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    • 1. 发明申请
    • PATTERN SHAPE INSPECTION INSTRUMENT AND PATTERN SHAPE INSPECTION METHOD, INSTRUMENT FOR INSPECTING STAMPER FOR PATTERNED MEDIA AND METHOD OF INSPECTING STAMPER FOR PATTERNED MEDIA, AND PATTERNED MEDIA DISK MANUFACTURING LINE
    • 图案形状检查仪器和图案形状检查方法,用于检查图案印刷机的仪器和检查图案印刷机的方法和图形媒体制造线
    • US20110272096A1
    • 2011-11-10
    • US13103635
    • 2011-05-09
    • Shigeru SERIKAWARyuta SUZUKIToshiaki SUGITAKiyotaka HORIE
    • Shigeru SERIKAWARyuta SUZUKIToshiaki SUGITAKiyotaka HORIE
    • C23F1/08G01N21/88
    • G01N21/956
    • The present invention specifies a stamper that causes a defect at an early stage by inspecting a surface of a patterned medium and failure in molding of a pattern shape of a stamper at high speed or extracting a defect resulting from the stamper based upon a defect of a pattern on a disk so as to prevent the occurrence of a large quantity of failure beforehand. In the present invention, in order to inspect a pattern shape, wide-band light including a deep ultraviolet ray is radiated onto an inspected object, reflected light generated from the inspected object irradiated by an radiating optical system is detected, and it is judged whether the channel spectral data having fixed wavelength width of the detected reflected light exists within set limit or not. Similarly, the stamper is judged defective when the reflected light is diffracted and detected, detected spectral reflectance waveform data is compared with reference data, a defective area of a pattern of a resist film is extracted and the defective area acquired in the inspection data of the current inspection is the same as defective areas acquired in the inspection data of plural substrates inspected using the same stamper.
    • 本发明通过检查图案化介质的表面和高速成型压模的图案形状的失败或提取由于压模产生的缺陷而在早期引起缺陷的压模 以防止事故发生大量故障。 在本发明中,为了检查图案形状,将包含深紫外线的宽带光照射到检查对象物上,检测由被检查物体产生的被辐射光学系统照射的反射光,并判断是否 检测到的反射光的固定波长宽度的通道光谱数据存在于设定的限制内。 类似地,当反射光被衍射和检测时,压模被判定为有缺陷,检测到的光谱反射率波形数据与参考数据进行比较,提取抗蚀剂膜的图案的缺陷区域以及在检测数据中获取的缺陷区域 当前检查与使用同一压模检查的多个基板的检查数据中获取的缺陷区域相同。
    • 4. 发明授权
    • Magnetic disk inspecting method and its system
    • 磁盘检查方法及其系统
    • US08654481B2
    • 2014-02-18
    • US13267043
    • 2011-10-06
    • Ryuta SuzukiMasayuki YamamotoToshiaki Sugita
    • Ryuta SuzukiMasayuki YamamotoToshiaki Sugita
    • G11B27/36
    • G11B33/00G01R33/1207G11B33/12
    • The present invention provides a magnetic disk inspection method and its system suitable to supply magnetic disks stored in a cassette to a plurality of inspection devices and collects inspected magnetic disks from the inspection devices. The cassette in which uninspected magnetic disks are stored is taken out from a cassette housing unit and transferred to any one of a plurality of optical inspection units. The optical disk inspection unit to which the cassette with the uninspected magnetic disks stored therein is transferred, takes out an uninspected magnetic disk and inspects both surfaces thereof. The magnetic disk whose both surfaces are inspected and which is determined as a non-defective product is stored in a cassette for collecting non-defective magnetic disks. The cassette is transferred from the optical inspection unit to the cassette housing unit. The transferred cassette is housed in the cassette housing unit.
    • 本发明提供了一种磁盘检查方法及其系统,其适用于将存储在盒中的磁盘提供给多个检查装置,并从检查装置收集检查的磁盘。 存储非预期磁盘的盒式磁带从盒式存储单元中取出并传送到多个光学检查单元中的任意一个。 将其中存储有未预期磁盘的盒带转移到的光盘检查单元取出未检测的磁盘并检查其两个表面。 检查其两个表面并被确定为无缺陷产品的磁盘被存储在用于收集无缺陷磁盘的盒中。 盒式光盘从光学检测单元传送到盒式存储单元。 转移的盒式磁带被容纳在盒式存储单元中。
    • 7. 发明授权
    • Process for preparing copolymer
    • 制备共聚物的方法
    • US4560735A
    • 1985-12-24
    • US714759
    • 1985-03-22
    • Masao NakagawaKiyoshi MoriToshiaki Sugita
    • Masao NakagawaKiyoshi MoriToshiaki Sugita
    • C08F212/12C08F4/36
    • C08F212/12
    • A process for preparing .alpha.-methylstyrene/acrylonitrile copolymer by suspension or bulk polymerization of .alpha.-methylstyrene and acrylonitrile with at least one member selected from the group consisting of styrene, chlorostyrene, para-methylstyrene, t-butylstyrene, acrylic ester and methacrylic ester in the presence of a difunctional organic peroxide having a 10 hour half-life temperature of 60.degree. to 120.degree. C. and capable of producing a t-butyl radical, at a polymerization temperature of 80.degree. to 135.degree. C. The process produces the copolymers having excellent transparency, heat resistance and strength in a high conversion in a short time.
    • 通过α-甲基苯乙烯和丙烯腈与至少一种选自苯乙烯,氯苯乙烯,对甲基苯乙烯,叔丁基苯乙烯,丙烯酸酯和甲基丙烯酸酯的组分的悬浮或本体聚合制备α-甲基苯乙烯/丙烯腈共聚物的方法 在80℃至135℃的聚合温度下,存在10分钟半衰期温度为60℃至120℃并能够生产叔丁基的双官能有机过氧化物。该方法产生共聚物 在短时间内具有高转化率的优异的透明性,耐热性和强度。
    • 8. 发明申请
    • METHOD AND APPARATUS FOR INSPECTING MAGNETIC DISK
    • 检测磁盘的方法和装置
    • US20120075624A1
    • 2012-03-29
    • US13210494
    • 2011-08-16
    • Ryuta SUZUKIMasayuki YAMAMOTOToshiaki SUGITA
    • Ryuta SUZUKIMasayuki YAMAMOTOToshiaki SUGITA
    • G01N21/00
    • G01N21/95
    • In magnetic disk inspection, it is made possible to perform the total operation in which magnetic disks taken out from a cassette are inspected on both surfaces thereof, classified by the grades according to the inspection results and returned again to corresponding cassettes, while maintaining high throughput. To achieve such inspection, a plurality of uninspected boards are put on a plurality of corresponding rotation-drive portions at a plurality of corresponding board taking-out and supply positions in a magnetic disk inspection apparatus and are transferred to a plurality of corresponding inspection positions. The boards are optically inspected while rotating. The optically inspected boards are transferred to the plurality of corresponding board taking-out and supply positions and the plurality of transferred boards are taken out. The taken-out boards are sorted according to the optical inspection results and stored in the corresponding cassettes into which inspected boards are stored.
    • 在磁盘检查中,可以进行从两个表面检查从磁带盒中取出的磁盘的整个操作,并根据检查结果按等级分类并再次返回到相应的盒,同时保持高的吞吐量 。 为了实现这种检查,在磁盘检查装置中的多个相应的板取出和供给位置上,将多个未预期的板放在多个相应的旋转驱动部分上,并被传送到多个对应的检查位置。 板在旋转时进行光学检查。 光学检测板转移到多个对应的板取出和供给位置,并且多个转印板被取出。 取出的板根据光学检查结果进行分类,并存储在存储有检查板的相应的盒中。