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    • 1. 发明授权
    • Linear transfer device for wafery works
    • 用于晶圆工程的线性传输装置
    • US4569624A
    • 1986-02-11
    • US556292
    • 1983-11-30
    • Minoru NodaTsutomu MiyataYoshihiro YamashitaKenji Ohmura
    • Minoru NodaTsutomu MiyataYoshihiro YamashitaKenji Ohmura
    • B65G47/90H01L21/677H01L21/687B65H1/00
    • H01L21/67781H01L21/68707Y10S414/138
    • A linear transfer device for wafery works comprising: a work supporting means provided each in a work supplying station, one or more working stations and a work discharging station, which supports the works in erect positions in front thereof, the stations being linearly arranged with equal distances; a feeding means for axially feeding the work supporting means; a transfer bar capable of moving horizontally and vertically and holding means provided on the transfer bar which are adapted to face to the stations and have a pair of supporting grooves in order to support the work in an erect position, characterized in that the delivery or reception of the work supported by each work supporting means or each holding means can be made only by the vertical movement of the transfer bar relatively to each station and that the work supporting means can locate at the retreated positions in order to prevent from interfering with the holding means when the transfer bar is in movement.
    • 一种用于晶片工程的线性传送装置,包括:工件支撑装置,每个工件供应站设置在工作供应站中,一个或多个工作站和工作放电站,其在前面的直立位置支撑工件,工位平行地线性排列 距离 用于轴向馈送工件支撑装置的进给装置; 能够水平和垂直移动的传送杆和设置在传送杆上的保持装置,该传送杆适于面向站并具有一对支撑槽,以便将工件支撑在直立位置,其特征在于,传送或接收 由每个工件支撑装置或每个保持装置支撑的工件只能通过相对于每个工位的转移杆的垂直运动而做,并且工件支撑装置可以位于后退位置,以防止干涉保持 意味着转移杆运动时。
    • 3. 发明授权
    • Wafery works receiving or delivering device
    • Wafery接收或传送设备
    • US4566841A
    • 1986-01-28
    • US556293
    • 1983-11-30
    • Kenji OhmuraTsutomu MiyataYoshihiro YamashitaMinoru Noda
    • Kenji OhmuraTsutomu MiyataYoshihiro YamashitaMinoru Noda
    • B65G47/90B65G1/00H01L21/67H01L21/677B65G65/34
    • H01L21/67781Y10S414/138
    • Wafery works receiving or delivering device comprise a work supporting means having plural pairs of supporting grooves of a given pitch in order to support a column of wafery works; a transfer mechanism having the work supporting means mounted at the upper end thereof and reciprocatable between a stand-by position and a work receiving or delivering position; a pair of forks disposed in the region of the work receiving or delivering position and having supporting grooves of the same pitch as those of the work supporting means; a fork advancing mechanism such that for advancing the forks to the work receiving or delivering position such that the forks overlap the work supporting means and the supporting grooves thereof align with those of the work supporting means; and a mechanism which collectively hands over the works supported on the work supporting means or on the forks to the forks or the work supporting means by moving the work supporting means upward or downward relative to the forks.
    • 接收或传送设备的Wafery工程包括具有多个给定间距的支撑槽的工件支撑装置,以便支撑一批晶圆工程; 传送机构,其具有安装在其上端处的工件支撑装置,并且能够在待机位置和工件接收或传送位置之间往复运动; 设置在工件接收或传送位置的区域中的一对叉,并具有与工件支撑装置相同的间距的支撑槽; 叉子前进机构,用于将叉推进到工件接收或传送位置,使得叉与工件支撑装置重叠,并且其支撑槽与工件支撑装置的那些对准; 以及通过相对于叉子向上或向下移动工件支撑装置,将支撑在工件支撑装置上的工具或叉子上的叉子或工件支撑装置交叉的机构。