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    • 2. 发明授权
    • MOS type variable capacitance device
    • MOS型可变电容器件
    • US07622760B2
    • 2009-11-24
    • US11047559
    • 2005-02-02
    • Takaoki OgawaKazuhiro TomitaKoju Aoki
    • Takaoki OgawaKazuhiro TomitaKoju Aoki
    • H01L27/12
    • H01L29/0684H01L27/0808H01L29/42312H01L29/93H01L29/94
    • An n-well is formed in a p-type semiconductor substrate. A gate insulative film is formed to the p-type semiconductor substrate and the n-well, and a gate electrode is formed on the gate insulative film. A source layer selectively diffused with n-type impurities at high concentration is formed adjacent to the gate insulative film on the surface of the p-type semiconductor substrate, the n-well and a region extending on both of them. Further, a contact layer selectively diffused with p-type impurities at high concentration is formed being spaced from the source layer. A capacitance characteristic of good linearity over a wide range relative to the inter-terminal voltage VT can be obtained by applying an inter-terminal voltage VT between the source layer and the gate electrode. A MOS type variable capacitance device capable of obtaining a characteristic of good linearity for a wide range relative to the inter-terminal voltage VT and capable of coping with the improvement of the performance of a VCO circuit, etc., as well as simple in the structure, and capable of being manufactured easily with no requirement for addition of masks and steps can be provided.
    • 在p型半导体衬底中形成n阱。 对p型半导体衬底和n阱形成栅极绝缘膜,并且在栅极绝缘膜上形成栅电极。 与p型半导体衬底的表面上的栅极绝缘膜相邻地形成与n型杂质高浓度选择性扩散的源极层,n阱以及在其上延伸的区域。 此外,形成与源极层间隔开的与高浓度的p型杂质选择性扩散的接触层。 通过在源极层和栅电极之间施加端子间电压VT,可以获得相对于端子间电压VT在宽范围内具有良好线性度的电容特性。 一种MOS型可变电容器件,其能够获得相对于端子间电压VT的宽范围的良好线性特性,并且能够应对VCO电路的性能的提高等,以及简单的 结构,并且能够容易地制造,而不需要添加掩模和步骤。
    • 3. 发明申请
    • Mos type variable capacitance device
    • Mos型可变电容器件
    • US20050127411A1
    • 2005-06-16
    • US11047559
    • 2005-02-02
    • Takaoki OgawaKazuhiro TomitaKoju Aoki
    • Takaoki OgawaKazuhiro TomitaKoju Aoki
    • H01L27/08H01L29/93H01L29/94H01L29/76
    • H01L29/0684H01L27/0808H01L29/42312H01L29/93H01L29/94
    • An n-well is formed in a p-type semiconductor substrate. A gate insulative film is formed to the p-type semiconductor substrate and the n-well, and a gate electrode is formed on the gate insulative film. A source layer selectively diffused with n-type impurities at high concentration is formed adjacent to the gate insulative film on the surface of the p-type semiconductor substrate, the n-well and a region extending on both of them. Further, a contact layer selectively diffused with p-type impurities at high concentration is formed being spaced from the source layer. A capacitance characteristic of good linearity over a wide range relative to the inter-terminal voltage VT can be obtained by applying an inter-terminal voltage VT between the source layer and the gate electrode. A MOS type variable capacitance device capable of obtaining a characteristic of good linearity for a wide range relative to the inter-terminal voltage VT and capable of coping with the improvement of the performance of a VCO circuit, etc., as well as simple in the structure, and capable of being manufactured easily with no requirement for addition of masks and steps can be provided.
    • 在p型半导体衬底中形成n阱。 对p型半导体衬底和n阱形成栅极绝缘膜,并且在栅极绝缘膜上形成栅电极。 与p型半导体衬底的表面上的栅极绝缘膜相邻地形成与n型杂质高浓度选择性扩散的源极层,n阱以及在其上延伸的区域。 此外,形成与源极层间隔开的与高浓度的p型杂质选择性扩散的接触层。 通过在源极层和栅电极之间施加端子间电压VT,可以获得相对于端子间电压VT在宽范围内具有良好线性度的电容特性。 一种MOS型可变电容器件,其能够获得相对于端子间电压VT的宽范围的良好线性特性,并且能够应对VCO电路的性能的提高等,以及简单的 结构,并且能够容易地制造,而不需要添加掩模和步骤。