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    • 4. 发明授权
    • Fabrication method for lines of semiconductor device
    • 半导体器件线路的制造方法
    • US06797635B2
    • 2004-09-28
    • US10142696
    • 2002-05-08
    • Tung-Cheng Kuo
    • Tung-Cheng Kuo
    • H01L21302
    • G03F1/36H01L21/32139
    • A fabrication method for lines of a semiconductor device provides a substrate with a deposition layer already formed thereon, followed by forming a photoresist layer on the deposition layer. Photolithography is conducted with a mask to pattern the photoresist layer, wherein the photoresist layer is designed with the consideration of both the proximity effect and the microloading effect due to etching. Thereafter, using the patterned photoresist layer as an etching mask, an etching is conducted to form a plurality of lines. Since during the patterning of the photoresist layer, the proximity effect and the microlaoding effect are being considered, the difference in the linewidths between the dense feature region and the scattered feature region is minimized after the etching process.
    • 用于半导体器件的线的制造方法为衬底提供已经在其上形成的沉积层,随后在沉积层上形成光致抗蚀剂层。 用掩模进行光刻以对光致抗蚀剂层进行图案化,其中考虑到由于蚀刻引起的邻近效应和微加载效应,设计光致抗蚀剂层。 此后,使用图案化的光致抗蚀剂层作为蚀刻掩模,进行蚀刻以形成多条线。 由于在光致抗蚀剂层的图案化期间,考虑了接近效应和微致密效应,所以在蚀刻处理之后,致密特征区域和散射特征区域之间的线宽的差异被最小化。
    • 6. 发明授权
    • Nitride read-only memory with protective diode and operating method thereof
    • 具有保护二极管的氮化物只读存储器及其操作方法
    • US06545309B1
    • 2003-04-08
    • US10104397
    • 2002-03-22
    • Tung-Cheng Kuo
    • Tung-Cheng Kuo
    • H01L27108
    • H01L27/11568G11C16/0466H01L27/105H01L27/11573
    • A NROM with a protective diode is described. The NROM comprises a substrate, a NROM cell, an n+-doped region, an n+-doped guard ring and a polysilicon guard ring, wherein the substrate, the n+-doped region, the n+-doped guard ring and the polysilicon guard ring constitute a protective diode. The NROM cell is disposed on the substrate. The n+-doped region is located in the substrate and is electrically connected with a word-line of the NROM cell. The n+ guard ring is located in the substrate surrounding the n+-doped region. The polysilicon guard ring is disposed on the substrate between the n+-doped region and the n+-doped guard ring.
    • 描述了具有保护二极管的NROM。 NROM包括衬底,NROM单元,n +掺杂区,n +掺杂的保护环和多晶硅保护环,其中衬底,n +掺杂区,n +掺杂的保护环和多晶硅保护环构成 一个保护二极管。 NROM单元设置在基板上。 n +掺杂区位于衬底中并与NROM单元的字线电连接。 n +保护环位于围绕n +掺杂区域的衬底中。 多晶硅保护环设置在n +掺杂区域和n +掺杂保护环之间的衬底上。
    • 8. 发明授权
    • Fabrication method for a silicon nitride read-only memory
    • 氮化硅只读存储器的制造方法
    • US06417053B1
    • 2002-07-09
    • US09990455
    • 2001-11-20
    • Tung-Cheng Kuo
    • Tung-Cheng Kuo
    • H01L21336
    • H01L21/28282
    • A fabrication method for a silicon nitride read-only memory is described. A silicon nitride read-only memory and a grounding doped region are formed in the substrate. A contact is formed on the substrate. A metal protection line is also formed, wherein the metal protection line is electrically connected to the word line of the silicon nitride read-only memory. Moreover, the metal protection line is electrically connected the grounding doped region through the contact to conduct charges generated during the manufacturing process to the substrate. The resistance of the metal protection line is higher than that of the word line. A high current is then used to bum out the metal protection line after the formation of the metal interconnect on the substrate to ensure a normal function of the memory device.
    • 描述了氮化硅只读存储器的制造方法。 在衬底中形成氮化硅只读存储器和接地掺杂区域。 在基板上形成接触。 还形成金属保护线,其中金属保护线与氮化硅只读存储器的字线电连接。 此外,金属保护线通过接触电连接到接地掺杂区域,以将制造过程中产生的电荷导入衬底。 金属保护线的电阻高于字线。 然后在衬底上形成金属互连件之后,使用高电流来使金属保护线烧结,以确保存储器件的正常功能。
    • 9. 发明授权
    • Method for detecting polarization of a ferroelectric capacitor in a ferroelectric memory and thereof structure
    • 铁电存储器中的铁电电容器的极化检测方法及其结构
    • US06388913B1
    • 2002-05-14
    • US09772326
    • 2001-01-30
    • Tung-Cheng KuoHsiang-Lan LungShue-Shuen Chen
    • Tung-Cheng KuoHsiang-Lan LungShue-Shuen Chen
    • G11C1122
    • G11C11/22
    • A method for detecting polarization of a ferroelectric capacitor in a ferroelectric memory and thereof structure is provided by detecting polarization of a ferroelectric capacitor through a characteristic which present different voltage values by providing different voltages on the ferroelectric capacitor stay at different polarization directions, so that the disadvantages caused by a conventional method for detecting charge quantity can be improved and a limited size of a capacitance of the cell ferroelectric capacitor can be solved. The method for detecting comprises the step of detecting an output voltage on a connection node between a cell ferroelectric capacitor and a sense linear capacitor, and then if the detected output voltage is high read voltage, a logic state of the cell ferroelectric capacitor is decided to a first logic state, if the detected output voltage is low read voltage, a logic state of the cell ferroelectric capacitor is decided to a second logic state.
    • 通过在强电介质电容器停留在不同的极化方向上提供不同的电压,通过检测出不同的电压值的特性来检测铁电电容器的偏振,从而提供强电介质存储器中铁电电容器的极化检测方法, 可以提高由传统的检测电荷量的方法引起的缺点,并且可以解决单元铁电电容器的电容的有限尺寸。 检测方法包括检测单元铁电电容器和感测线性电容器之间的连接节点上的输出电压的步骤,然后如果检测到的输出电压为高读取电压,则判定单元铁电电容器的逻辑状态 第一逻辑状态,如果检测到的输出电压为低读取电压,则将单元铁电电容器的逻辑状态判定为第二逻辑状态。
    • 10. 发明授权
    • Non-volatile memory cell and sensing method
    • 非易失性存储单元和感测方法
    • US06385077B1
    • 2002-05-07
    • US09732019
    • 2000-12-08
    • Tung-Cheng KuoHsiang-Lan LungShue-Shuen Chen
    • Tung-Cheng KuoHsiang-Lan LungShue-Shuen Chen
    • G11C1122
    • G11C11/22
    • A non-volatile ferroelectric capacitor memory of the present invention comprises a plurality of word lines located in parallel to each other, a plurality of bit lines across the word lines, a plurality of sensing ferroelectric capacitor connected to ground, a plurality of output transistors, and a plurality of memory cells located at intersections between each word line and bit line. In each of the memory cells including a depletion field effect transistor and a ferroelectric capacitor, the first electrode plate of the ferroelectric capacitor is connected to the depletion field effect transistor and the second electrode plate is connected to the bit line, and the gate electrode of the depletion field effect transistor is connected to the bit line.
    • 本发明的非挥发性铁电电容器存储器包括彼此平行的多个字线,跨越字线的多个位线,连接到地的多个感测铁电电容器,多个输出晶体管, 以及位于每个字线和位线之间的交叉点处的多个存储单元。 在包括耗尽场效应晶体管和铁电电容器的每个存储单元中,强电介质电容器的第一电极板连接到耗尽场效应晶体管,第二电极板连接到位线,栅电极 耗尽场效应晶体管连接到位线。