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    • 3. 发明申请
    • WAFERSTART PROCESSES AND SYSTEMS FOR INTEGRATED CIRCUIT FABRICATION
    • WAFERSTART集成电路制造的方法和系统
    • US20140046474A1
    • 2014-02-13
    • US13568449
    • 2012-08-07
    • Tony GenenncherStephan PuelmMichael FoersterJuergen Sieberg
    • Tony GenenncherStephan PuelmMichael FoersterJuergen Sieberg
    • G06F19/00
    • G06Q50/04G06Q10/08G06Q50/28H01L21/67294H01L21/67769Y02P90/30
    • A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is entered from the machine-readable medium associated with the container into the computer. The order information and the wafer data are compared within the computer to create a verified data set in the computer upon the computer determining that the supplied wafers in the container correspond to the requested wafers in the order information. The verified data set is stored in a storage medium within the computer. The supplied wafers are transferred from the container to a front opening unified pod after creating the verified data set.
    • 用于集成电路制造的晶片启动过程包括通过计算机的数据输入接口将请求的晶片的订单信息输入计算机。 提供容器,包括提供的晶片并具有与其相关联的机器可读介质。 机器可读介质用与提供的晶片有关的晶片数据进行编码。 将晶片数据从与容器相关联的机器可读介质输入到计算机中。 计算机中的订单信息和晶片数据在计算机内进行比较,以便在计算机确定容器中提供的晶片与订购信息中所请求的晶片相对应时,在计算机中创建经验证的数据集。 验证的数据集存储在计算机内的存储介质中。 所提供的晶片在创建验证数据集之后从容器转移到前开口统一的盒。