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    • 1. 发明申请
    • PROBE CARD AND INSPECTION APPARATUS
    • 探针卡和检查装置
    • US20100327898A1
    • 2010-12-30
    • US12788874
    • 2010-05-27
    • Tatsuo IshigakiKatsuji HoshiAkihisa Akahira
    • Tatsuo IshigakiKatsuji HoshiAkihisa Akahira
    • G01R31/02
    • G01R1/07385G01R1/36
    • An automatic switching mechanism is controlled by a probe card independent from a tester without limitation of the number of control signals from the tester. A probe card and an inspection apparatus include probes to be brought into contact with electrodes of inspection targets and a power supply channel electrically connecting the probes to a tester. The automatic switching mechanism divides each of the power supply channels into a plurality of power supply wiring portions, which are respectively connected to the probes; and shuts off the power supply wiring responsive to electrical fluctuation such as overcurrent. An electrical fluctuation detection mechanism detects an electrical fluctuation due to a defective product among the inspection targets. A control mechanism, responsive to detection of an electrical fluctuation, shuts off the power supply wiring portion if the electrical fluctuation is caused by the automatic switching mechanism.
    • 自动切换机构由独立于测试仪的探针卡控制,而不受来自测试仪的控制信号的数量的限制。 探针卡和检查装置包括要与检查对象的电极接触的探针和将探针电连接到测试器的电源通道。 自动切换机构将各个电源通道分成多个电源配线部分,分别连接到探头; 并且响应于诸如过电流的电波动来关断电源布线。 电波动检测机构检测检查对象中的不良品的电波动。 如果由自动切换机构引起电气波动,则响应于电波动的检测的控制机构切断电源布线部。
    • 2. 发明授权
    • Probe card and inspection apparatus
    • 探头卡和检测仪器
    • US08736292B2
    • 2014-05-27
    • US12788874
    • 2010-05-27
    • Tatsuo IshigakiKatsuji HoshiAkihisa Akahira
    • Tatsuo IshigakiKatsuji HoshiAkihisa Akahira
    • G01R31/02
    • G01R1/07385G01R1/36
    • An automatic switching mechanism is controlled by a probe card independent from a tester without limitation of the number of control signals from the tester. A probe card and an inspection apparatus include probes to be brought into contact with electrodes of inspection targets and a power supply channel electrically connecting the probes to a tester. The automatic switching mechanism divides each of the power supply channels into a plurality of power supply wiring portions, which are respectively connected to the probes; and shuts off the power supply wiring responsive to electrical fluctuation such as overcurrent. An electrical fluctuation detection mechanism detects an electrical fluctuation due to a defective product among the inspection targets. A control mechanism, responsive to detection of an electrical fluctuation, shuts off the power supply wiring portion if the electrical fluctuation is caused by the automatic switching mechanism.
    • 自动切换机构由独立于测试仪的探针卡控制,而不受来自测试仪的控制信号的数量的限制。 探针卡和检查装置包括要与检查对象的电极接触的探针和将探针电连接到测试器的电源通道。 自动切换机构将各个电源通道分成多个电源配线部分,分别连接到探头; 并且响应于诸如过电流的电波动来关断电源布线。 电波动检测机构检测检查对象中的不良品的电波动。 如果由自动切换机构引起电气波动,则响应于电波动的检测的控制机构切断电源布线部。