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    • 1. 发明授权
    • Glass ceramic toughened with tetragonal zirconia
    • 玻璃陶瓷用四方晶氧化锆增韧
    • US4587224A
    • 1986-05-06
    • US578898
    • 1984-02-10
    • Keith D. KeeferTerry A. Michalske
    • Keith D. KeeferTerry A. Michalske
    • C03C10/00C03C10/02C03C10/04C03C10/14
    • C03C10/0054
    • A phase transformation-toughened glass ceramic and a process for making it are disclosed. A mixture of particulate network-forming oxide, network-modifying oxide, and zirconium oxide is heated to yield a homogeneous melt, and this melt is then heat-treated to precipitate an appreciable quantity of tetragonal zirconia, which is retained at ambient temperature to form a phase transformation-toughened glass ceramic. Nucleating agents and stabilizing agents may be added to the mixture to facilitate processing and improve the ceramic's properties. Preferably, the mixture is first melted at a temperature from 1200.degree. to 1700.degree. C. and is then heat-treated at a temperature within the range of 800.degree. to 1200.degree. C. in order to precipitate tetragonal ZrO.sub.2.The composition, as well as the length and temperature of the heat-treatment, must be carefully controlled to prevent solution of the precipitated tetragonal zirconia and subsequent conversion to the monoclinic phase.
    • 公开了相变钢化玻璃陶瓷及其制造方法。 将颗粒网状氧化物,网络改性氧化物和氧化锆的混合物加热以产生均匀的熔体,然后将该熔体进行热处理以沉淀可观量的四方晶氧化锆,其保留在环境温度下形成 相变钢化玻璃陶瓷。 可将成核剂和稳定剂加入到混合物中以促进加工并提高陶瓷的性能。 优选将混合物首先在1200至1700℃的温度下熔化,然后在800-1200℃的温度下进行热处理,以沉淀四方晶ZrO 2。 必须仔细控制热处理的组成以及长度和温度,以防止沉淀的四方晶氧化锆溶解,随后转化为单斜晶相。
    • 2. 发明授权
    • Micromachine friction test apparatus
    • 微机械摩擦试验装置
    • US06446486B1
    • 2002-09-10
    • US09299804
    • 1999-04-26
    • Maarten P. deBoerJames M. RedmondTerry A. Michalske
    • Maarten P. deBoerJames M. RedmondTerry A. Michalske
    • G01N356
    • B81B3/0021B81B2201/0292B81B2203/051G01N3/56G01N19/02G01N2203/0282G01N2203/0286G01N2203/0676G01N2203/0682
    • A microelectromechanical (MEM) friction test apparatus is disclosed for determining static or dynamic friction in MEM devices. The friction test apparatus, formed by surface micromachining, is based on a friction pad supported at one end of a cantilevered beam, with the friction pad overlying a contact pad formed on the substrate. A first electrostatic actuator can be used to bring a lower surface of the friction pad into contact with an upper surface of the contact pad with a controlled and adjustable force of contact. A second electrostatic actuator can then be used to bend the cantilevered beam, thereby shortening its length and generating a relative motion between the two contacting surfaces. The displacement of the cantilevered beam can be measured optically and used to determine the static or dynamic friction, including frictional losses and the coefficient of friction between the surfaces. The test apparatus can also be used to assess the reliability of rubbing surfaces in MEM devices by producing and measuring wear of those surfaces. Finally, the friction test apparatus, which is small in size, can be used as an in situ process quality tool for improving the fabrication of MEM devices.
    • 公开了一种用于确定MEM装置中静态或动态摩擦的微机电(MEM)摩擦试验装置。 通过表面微加工形成的摩擦试验装置基于支撑在悬臂梁的一端的摩擦垫,摩擦垫覆盖在基底上形成的接触垫。 可以使用第一静电致动器来使摩擦垫的下表面与接触垫的上表面接触,并具有受控且可调节的接触力。 然后可以使用第二静电致动器来弯曲悬臂梁,从而缩短其长度并在两个接触表面之间产生相对运动。 可以光学地测量悬臂梁的位移,并用于确定静摩擦或动摩擦,包括摩擦损失和表面之间的摩擦系数。 测试装置也可用于通过产生和测量这些表面的磨损来评估MEM装置中摩擦表面的可靠性。 最后,尺寸小的摩擦试验装置可以用作改进MEM装置制造的原位工艺质量工具。