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1. 发明授权

US08693854B2 Vacuum heating device and vacuum heat treatment method 有权
标题翻译：真空加热装置和真空热处理方法
公开(公告)号：US08693854B2
公开(公告)日：2014-04-08
申请号：US13218766
申请日：2011-08-26
申请人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
发明人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
IPC分类号： H05B37/00
CPC分类号： H02M5/257 , H01L21/67115
摘要： A uniform voltage is applied to loads even to other than a multiple of three loads made of heating lamps connected in parallel to each other, without causing any burden on a primary side. The number of loads is divided into a multiple of three and a multiple of two. A three-phase AC voltage is applied to three primary windings, which are connected as a Y-connection or a Δ-connection. Secondary windings, which are each magnetically coupled to a primary winding of a plurality of three-phase transformers and have the same number of turns, are connected with the multiple of three loads.
摘要翻译：对于负载均匀的电压施加到除了由彼此并联连接的加热灯构成的三个负载的倍数之外的负载，而不会对初级侧造成任何负担。负载的数量分为三个的倍数和二的倍数。三相交流电压被施加到三个初级绕组，它们作为Y型连接或“连接”连接。每个磁耦合到多个三相变压器的初级绕组并且具有相同匝数的次级绕组与三个负载的倍数相连接。

2. 发明申请

US20120008925A1 TEMPERATURE SENSING DEVICE AND HEATING DEVICE 有权
标题翻译：温度传感装置和加热装置
公开(公告)号：US20120008925A1
公开(公告)日：2012-01-12
申请号：US13192691
申请日：2011-07-28
申请人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
发明人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
IPC分类号： F27D11/12 , G01J5/00
CPC分类号： F27D19/00 , F27B5/04 , F27B17/0016 , F27D11/12 , F27D21/0014 , G01J5/0007 , G01J5/02 , G01J5/025 , G01J5/04 , G01J5/045 , G01J5/061 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： A technology to control temperature of a large substrate to be heated. A temperature sensing device is disposed lateral to a region where a radiation heater faces a substrate to be heated inside a heating chamber. A heating device has the heating chamber, the radiation heater, a power-supply device, a substrate-holding device, a control device, and the temperature sensing device. A control program is built into the control device, according to which the power-supply device controls the power applied to the radiation heater to generate heat such that the temperature of the temperature measurement substrate detected by a thermocouple of the temperature sensing device becomes a set temperature. Furthermore, a circulation passage is disposed in close contact with the temperature-sensing device, and with a coolant flowing through the circulation passage, the temperature of the temperature measurement substrate can be cooled from the set temperature to an initial temperature.
摘要翻译：控制待加热的大型基板的温度的技术。温度感测装置设置在辐射加热器面对加热室内待加热基板的区域的两侧。加热装置具有加热室，辐射加热器，电源装置，基板保持装置，控制装置和温度检测装置。控制装置内置有控制程序，根据该控制程序，电源装置控制施加到辐射加热器的功率以产生热量，使得由温度感测装置的热电偶检测的温度测量基板的温度变为一组温度。此外，循环通道设置成与感温装置紧密接触，并且流过循环通道的冷却剂可以将温度测量基板的温度从设定温度冷却到初始温度。

3. 发明授权

US08521013B2 Temperature sensing device and heating device 有权
标题翻译：温度传感装置及加热装置
公开(公告)号：US08521013B2
公开(公告)日：2013-08-27
申请号：US13192691
申请日：2011-07-28
申请人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
发明人： Tsuyoshi Yoshimoto , Katsumi Yamane , Tetsuhiro Ohno , Takahiro Mizoguchi
IPC分类号： H05B3/62
CPC分类号： F27D19/00 , F27B5/04 , F27B17/0016 , F27D11/12 , F27D21/0014 , G01J5/0007 , G01J5/02 , G01J5/025 , G01J5/04 , G01J5/045 , G01J5/061 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： A technology to control temperature of a large substrate to be heated. A temperature sensing device is disposed lateral to a region where a radiation heater faces a substrate to be heated inside a heating chamber. A heating device has the heating chamber, the radiation heater, a power-supply device, a substrate-holding device, a control device, and the temperature sensing device. A control program is built into the control device, according to which the power-supply device controls the power applied to the radiation heater to generate heat such that the temperature of the temperature measurement substrate detected by a thermocouple of the temperature sensing device becomes a set temperature. Furthermore, a circulation passage is disposed in close contact with the temperature-sensing device, and with a coolant flowing through the circulation passage, the temperature of the temperature measurement substrate can be cooled from the set temperature to an initial temperature.
摘要翻译：控制待加热的大型基板的温度的技术。温度感测装置设置在辐射加热器面对加热室内待加热基板的区域的两侧。加热装置具有加热室，辐射加热器，电源装置，基板保持装置，控制装置和温度检测装置。控制装置内置有控制程序，根据该控制程序，电源装置控制施加到辐射加热器的功率以产生热量，使得由温度感测装置的热电偶检测的温度测量基板的温度变为一组温度。此外，循环通道设置成与感温装置紧密接触，并且流过循环通道的冷却剂可以将温度测量基板的温度从设定温度冷却到初始温度。

4. 发明申请

US20120045190A1 VACUUM HEATING DEVICE AND VACUUM HEAT TREATMENT METHOD 有权
标题翻译：真空加热装置和真空热处理方法
公开(公告)号：US20120045190A1
公开(公告)日：2012-02-23
申请号：US13218766
申请日：2011-08-26
申请人： Tsuyoshi YOSHIMOTO , Katsumi YAMANE , Tetsuhiro OHNO , Takahiro MIZOGUCHI
发明人： Tsuyoshi YOSHIMOTO , Katsumi YAMANE , Tetsuhiro OHNO , Takahiro MIZOGUCHI
IPC分类号： H05B37/00 , H05B1/00
CPC分类号： H02M5/257 , H01L21/67115
摘要： A uniform voltage is applied to loads even to other than a multiple of three loads made of heating lamps connected in parallel to each other, without causing any burden on a primary side. The number of loads is divided into a multiple of three and a multiple of two. A three-phase AC voltage is applied to three primary windings, which are connected as a Y-connection or a Δ-connection. Secondary windings, which are each magnetically coupled to a primary winding of a plurality of three-phase transformers and have the same number of turns, are connected with the multiple of three loads. The number of turns of the M-seat primary winding of a Scott transformer is divided into two at a midpoint, to which an end of the T-seat primary winding having a number of turns equal to (√3)/2 times that of the M-seat primary winding, is connected and to which the three-phase AC voltage is applied. The M-seat primary winding and the T-seat primary winding in at least one Scott transformers are each magnetically coupled with each of the secondary windings having the same number of turns. The multiple of two loads are connected to the secondary windings so that no secondary windings appear without a load connected thereto. Thus, an AC voltage can be uniformly applied to the heating lamps without increasing any burden on the primary side.
摘要翻译：对于负载均匀的电压施加到除了由彼此并联连接的加热灯构成的三个负载的倍数之外的负载，而不会对初级侧造成任何负担。负载的数量分为三个的倍数和二的倍数。三相交流电压被施加到三个初级绕组，它们作为Y型连接或“连接”连接。每个磁耦合到多个三相变压器的初级绕组并且具有相同匝数的次级绕组与三个负载的倍数相连接。 Scott变压器的M座一次绕组的匝数在中点被分为两个，T座的初级绕组的一端的匝数等于（√3）/ 2倍于 M座的初级绕组被连接并且被施加三相交流电压。在至少一个Scott变压器中的M座的初级绕组和T座的初级绕组各自与具有相同匝数的每个次级绕组磁耦合。两个负载的倍数连接到次级绕组，使得没有次级绕组出现而没有与其连接的负载。因此，可以在加热灯上均匀地施加AC电压，而不会增加初级侧的任何负担。

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