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1. 发明授权

US06723987B2 Method of inspecting holes using charged-particle beam 失效
标题翻译：使用带电粒子束检查孔的方法
公开(公告)号：US06723987B2
公开(公告)日：2004-04-20
申请号：US09727358
申请日：2000-11-30
申请人： Toru Ishimoto
发明人： Toru Ishimoto
IPC分类号： H05H302
CPC分类号： G01R31/307 , G01N23/00
摘要： A method of inspecting contact holes or via holes in a semiconductor device. Plural small measurement regions Q are established on the whole sample surface. The measurement regions Q are successively irradiated with an electron beam. At this time, an absorption current flowing across the sample is detected and amplified by a current amplifier. A control unit stores data about the absorption current signal derived from the small regions Q in locations of a memory which are addressed corresponding to the positions of the small regions. The control unit reads data about absorption current intensity values from the memory and classifies the intensity values into four intensity ranges, for example, to which different brightness intensities are assigned.
摘要翻译：一种检查半导体器件中的接触孔或通孔的方法。在整个样品表面上建立了多个小的测量区域Q。测量区域Q依次用电子束照射。此时，流过样品的吸收电流被电流放大器检测和放大。控制单元将关于从小区域Q导出的吸收电流信号的数据存储在对应于小区域的位置的存储器的位置中。控制单元从存储器读取关于吸收电流强度值的数据，并将强度值分类为四个强度范围，例如分配不同亮度强度的强度范围。

2. 发明授权

US06653629B2 Specimen inspection instrument 失效
公开(公告)号：US06653629B2
公开(公告)日：2003-11-25
申请号：US09876853
申请日：2001-06-07
申请人： Yukihiro Tanaka , Sadao Matsumoto , Toru Ishimoto , Hirofumi Miyao
发明人： Yukihiro Tanaka , Sadao Matsumoto , Toru Ishimoto , Hirofumi Miyao
IPC分类号： G01N2300
CPC分类号： H01J37/28 , G01R31/2653 , G01R31/305 , H01J37/244 , H01J2237/24495 , H01J2237/24564
摘要： A specimen inspection instrument has a specimen-moving mechanism mounted within a specimen chamber. An electrical current, induced across the specimen by the mechanism, is detected with a detector. The specimen is examined based on the obtained detector output signal. An amplifier for amplifying the detector output signal is placed outside the specimen chamber. A first lead wire passes the detector output signal to the outside amplifier through the wall of the specimen chamber. A second lead wire connects a conductive partition member with a conducting member and with a reference input terminal of the amplifier that determines a reference potential for the output from the amplifier.

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