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    • 4. 发明授权
    • Method and apparatus for plasma enhanced chemical vapor deposition
    • 等离子体增强化学气相沉积的方法和装置
    • US07947337B2
    • 2011-05-24
    • US11937280
    • 2007-11-08
    • Thomas KuepperLars BewigChristoph MoelleLars BrandtThomas Niklos
    • Thomas KuepperLars BewigChristoph MoelleLars BrandtThomas Niklos
    • H05H1/24
    • C23C16/405C23C16/402C23C16/505C23C16/511C23C16/52H01J37/32266
    • A method and apparatus for coating substrates by means of plasma enhanced vapor deposition are provided, in which at least part of the surroundings of the substrate surface of a substrate to be coated is evacuated and a process gas with a starting substance for the coating is admitted, wherein the coating is deposited by a plasma being ignited by radiating in electromagnetic energy in the surroundings of the substrate surface filled with the process gas. The electromagnetic energy is radiated in by a multiplicity of pulse sequences, preferably microwave or radiofrequency pulses, with a multiplicity of pulses spaced apart temporally by first intermissions, wherein the electromagnetic energy radiated in is turned off in the intermissions, and wherein the intermissions between the pulse sequences are at least a factor of 3, preferably at least a factor of 5, longer than the first intermissions between the pulses within a pulse sequence.
    • 提供了一种通过等离子体增强气相沉积来涂覆衬底的方法和装置,其中待涂覆的衬底的衬底表面的至少部分周围环境被抽真空,并且允许具有用于涂层的起始物质的工艺气体 ,其中通过在填充有工艺气体的衬底表面的周围的电磁能辐射而被等离子体沉积涂层。 电磁能通过多个脉冲序列辐射,优选地是微波或射频脉冲,其中多个脉冲通过第一次间歇在时间上间隔开,其中辐射的电磁能量在间歇中被截断,并且其中, 脉冲序列至少比脉冲序列中的脉冲之间的第一次间隔长3倍,优选至少5倍。
    • 7. 发明授权
    • Reflector for a light of higher power with an outer safety jacket
    • 具有较高功率的外部安全护套的反射器
    • US07008082B2
    • 2006-03-07
    • US10671198
    • 2003-09-25
    • Rolf MeyerThomas KuepperReinhard HenzeThomas Wenzel
    • Rolf MeyerThomas KuepperReinhard HenzeThomas Wenzel
    • F21V7/00
    • F21V7/22F21V25/12F21V29/505
    • The reflector for a light of higher power has a base body made of glass or glass ceramic and a protective jacket provided on the outer surface of the base body. The base body is formed with a receptacle for a light source, especially a gas discharge lamp, and an interior mirror surface for reflecting light. The protective jacket includes a mat or is a mat-shaped body, i.e. a woven or knit textile fabric of natural or synthetic material. Preferably it is a glass-fiber-reinforced mat. In addition to preventing splinters from flying around, the protective jacket advantageously also provides temperature equalization throughout the reflector. It also helps to prevent scattered light. The protective mat or jacket may be attached to the base body with an adhesive, such as a water glass.
    • 用于较高功率的光的反射器具有由玻璃或玻璃陶瓷制成的基体和设置在基体的外表面上的保护套。 基体形成有用于光源的容器,特别是气体放电灯,以及用于反射光的内部反射镜表面。 保护性护套包括垫子或是垫状体,即天然或合成材料的编织或针织纺织织物。 优选地,它是玻璃纤维增​​强垫。 除了防止碎片飞散之外,保护套还有助于在整个反射器中提供温度均衡。 它也有助于防止散射光。 保护垫或护套可以用诸如水玻璃的粘合剂附接到基体上。
    • 10. 发明申请
    • Method and apparatus for plasma enhanced chemical vapor deposition
    • 等离子体增强化学气相沉积的方法和装置
    • US20080124488A1
    • 2008-05-29
    • US11937280
    • 2007-11-08
    • Thomas KuepperLars BewigChristoph MoelleLars BrandtThomas Niklos
    • Thomas KuepperLars BewigChristoph MoelleLars BrandtThomas Niklos
    • H05H1/24B05C11/00
    • C23C16/405C23C16/402C23C16/505C23C16/511C23C16/52H01J37/32266
    • The invention is based on the object of reducing the heating of substrates during plasma enhanced chemical vapor deposition. For this purpose, a method and an apparatus for coating substrates by means of plasma enhanced vapor deposition are provided, in which at least part of the surroundings of the substrate surface of a substrate to be coated is evacuated and a process gas with a starting substance for the coating is admitted, wherein the coating is deposited by a plasma being ignited by radiating in electromagnetic energy in the surroundings of the substrate surface filled with the process gas. The electromagnetic energy is radiated in in the form of a multiplicity of pulse sequences, preferably microwave or radiofrequency pulses, with a multiplicity of pulses spaced apart temporally by first intermissions, wherein the electromagnetic energy radiated in is turned off in the intermissions, and wherein the intermissions between the pulse sequences are at least a factor of 3, preferably at least a factor of 5, longer than the first intermissions between the pulses within a pulse sequence.
    • 本发明基于在等离子体增强化学气相沉积期间减少衬底的加热的目的。 为此,提供了一种通过等离子体增强气相沉积来涂覆基板的方法和装置,其中待涂覆的基板的基板表面的至少部分周围环境被抽真空,并且具有起始物质的处理气体 对于涂层是允许的,其中通过在填充有工艺气体的衬底表面的周围的电磁能中辐射的等离子体来沉积涂层。 电磁能以多种脉冲序列的形式辐射,优选为微波或射频脉冲,其中多个脉冲通过第一次间隔在时间上间隔开,其中辐射的电磁能在中断期间被关闭,并且其中 脉冲序列之间的间隔至少比脉冲序列内脉冲之间的第一次间隔长3倍,优选至少5倍。