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    • 1. 发明授权
    • Tilt error reducing aspherical single lens homogenizer
    • 倾斜误差减小非球面单透镜均质器
    • US07193791B2
    • 2007-03-20
    • US10973614
    • 2004-10-27
    • Takayuki HiraiKeiji Fuse
    • Takayuki HiraiKeiji Fuse
    • G02B13/20
    • G02B27/0927G02B27/0955
    • A single lens homogenizer for converting a wide, parallel, in-phase Gaussian beam into a narrow uniform-power beam and shooting an object with the narrow uniform-power beam is proposed. A tilt error induces beam deformation. A single lens homogenizer which can reduce the beam deformation induced by the tilt error is proposed. A suitable homogenizer is a convex/flat lens having a convex aspherical surface on the light source side and a flat surface on the object side. Another preferable homogenizer is a convex/convex lens having a convex surface on the light source side and a convex surface on the object side. At least one of the convex surfaces is an aspherical convex surface.
    • 提出了一种单透镜均匀器,用于将宽的,平行的同相高斯光束转换成窄的均匀功率光束,并用窄的均匀功率光束拍摄物体。 倾斜误差引起光束变形。 提出了一种可以减少由倾斜误差引起的光束变形的单透镜均质器。 合适的均化器是在光源侧具有凸非球面并且在物体侧具有平坦表面的凸/平透镜。 另一种优选的均化器是在光源侧具有凸面并且在物体侧具有凸面的凸凸透镜。 凸面中的至少一个是非球面凸面。
    • 2. 发明申请
    • Diffraction beam homogenizer optical system using wedge
    • 衍射光束均匀器光学系统采用楔形
    • US20060274418A1
    • 2006-12-07
    • US11447869
    • 2006-06-07
    • Takayuki Hirai
    • Takayuki Hirai
    • G02B5/18
    • G02B27/0944B23K26/064B23K26/0643B23K26/0648B23K26/0665
    • In a diffractive optical element (DOE) of diffracting a Gaussian distribution beam into a uniform or quasi-uniform power distribution beam on an image plane, step height errors or other manufacturing errors yield a zero-th order beam, cause interference between the diffracted beam and the zero-th order beam and invite power fluctuation. Instead of a parallel planar shape, a wedge-shaped DOE having surfaces inclining at an angle Θ in average separates the zero-th order beam from the diffraction beam, prevents the zero-th order beam from interfering with the diffraction beam and suppress power fluctuation of the diffraction beam. The wedge angle Θ satisfies an inequality Θ≧{+(D/L)}/(n−1), where D is a diameter of the incident beam, n is a refractive index of the DOE, L is a distance between the DOE and the image plane, and is an angle viewing the uniform power pattern on the image plane from the center of the DOE.
    • 在将高斯分布光束衍射到图像平面上的均匀或准均匀功率分布光束的衍射光学元件(DOE)中,步长高度误差或其他制造误差产生零级光束,导致衍射光束 和零级波束,并引起功率波动。 代替平行平面形状,具有以角度θta倾斜的表面的楔形DOE平均将零级光束与衍射光束分离,防止零级光束与衍射光束干涉并抑制功率波动 的衍射光束。 楔角Theta满足不等式Theta> = { +(D / L)} /(n-1)其中D是入射光束的直径,n是DOE的折射率, L是DOE和图像平面之间的距离,是从DOE中心观看图像平面上的均匀功率图形的角度。
    • 3. 发明授权
    • Superposing diffraction optical element homogenizer optical system
    • 叠加衍射光学元件均质器光学系统
    • US06967777B2
    • 2005-11-22
    • US11002883
    • 2004-12-03
    • Takayuki Hirai
    • Takayuki Hirai
    • G02B5/18G02B27/09G03H1/00H01S3/00G02B27/44G02B27/46
    • G02B27/0944G02B19/0014G02B19/0057
    • A DOE homogenizer including a plurality of parallel lasers emitting Gaussian beams of a diameter d along beam lines extending in a z-direction and aligning at a pitch p in an x-direction, and off-axis DOEs diffracting the Gaussian laser beams at inclining diffraction angles, making quasi-uniform density q×w (q>w) stripe-sectioned beams on an image plane I (xy-plane) which is distanced by a focal length f from the DOEs and aligning at the pitch p on an x-direction extending base line K vertical to the beam lines in an order of larger inclining diffraction angles outward and smaller inclining diffraction angles inward on extensions of the beam lines of the lasers, the DOEs diffracting the laser Gaussian beams into the quasi-uniform density stripe-sectioned beams, superposing the diffracted beams partially at edges and making a unified x-direction extending quasi-uniform beam on the image plane I.
    • DOE均质器包括多个平行激光器,沿着沿z方向延伸并以x方向的间距p排列的沿着直线d的高斯光束发射,并且偏轴DOE在倾斜衍射下衍射高斯激光束 角度,在距离DOE的距离为f的距离处的图像平面I(xy平面)上形成准均匀密度qxw(q> w)条状横截面的光束,并且在x方向上以间距p对准延伸 基线K垂直于光束线,倾斜衍射角较大的顺序向外,较小的倾斜衍射角在激光束的光束线的延伸处向内倾斜,DOE将激光高斯光束衍射为准均匀密度条状分束光束 ,将衍射光束部分地叠加在边缘,并在图像平面I上形成统一的x方向延伸的准均匀光束。
    • 4. 发明申请
    • SUPERPOSING DIFFRACTION OPTICAL ELEMENT HOMOGENIZER OPTICAL SYSTEM
    • 超光散射光学元件均质光学系统
    • US20050200958A1
    • 2005-09-15
    • US11002883
    • 2004-12-03
    • Takayuki Hirai
    • Takayuki Hirai
    • G02B5/18G02B27/09G03H1/00H01S3/00
    • G02B27/0944G02B19/0014G02B19/0057
    • A DOE homogenizer including a plurality of parallel lasers emitting Gaussian beams of a diameter d along beam lines extending in a z-direction and aligning at a pitch p in an x-direction, and off-axis DOEs diffracting the Gaussian laser beams at inclining diffraction angles, making quasi-uniform density q×w (q>w) stripe-sectioned beams on an image plane I (xy-plane) which is distanced by a focal length f from the DOEs and aligning at the pitch p on an x-direction extending base line K vertical to the beam lines in an order of larger inclining diffraction angles outward and smaller inclining diffraction angles inward on extensions of the beam lines of the lasers, the DOEs diffracting the laser Gaussian beams into the quasi-uniform density stripe-sectioned beams, superposing the diffracted beams partially at edges and making a unified x-direction extending quasi-uniform beam on the image plane I.
    • DOE均质器包括多个平行激光器,沿着沿z方向延伸并以x方向的间距p排列的沿着直线d的高斯光束发射,并且偏轴DOE在倾斜衍射下衍射高斯激光束 角度,在距离DOE的距离为f的距离处的图像平面I(xy平面)上形成准均匀密度qxw(q> w)条状横截面的光束,并且在x方向上以间距p对准延伸 基线K垂直于光束线,倾斜衍射角较大的顺序向外,较小的倾斜衍射角在激光束的光束线的延伸处向内倾斜,DOE将激光高斯光束衍射为准均匀密度条状分束光束 ,将衍射光束部分地叠加在边缘,并在图像平面I上形成统一的x方向延伸的准均匀光束。
    • 5. 发明申请
    • Tilt error reducing aspherical single lens homogenizer
    • 倾斜误差减小非球面单透镜均质器
    • US20050094288A1
    • 2005-05-05
    • US10973614
    • 2004-10-27
    • Takayuki HiraiKeiji Fuse
    • Takayuki HiraiKeiji Fuse
    • G02B13/00G02B3/02G02B13/18G02B27/09G02B27/10
    • G02B27/0927G02B27/0955
    • A single lens homogenizer for converting a wide, parallel, in-phase Gaussian beam into a narrow uniform-power beam and shooting an object with the narrow uniform-power beam is proposed. A tilt error induces beam deformation. A single lens homogenizer which can reduce the beam deformation induced by the tilt error is proposed. A suitable homogenizer is a convex/flat lens having a convex aspherical surface on the light source side and a flat surface on the object side. Another preferable homogenizer is a convex/convex lens having a convex surface on the light source side and a convex surface on the object side. At least one of the convex surfaces is an aspherical convex surface.
    • 提出了一种单透镜均匀器,用于将宽的,平行的同相高斯光束转换成窄的均匀功率光束,并用窄的均匀功率光束拍摄物体。 倾斜误差引起光束变形。 提出了一种可以减少由倾斜误差引起的光束变形的单透镜均质器。 合适的均化器是在光源侧具有凸非球面并且在物体侧具有平坦表面的凸/平透镜。 另一种优选的均化器是在光源侧具有凸面并且在物体侧具有凸面的凸凸透镜。 凸面中的至少一个是非球面凸面。