s) can be globally patterned with such voids and thousands or more superconducting circuit devices and wires can thereafter be laid out so as not to intersect or come so close to the voids that the trapped flux would induce supercurrents in them, thus preventing undesirable coupling of flux into circuit elements. Sandwiching a wire layer between patterned ground planes permits wires to be laid out even closer to the voids. Voids of successively smaller maximum dimension can be concentrically stacked in pyramidal fashion in multiple ground plane layers having different superconductor transition temperatures, increasing the x-y area available for device placement and wire-up.

2. 发明授权

US07362108B2 Method and system for measurement of sidewall damage in etched dielectric structures using a near field microwave probe 失效
标题翻译：使用近场微波探针测量蚀刻电介质结构中侧壁损伤的方法和系统
公开(公告)号：US07362108B2
公开(公告)日：2008-04-22
申请号：US11249705
申请日：2005-10-14
申请人： Vladimir V. Talanov , Andrew R. Schwartz , Andre Scherz
发明人： Vladimir V. Talanov , Andrew R. Schwartz , Andre Scherz
IPC分类号： G01R27/04 , G01R35/00 , G01R27/26 , G01R31/26
CPC分类号： G01Q60/22 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： By using techniques for near field probes to measure dielectric values of blanket films, the measure of the sidewall damage of the patterned structure is calculated. The interaction between the near field probe and the etched structure is modeled to obtain the model total capacitance. The near field microwave probe is calibrated on a set of blanket films with different thicknesses, and the dielectric constant of the etched trench structure is calculated using the measured frequency shift and calibration parameters. The measured capacitance is further calculated for the etched trench structure using the dielectric constant and the total thickness of the etched trench structure. The effective dielectric constant of the structure under study is extracted where the model capacitance is equal to the measured capacitance. The measure of the sidewall damage is further calculated using the effective dielectric constant.
摘要翻译：通过使用近场探针的技术来测量覆盖膜的介电值，计算图案化结构的侧壁损伤的测量。模拟了近场探针和蚀刻结构之间的相互作用以获得模型总电容。近场微波探头在一组不同厚度的橡皮布膜上进行校准，并使用测量的频移和校准参数计算蚀刻沟槽结构的介电常数。使用介电常数和蚀刻沟槽结构的总厚度进一步计算蚀刻沟槽结构的测量电容。提取所研究结构的有效介电常数，其中模型电容等于测得的电容。使用有效介电常数进一步计算侧壁损伤的测量。

3. 发明授权

US06959481B2 Apertured probes for localized measurements of a material's complex permittivity and fabrication method 失效
标题翻译：用于材料的复介电常数和制造方法的局部测量的孔径探针
公开(公告)号：US06959481B2
公开(公告)日：2005-11-01
申请号：US10392918
申请日：2003-03-21
申请人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
发明人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
IPC分类号： G01R27/06 , G01N22/00 , G01Q10/00 , G01Q60/18 , G01Q60/22 , G01Q60/46 , G01Q70/16 , G01R1/06 , G01R27/26 , H01S4/00
CPC分类号： G01Q60/22 , G01R27/2617 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117
摘要： A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study. A method for manufacturing dielectric support member based probes includes anisotropically depositing a 50-100 Å thick underlayer of Cr, Ni, W or Ta onto the dielectric support member, anisotropically depositing conductive material onto the Cr, Ni, W or Ta underlayer, and removing the unwanted conductive material at the sides of the dielectric support member to electrically isolate the created conductive strips.
摘要翻译：用于非破坏性测定材料和近场光学显微镜的复介电常数的探针基于在电介质基底构件上产生的平衡的多导体传输线结构，其将探测场限制在材料中明确定义的采样体积内正在研究中用于制造基于电介质支撑元件的探针的方法包括将各向异性地沉积50-100厚的Cr，Ni，W或Ta的底层到电介质支撑件上，各向异性地将导电材料沉积到Cr，Ni，W或Ta底层上，在电介质支撑构件的侧面处的不需要的导电材料以电隔离所产生的导电条。

4. 发明授权

US06856140B2 System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes 失效
标题翻译：使用近场微波探针对材料的复介电常数进行定量测量的系统和方法
公开(公告)号：US06856140B2
公开(公告)日：2005-02-15
申请号：US10412295
申请日：2003-04-14
申请人： Vladimir V. Talanov , Robert L. Moreland , Andrew R. Schwartz , Hans M. Christen
发明人： Vladimir V. Talanov , Robert L. Moreland , Andrew R. Schwartz , Hans M. Christen
IPC分类号： G01R27/06 , G01N22/00 , G01Q10/00 , G01Q60/18 , G01Q60/22 , G01Q60/46 , G01Q70/16 , G01R27/04
CPC分类号： G01Q60/22
摘要： A method for measuring a material's complex permittivity is provided where a near-field microwave probe is positioned a predetermined distance from a first and a second standard sample for measuring a relative resonant frequency shift of the near-field microwave probe for standard samples. Based on measurements, calibration coefficients are calculated. A relative resonant frequency shift of the near-field microwave probe for a sample under study is measured by fast frequency sweep technique while the distance between the tip of the probe and the sample under the study is maintained nominally at the distance between the tip of the probe and each standard sample during a calibration procedure by a shear-force based distance control mechanism. Also, the change in the quality factor of the probe for unloaded and loaded resonator is measured. The dielectric constant of the sample under study is calculated using the resonant frequency shift and the change in the quality factor of the near-field microwave probe for the sample under study and the calibration coefficients obtained during the calibration procedure.
摘要翻译：提供了一种用于测量材料的复介电常数的方法，其中近场微波探针位于与用于标准样品的近场微波探针的相对共振频移的第一和第二标准样本预定距离处。基于测量，计算校准系数。通过快速扫频技术测量用于所研究的样品的近场微波探针的相对共振频移，同时探针尖端与研究下的样品之间的距离标称地保持在探头和每个标准样品在校准过程中通过基于剪切力的距离控制机制。此外，测量了用于无负载和负载的谐振器的探头的品质因数的变化。使用研究中的样品的谐振频率偏移和近场微波探针的质量因子的变化以及校准过程中获得的校准系数来计算正在研究的样品的介电常数。

5. 发明申请

US20140249033A1 DC SQUID BASED RF MAGNETOMETER OPERATING AT A BANDWIDTH OF 200 MHZ AND HIGHER 有权
标题翻译：基于DC SQUID的RF磁力计在200MHz和更高的带宽下工作
公开(公告)号：US20140249033A1
公开(公告)日：2014-09-04
申请号：US14351374
申请日：2011-11-14
申请人： Antonio Orozco , Vladimir V. Talanov , Alfred Benjamin Cawthorne, III , Nesco Mario Lettsome, JR.
发明人： Antonio Orozco , Vladimir V. Talanov , Alfred Benjamin Cawthorne, III , Nesco Mario Lettsome, JR.
IPC分类号： G01R33/035
CPC分类号： G01R33/0356 , G01R33/035
摘要： An RF DC SQUID based magnetometer capable of sensing coherent magnetic fields up to 200 MHz and higher is developed which overcomes frequency limitations associated with noise signals due to transmission line delays between the SQUID circuit and readout electronics. The bandwidth limitations are overcome by superimposing the RF flux on the modulation flux to produce at the SQUID output a binary phase modulated RF voltage, which is processed to lock the static flux, and to control modulation regime by producing an AC bias for the RF flux. RF readout electronics based on a double lock-in technique (sequential demodulation of the RF SQUID voltage at the modulation flux frequency ωm and the RF flux frequency ωRF), yields a signal proportional to the product of amplitude and phase cosine of RF flux with linear dynamic range up to five orders in magnitude if compared to DC SQUID operated in traditional flux-locked loop regime.
摘要翻译：开发了能够感测高达200MHz及更高的相干磁场的基于RF DC SQUID的磁力计，其克服了由于SQUID电路和读出电子器件之间的传输线延迟而与噪声信号相关的频率限制。通过将RF通量叠加在调制通量上来克服带宽限制，以在SQUID输出处产生二进制相位调制RF电压，其被处理以锁定静态通量，并通过产生用于RF通量的AC偏置来控制调制方式。基于双重锁定技术（RF调制通量频率ωm的RF SQUID电压和RF通量频率ωRF的顺序解调）的射频读出电子产生与RF通量的幅度和相位余弦乘积成正比的信号与线性与传统磁链锁定环路中操作的DC SQUID相比，动态范围可达五级。

6. 发明授权

US11417821B2 Superconductor ground plane patterning geometries that attract magnetic flux 有权
公开(公告)号：US11417821B2
公开(公告)日：2022-08-16
申请号：US16296007
申请日：2019-03-07
申请人： Anna Y. Herr , Vladimir V. Talanov , Quentin P. Herr
发明人： Anna Y. Herr , Vladimir V. Talanov , Quentin P. Herr
IPC分类号： H01L39/14 , H01L39/08 , H01L39/24 , H01L27/18
摘要： Superconducting integrated circuit layouts are proofed against the detrimental effects of stray flux by designing and fabricating them to have one or more ground planes patterned in the x-y plane with a regular grid of low-aspect-ratio flux-trapping voids. The ground plane(s) can be globally patterned with such voids and thousands or more superconducting circuit devices and wires can thereafter be laid out so as not to intersect or come so close to the voids that the trapped flux would induce supercurrents in them, thus preventing undesirable coupling of flux into circuit elements. Sandwiching a wire layer between patterned ground planes permits wires to be laid out even closer to the voids. Voids of successively smaller maximum dimension can be concentrically stacked in pyramidal fashion in multiple ground plane layers having different superconductor transition temperatures, increasing the x-y area available for device placement and wire-up.

7. 发明授权

US10591952B1 Clock distribution resonator system 有权
公开(公告)号：US10591952B1
公开(公告)日：2020-03-17
申请号：US16352558
申请日：2019-03-13
申请人： Joshua A. Strong , Max E. Nielsen , Vladimir V. Talanov , Temitope Olumuyiwa Ogunnika
发明人： Joshua A. Strong , Max E. Nielsen , Vladimir V. Talanov , Temitope Olumuyiwa Ogunnika
IPC分类号： G06F1/10 , G06F1/12
摘要： One embodiment includes a clock distribution resonator system. The system includes a clock source configured to generate a clock signal having a predefined wavelength, and a main transmission line coupled to the clock source to propagate the clock signal and comprising a first predetermined length defined as a function of the wavelength of the clock signal. The system also includes a plurality of transmission line branches each coupled to the main transmission line to propagate the clock signal. Each of the plurality of transmission line branches includes a second predetermined length different from the first predetermined length. The system further includes a plurality of clock distribution networks coupled to the respective plurality of transmission line branches and being configured to provide the clock signal to each of a plurality of circuits to provide clock synchronization for the associated plurality of circuits.

8. 发明申请

US20180145664A1 SUPERCONDUCTING TRANSMISSION DRIVER SYSTEM 审中-公开
公开(公告)号：US20180145664A1
公开(公告)日：2018-05-24
申请号：US15356049
申请日：2016-11-18
申请人： QUENTIN P. HERR , EDWARD RUDMAN , JONATHAN D. EGAN , VLADIMIR V. TALANOV
发明人： QUENTIN P. HERR , EDWARD RUDMAN , JONATHAN D. EGAN , VLADIMIR V. TALANOV
IPC分类号： H03K3/38 , H03K17/92 , H01L39/02
CPC分类号： H03K3/38 , H01L39/025 , H03K17/92
摘要： One example includes a superconducting transmission driver system. The system includes a latching gate stage comprising at least one Josephson junction configured to switch from an off state to an oscillating voltage state to provide an oscillating voltage at a control node in response to a single flux quantum (SFQ) pulse received at an input. The system further includes a low-pass filter stage coupled to the control node and configured to convert the oscillating voltage to a pulse signal to be transmitted over a transmission line.

9. 发明授权

US06943562B2 Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuits 失效
标题翻译：集成电路微型结构微波电容非接触式测量方法与系统
公开(公告)号：US06943562B2
公开(公告)日：2005-09-13
申请号：US10717448
申请日：2003-11-21
申请人： Vladimir V. Talanov , Andrew R. Schwartz
发明人： Vladimir V. Talanov , Andrew R. Schwartz
IPC分类号： G01R31/311 , G01R27/28
CPC分类号： G01R31/311
摘要： In the method and system for non-contact measurements of microwave capacitance of test structures patterned on wafers used for production of modern integrated circuits, a near-field balanced two-conductor probe is brought into close proximity to a test structure, and the resonant frequency of the probe for the test structure is measured. The probe is then positioned at the same distance from the uniform metallic pad, and the resonance frequency of the probe for the uniform metallic pad is measured. A shear force distance control mechanism maintains the distance between the tip of the probe and the metallic pad equal to the distance between the tip of the probe and the test structure. The microwave capacitance of the test structure is then calculated in accordance with a predefined formula. The obtained microwave capacitance may be further used for determining possible defects of the test structure.
摘要翻译：在用于生产现代集成电路的晶片上图案化的测试结构的微波电容的非接触测量的方法和系统中，近场平衡双导体探针被紧密接近测试结构，并且谐振频率的测试结构的探头。然后将探头定位在与均匀金属垫相同的距离处，并且测量用于均匀金属垫的探针的共振频率。剪切力距离控制机构保持探针的尖端和金属垫片之间的距离等于探针的尖端与测试结构之间的距离。然后根据预定公式计算测试结构的微波电容。获得的微波电容可以进一步用于确定测试结构的可能缺陷。

10. 发明授权

US06366096B1 Apparatus and method for measuring of absolute values of penetration depth and surface resistance of metals and superconductors 失效
标题翻译：用于测量金属和超导体的穿透深度和表面电阻绝对值的装置和方法
公开(公告)号：US06366096B1
公开(公告)日：2002-04-02
申请号：US09633252
申请日：2000-08-04
申请人： Vladimir V. Talanov , Steven Mark Anlage
发明人： Vladimir V. Talanov , Steven Mark Anlage
IPC分类号： G01R2700
CPC分类号： G01R27/2635 , G01N27/02
摘要： An apparatus and method for accurately estimating the absolute value of surface resistances and penetration depths of metallic films and bulk samples. The apparatus carries out measurements using two nominally identical samples with flat sample surfaces which are brought together with a thin dielectric separation of variable thickness sandwiched between the samples in order to form a two-conductor parallel plate transmission line resonator which carries an electromagnetic wave. A liquid or gas of unknown dielectric properties fills the dielectric spacer. A resonant condition of the microwave signal is established and the resonant frequency and the quality factor Q are measured while the spacing between the sample plates is varied. The variation of the resonant frequency and Q with spacer thickness is then analyzed to yield absolute values of the sample surface resistance and penetration depth which are then further used for determination of absolute complex conductivity and surface impedance of the samples.
摘要翻译：一种用于精确估算金属膜和散装样品的表面电阻和穿透深度的绝对值的装置和方法。该装置使用具有平坦样品表面的两个名义上相同的样品进行测量，所述样品表面被夹在样品之间的可变厚度的薄介电分离带在一起，以形成携带电磁波的双导体平行板传输线谐振器。未知介质特性的液体或气体填充介电间隔物。建立微波信号的谐振条件，并且在样品板之间的间隔变化的同时测量谐振频率和品质因子Q。然后分析谐振频率和Q与间隔物厚度的变化，以产生样品表面电阻和穿透深度的绝对值，然后进一步用于确定样品的绝对复电导率和表面阻抗。

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