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1. 发明授权

US4596934A Electron beam apparatus with improved specimen holder 失效
标题翻译：具有改进样品架的电子束装置
公开(公告)号：US4596934A
公开(公告)日：1986-06-24
申请号：US479172
申请日：1983-03-28
申请人： Takashi Yanaka , Kazuo Ohsawa , Mitsusuke Kyogoku
发明人： Takashi Yanaka , Kazuo Ohsawa , Mitsusuke Kyogoku
IPC分类号： H01J37/141 , H01J37/20 , G21K5/10
CPC分类号： H01J37/20
摘要： In an electron beam apparatus such as a transmission electron microscope, a specimen holder device which comprises a specimen holder member and a holding rod connected thereto is withdrawably inserted in a pole-gap defined between upper and lower poles of an objective lens of the electron beam apparatus. An opening having a greater diameter than that of the pole end face is formed in the specimen holding member at a center portion for receiving therein a specimen mesh of a reduced thickness. A recess is formed in the specimen holding member at that portion which is caused to pass between the upper and lower magnetic poles upon insertion and withdrawal of the specimen to and from the interpole gap so that a region resulting from the formation of the recess has a reduced thickness as compared with the remaining region of the specimen holder member. Inter-pole gap of the objective lens is thus reduced to increase resolving power thereof. The specimen holder member can be mounted in a frame-like supporting member rotatably about an axis which extends perpendicularly to the center axis of the holding rod, while the frame-like supporting member being inclinable around the axis of the holding rod.
摘要翻译：在诸如透射电子显微镜的电子束装置中，包括样本保持器构件和与其连接的保持杆的样本保持装置可抽出地插入限定在电子束的物镜的上极和下极之间的极间隙中仪器。具有比极端面大的直径的开口形成在用于容纳厚度减小的样品网的中心部分的检体保持构件中。在试样保持构件上形成有在试样与间极间隙插入和取出之间在上部和下部磁极之间通过的部分的凹部，使得由形成凹部的区域具有与样品保持器构件的剩余区域相比减小了厚度。因此物镜的极间间隙减小以提高其分辨能力。样本保持构件可以围绕围绕保持杆的中心轴线垂直延伸的轴线可旋转地安装在框架状支撑构件中，同时框架状支撑构件围绕保持杆的轴线可倾斜。

2. 发明授权

US4458151A Electron microscope of a scanning type 失效
标题翻译：扫描型电子显微镜
公开(公告)号：US4458151A
公开(公告)日：1984-07-03
申请号：US430617
申请日：1982-09-30
申请人： Hirotami Koike , Takashi Yanaka , Masaru Watanabe
发明人： Hirotami Koike , Takashi Yanaka , Masaru Watanabe
IPC分类号： H01J37/04 , H01J37/18 , H01J37/20 , H01J37/252 , H01J37/28 , G01N23/00
CPC分类号： H01J37/04 , H01J37/18 , H01J37/20 , H01J37/28
摘要： An electron microscope of a scanning type provided with two specimen stages for allowing specimens of a large size and a small size to be selectively and interchangeably observed. The microscope comprises an electron gun, a first objective lens for observing a small size specimen, a second objective lens for observing a large size specimen, the second objective lens being disposed in axial opposition to the electron gun with the first objective lens disposed therebetween. The specimen stage for the small size specimen is disposed in the vicinity of the first objective lens, while the specimen stage for the large size specimen is disposed near the focal plane of the second objective lens. Improved stability, high resolving power and simplified manipulatability are attained.
摘要翻译：扫描型的电子显微镜具有两个试样台，用于允许选择性地和互换地观察大尺寸和小尺寸的试样。显微镜包括电子枪，用于观察小尺寸试样的第一物镜，用于观察大尺寸试样的第二物镜，第二物镜与第一物镜相对设置在电子枪的轴向上。用于小尺寸试样的样品台设置在第一物镜附近，而用于大尺寸试样的样品台设置在第二物镜的焦平面附近。实现了稳定性的提高，分辨力高，操作简便。

3. 发明授权

US4316087A Method of photographing electron microscope images on a single photographic plate and apparatus therefor 失效
标题翻译：在单张照相板上拍摄电子显微镜图像的方法及其装置
公开(公告)号：US4316087A
公开(公告)日：1982-02-16
申请号：US89371
申请日：1979-10-30
申请人： Takashi Yanaka , Kohei Shirota
发明人： Takashi Yanaka , Kohei Shirota
IPC分类号： G03B41/00 , H01J37/04 , H01J37/22 , G01N23/00
CPC分类号： H01J37/224 , H01J37/04
摘要： This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.
摘要翻译：本发明涉及一种用于获得相对较厚样品的放大增益的电子显微镜图像的单张照片的方法和装置，该照片适用于与用光学显微镜获得的相同样品的相应照片进行直接比较：其中样本或电子束被操纵以使得电子束离散地和逐步地通过样本的连续部分，并且在撞击在照相板上之前，电子束被屏蔽以消除将产生像差或其它的任何部分变形并且被可控制地引导照射到照相板的与光束通过的部分相对应的部分上。

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