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    • 10. 发明申请
    • Monolithic piezoactuator with transition region and safety layer, and use of the piezoactuator
    • 具有过渡区域和安全层的单片压电致动器,以及压电致动器的使用
    • US20110017177A1
    • 2011-01-27
    • US12445955
    • 2007-10-23
    • Masahiro InagakiHarald Johannes KastlTakami SakamotoCarsten Schuh
    • Masahiro InagakiHarald Johannes KastlTakami SakamotoCarsten Schuh
    • F02M51/00H01L41/083H02N2/04H01S4/00
    • H01L41/0838F02M51/0603Y10T29/49002
    • A piezoactuator of monolithic multilayer design with an overall stack has at least one piezoelectrically active partial stack with piezoceramic layers arranged one above another and electrode layers arranged between these layers, at least one piezoelectrically inactive terminating region arranged above the partial stack, and at least one transition region arranged between the partial stack and the terminating region. The transition region has piezoceramic layers arranged one above another and electrode layers arranged between the piezoceramic layers and the piezoceramic layers and the electrode layers are arranged on one another such that there the electric fields that can be coupled into the piezoceramic layers are changed by electrical driving of the electrode layers successively in the transition region stack direction from piezoceramic layer to piezoceramic layer, and the partial stack has a safety layer towards the transition region, wherein a crack is preferably formed in the case of mechanical overloading.
    • 具有整体堆叠的单片多层设计的压电致动器具有至少一个压电活性部分叠层,其中压电陶瓷层布置在另一个之上,并且布置在这些层之间的电极层,至少一个布置在部分叠层之上的压电非活化终止区域,以及至少一个 过渡区域布置在部分堆叠和终止区域之间。 过渡区域具有一层压电陶瓷层,并且布置在压电陶瓷层和压电陶瓷层之间的电极层彼此排列,使得可以耦合到压电陶瓷层中的电场通过电驱动而改变 的电极层在过渡区堆叠方向上连续地从压电陶瓷层到压电陶瓷层,并且部分叠层具有朝向过渡区域的安全层,其中在机械过载的情况下优选形成裂纹。