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    • 2. 发明申请
    • INTEGRATED CMOS POROUS SENSOR
    • 集成CMOS多孔传感器
    • US20110089439A1
    • 2011-04-21
    • US12975846
    • 2010-12-22
    • Timothy Cummins
    • Timothy Cummins
    • H01L31/12H01L31/18
    • G01N27/22G01N27/121G01N27/223H01L23/528H01L27/0629H01L27/105H01L27/15H01L2924/0002H01L2924/00
    • A single chip wireless sensor comprises a microcontroller connected by a transmit/receive interface to a wireless antenna. The microcontroller is also connected to an 8 kB RAM, a USB interface, an RS232 interface, 64 kB flash memory, and a 32 kHz crystal. The device senses humidity and temperature, and a humidity sensor is connected by an 18 bit ΣΔ A-to-D converter to the microcontroller and a temperature sensor is connected by a 12 bit SAR A-to-D converter to the microcontroller. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
    • 单芯片无线传感器包括通过发射/接收接口连接到无线天线的微控制器。 微控制器还连接到8 kB RAM,USB接口,RS232接口,64 kB闪存和32 kHz晶振。 该设备感测湿度和温度,湿度传感器通过18位&Sgr&Dgr连接; 微控制器的A / D转换器和温度传感器由12位SAR A / D转换器连接到微控制器。 该器件是在单个工艺中制造的集成芯片,其中电子器件和传感器元件都使用标准CMOS处理技术制造,应用于在集成过程中实现电子和感测元件。
    • 4. 发明申请
    • Integrated Electronic Sensor
    • 集成电子传感器
    • US20090141767A1
    • 2009-06-04
    • US11992470
    • 2006-10-02
    • Timothy Cummins
    • Timothy Cummins
    • G01K1/00G01N7/00H01L21/02G01N27/22
    • G01N27/223
    • A single chip wireless sensor (1) comprises a microcontroller (2) connected to a transmit/receive interface (3), which is coupled to a wireless antenna (4) by an L-C matching circuit. The sensor (1) senses gas or humidity and temperature. The device (1) is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process. A Low-K material (57) with an organic polymer component is spun onto the wafer to form a top layer incorporating also sensing electrodes (60). This material is cured at 300° C., which is much lower than CVD temperatures. The polyimide when cured becomes thermoset, and the lower mass-to-volume ratio resulting in K, its dielectric constant, reducing to 2.9. The thermoset dielectric, while not regarded as porous in the conventional sense, has sufficient free space volume to admit enough gas or humidity for sensing.
    • 单芯片无线传感器(1)包括连接到发射/接收接口(3)的微控制器(2),其通过L-C匹配电路耦合到无线天线(4)。 传感器(1)感测气体或湿度和温度。 器件(1)是在单个工艺中制造的集成芯片,其中电子器件和传感器部件都使用标准CMOS处理技术制造,其被应用于在集成过程中实现电子和感测部件。 将具有有机聚合物组分的低K材料(57)旋转到晶片上以形成还具有感测电极(60)的顶层。 该材料在300℃下固化,其比CVD温度低得多。 固化时的聚酰亚胺变得热固化,并且导致K的较低质量体积比其介电常数降低到2.9。 热固性电介质虽然在传统意义上不被认为是多孔的,但具有足够的自由空间体积以允许足够的气体或湿度用于感测。
    • 5. 发明申请
    • INTEGRATED CMOS POROUS SENSOR
    • 集成CMOS多孔传感器
    • US20120256236A1
    • 2012-10-11
    • US13494392
    • 2012-06-12
    • Timothy CUMMINS
    • Timothy CUMMINS
    • H01L29/80
    • G01N27/22G01N27/121G01N27/223H01L23/528H01L27/0629H01L27/105H01L27/15H01L2924/0002H01L2924/00
    • A single chip wireless sensor comprises a microcontroller connected by a transmit/receive interface to a wireless antenna. The microcontroller is also connected to an 8 kB RAM, a USB interface, an RS232 interface, 64 kB flash memory, and a 32 kHz crystal. The device senses humidity and temperature, and a humidity sensor is connected by an 18 bit ΣΔ A-to-D converter to the microcontroller and a temperature sensor is connected by a 12 bit SAR A-to-D converter to the microcontroller. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
    • 单芯片无线传感器包括通过发射/接收接口连接到无线天线的微控制器。 微控制器还连接到8 kB RAM,USB接口,RS232接口,64 kB闪存和32 kHz晶振。 该设备感测湿度和温度,湿度传感器通过18位&Sgr&Dgr连接; 微控制器的A / D转换器和温度传感器由12位SAR A / D转换器连接到微控制器。 该器件是在单个工艺中制造的集成芯片,其中电子器件和传感器元件都使用标准CMOS处理技术制造,应用于在集成过程中实现电子和感测元件。
    • 6. 发明授权
    • Integrated electronic sensor
    • 集成电子传感器
    • US08007167B2
    • 2011-08-30
    • US11992470
    • 2006-10-02
    • Timothy Cummins
    • Timothy Cummins
    • G01K7/01G01N25/26G01N25/66H01L29/02
    • G01N27/223
    • A single chip wireless sensor (1) comprises a microcontroller (2) connected to a transmit/receive interface (3), which is coupled to a wireless antenna (4) by an L-C matching circuit. The sensor (1) senses gas or humidity and temperature. The device (1) is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process. A Low-K material (57) with an organic polymer component is spun onto the wafer to form a top layer incorporating also sensing electrodes (60). This material is cured at 300° C., which is much lower than CVD temperatures. The polyimide when cured becomes thermoset, and the lower mass-to-volume ratio resulting in K, its dielectric constant, reducing to 2.9. The thermoset dielectric, while not regarded as porous in the conventional sense, has sufficient free space volume to admit enough gas or humidity for sensing.
    • 单芯片无线传感器(1)包括连接到发射/接收接口(3)的微控制器(2),其通过L-C匹配电路耦合到无线天线(4)。 传感器(1)感测气体或湿度和温度。 器件(1)是在单个工艺中制造的集成芯片,其中电子器件和传感器部件都使用标准CMOS处理技术制造,其被应用于在集成过程中实现电子和感测部件。 将具有有机聚合物组分的低K材料(57)旋转到晶片上以形成还具有感测电极(60)的顶层。 该材料在300℃下固化,其比CVD温度低得多。 固化时的聚酰亚胺变得热固化,并且导致K的较低质量体积比其介电常数降低到2.9。 热固性电介质虽然在传统意义上不被认为是多孔的,但具有足够的自由空间体积以允许足够的气体或湿度用于感测。
    • 7. 发明申请
    • INTEGRATED MOS WIRELESS SENSOR
    • 集成MOS无线传感器
    • US20110098937A1
    • 2011-04-28
    • US12977358
    • 2010-12-23
    • Timothy Cummins
    • Timothy Cummins
    • G06F19/00
    • G01N27/22G01N27/121G01N27/223H01L23/528H01L27/0629H01L27/105H01L27/15H01L2924/0002H01L2924/00
    • A single chip wireless sensor comprises a microcontroller connected by a transmit/receive interface to a wireless antenna. The microcontroller is also connected to an 8 kB RAM, a USB interface, an RS232 interface, 64 kB flash memory, and a 32 kHz crystal. The device senses humidity and temperature, and a humidity sensor is connected by an 18 bit ΣΔ A-to-D converter to the microcontroller and a temperature sensor is connected by a 12 bit SAR A-to-D converter to the microcontroller. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
    • 单芯片无线传感器包括通过发射/接收接口连接到无线天线的微控制器。 微控制器还连接到8 kB RAM,USB接口,RS232接口,64 kB闪存和32 kHz晶振。 该设备感测湿度和温度,湿度传感器通过18位&Sgr&Dgr连接; 微控制器的A / D转换器和温度传感器由12位SAR A / D转换器连接到微控制器。 该器件是在单个工艺中制造的集成芯片,其中电子器件和传感器元件都使用标准CMOS处理技术制造,应用于在集成过程中实现电子和感测元件。
    • 8. 发明申请
    • Integrated CMOS porous sensor
    • 集成CMOS多孔传感器
    • US20090273009A1
    • 2009-11-05
    • US12453965
    • 2009-05-28
    • Timothy Cummins
    • Timothy Cummins
    • H01L29/66H01L29/80H01L21/04
    • G01N27/22G01N27/121G01N27/223H01L23/528H01L27/0629H01L27/105H01L27/15H01L2924/0002H01L2924/00
    • A single chip wireless sensor (1) comprises a microcontroller (2) connected by a transmit/receive interface (3) to a wireless antenna (4). The microcontroller (2) is also connected to an 8 kB RAM (5), a USB interface (6), an RS232 interface (8), 64 kB flash memory (9), and a 32 kHz crystal (10). The device (1) senses humidity and temperature, and a humidity sensor (11) is connected by an 18 bit ΣΔ A-to-D converter (12) to the microcontroller (2) and a temperature sensor (13) is connected by a 12 bit SAR A-to-D converter (14) to the microcontroller (2). The device (1) is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
    • 单芯片无线传感器(1)包括通过发射/接收接口(3)连接到无线天线(4)的微控制器(2)。 微控制器(2)还连接到8kB RAM(5),USB接口(6),RS232接口(8),64kB闪存(9)和32kHz晶体(10)。 设备(1)感测湿度和温度,并且湿度传感器(11)通过18位SigmaDelta A-D转换器(12)连接到微控制器(2),并且温度传感器(13)通过 12位SAR A到D转换器(14)连接到微控制器(2)。 器件(1)是在单个工艺中制造的集成芯片,其中电子器件和传感器部件都使用标准CMOS处理技术制造,其被应用于在集成过程中实现电子和感测部件。
    • 10. 发明授权
    • Integrated MOS gas or humidity sensor having a wireless transceiver
    • 具有无线收发器的集成MOS气体或湿度传感器
    • US08497531B2
    • 2013-07-30
    • US12977358
    • 2010-12-23
    • Timothy Cummins
    • Timothy Cummins
    • H01L29/66
    • G01N27/22G01N27/121G01N27/223H01L23/528H01L27/0629H01L27/105H01L27/15H01L2924/0002H01L2924/00
    • A single chip wireless sensor comprises a microcontroller connected by a transmit/receive interface to a wireless antenna. The microcontroller is also connected to an 8 kB RAM, a USB interface, an RS232 interface, 64 kB flash memory, and a 32 kHz crystal. The device senses humidity and temperature, and a humidity sensor is connected by an 18 bit ΣΔ A-to-D converter to the microcontroller and a temperature sensor is connected by a 12 bit SAR A-to-D converter to the microcontroller. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
    • 单芯片无线传感器包括通过发射/接收接口连接到无线天线的微控制器。 微控制器还连接到8 kB RAM,USB接口,RS232接口,64 kB闪存和32 kHz晶振。 该器件感测湿度和温度,湿度传感器由18位SigmaDelta A-D转换器连接到微控制器,温度传感器通过12位SAR A-D转换器连接到微控制器。 该器件是在单个工艺中制造的集成芯片,其中电子器件和传感器元件都使用标准CMOS处理技术制造,应用于在集成过程中实现电子和感测元件。